JPH042766A - Film forming apparatus - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a film forming apparatus that forms a film on a substrate using sputtering, vapor deposition, CVD, etc. The present invention relates to a film forming apparatus for forming a multilayer film having the above layers.

[Prior Art] When forming a multilayer film on a substrate, it may be necessary to form a multilayer film in which each layer has a different film formation area. An example is a magneto-optical recording medium having a recording layer made of a rare earth-transition element alloy.

FIG. 5 is a schematic cross-sectional view of the magneto-optical recording medium. On the substrate 31, a base protective layer 32, a recording layer 33, and a top protective layer 34 are sequentially laminated by a method such as sputtering, vapor deposition, or CVD. Both protective layers 32 and 34 are for protecting the recording layer N33 that contains rare earth elements and is easily oxidized, and are formed to be larger than the recording layer 33 in order to prevent oxidation from the left and right ends of the recording layer 33. , are inserted into the ends of the recording layer 33. In order to deposit the recording layer 33 and both protective layers 32 and 34 having larger areas, the relative position between the mask and the substrate 31 that prevents a portion of the substrate 31 from being deposited is changed. .

FIGS. 6(a) and 6(b) are cross-sectional views of essential parts showing the process of forming a film on a disk-shaped magneto-optical recording medium with a hole in the center using a conventional film-forming apparatus. The work 51 is provided with an outer mask 52 and an inner mask 53 that are movable in a direction perpendicular to the work 51 . Further, a protrusion 54 is formed at the center of the workpiece 51, and a protrusion 54 is formed on the substrate 31 of the magneto-optical recording medium.
It fits into a hole drilled in the center of the board 31 to hold the board 31.

When forming the base protective layer 32 on the substrate 31, as shown in FIG. 6(a), an outer peripheral mask 52 and an inner peripheral mask 53 are used.
is moved upward to position it apart above the substrate 31,
In this state, a film is formed by a method such as sputtering, vapor deposition, or CVD. As a result, the base protective layer 32 is formed over a wide area on the substrate 31.

Next, when forming the recording layer 33, as shown in FIG. 6(b).
As shown in FIG. 3, the outer circumferential mask 52 and the inner circumferential mask 53 are moved downward and positioned close to the substrate 31, and film formation is performed in this state. Since each mask 52, 53 is close to the substrate 31, the portion covered under each mask 52, 53 is not deposited, and the recording layer 33 is
The film is formed only in a narrower area than 2.

The upper protective layer 34 is formed in the same manner as the lower protective layer 32. As a result, the recording layer 33 is enveloped by both protective layers 32 and 34.

[Problem to be Solved by the Invention 1] In the conventional film forming apparatus described above, the mask is moved in order to change the film forming area, so when the mask is moved, the film forming material deposited on the mask is removed by vibration etc. There is a drawback that the mask peels off and adheres to the substrate, contaminating it, and the drive system for moving the mask becomes complicated.

An object of the present invention is to provide a film forming apparatus capable of forming a multilayer film having two or more layers each having a different film forming area without moving a mask.

[Means for Solving the Problems] The present invention capable of achieving the above object includes: a mask is integrally provided at intervals on a workpiece provided on a workpiece holding member, and a substrate disposed between the workpiece and the mask. a film forming apparatus configured to change the distance between the substrate and the mask, comprising a substrate holding member for holding the substrate and a driving means for moving the substrate holding member between the workpiece and the mask; The film forming apparatus is characterized in that the workpiece is rotatably supported by a workpiece holding member, the substrate holding member is rotatably supported by a driving means, and a rotational drive mechanism is provided for forcibly rotating the workpiece. and a film forming apparatus.

[Function] Since the mask is fixed to the workpiece and the substrate is held by a substrate holding member that is movable between the workpiece and the mask, multilayer films each having a different deposition area can be formed without moving the mask. can be formed into a film.

[Example 1] Next, an example of the present invention will be described with reference to the drawings.

First Embodiment FIGS. 1(a) and 1(b) are sectional views of essential parts showing the film forming process of a film forming apparatus according to a first embodiment of the present invention. This film forming apparatus is for manufacturing a disk-shaped magneto-optical recording medium having a through hole in the center. FIG. 1(a) shows a base protective layer 32 being formed on a substrate 31,
FIG. 1(b) shows the recording layer 33 being formed on the base protective layer 32.

The work 4 is fixed to the work holding member 10+. Grooves 5 and 6 each having an annular U-shaped cross section are carved in corresponding positions on both sides of the center of the workpiece 4.
．． 6 is provided with a hole passing through from the upper groove 5 to the lower groove 6. Reference numeral 1 denotes a cylindrical substrate holding member, which is slidably inserted into a groove 5 on the upper surface of the workpiece 4. The upper end of the substrate holding member 1 has a small diameter protrusion 1a.
is formed. On the other hand, a cylindrical slide shaft 21
is slidably inserted into a groove 6 on its free end side or on the lower surface of the workpiece 4, and a portion corresponding to the hole at the tip of the cylindrical slide shaft 21 is provided with a hole in the longitudinal direction of the cylindrical slide shaft 21. A projection is provided extending through the hole and is fixed to the bottom surface of the substrate holding member 1. The protrusion length of this protrusion is longer than the length of the hole, and therefore, in the lowered position shown in FIG. 1(a), a gap 7 is created between the bottom surface of the groove 6 and the tip of the cylindrical slide shaft 2I. Furthermore, in the raised position shown in FIG. 1(b), a gap 7□ is created between the bottom surface of the groove 5 and the substrate holding portion 1. The lower end of the cylindrical slide shaft 2□ is the slide drive shaft 3. By moving the slide drive shaft 31, which is a driving means, in the vertical direction in the figure, the substrate holding member 1 and the cylindrical slide shaft 2 are fixed to the substrate holding member 1 and the cylindrical slide shaft 2
1 can move up and down.

The substrate 31 of the magneto-optical recording medium is held by the substrate holding member 1 by fitting the through hole in its center with the protrusion 1a of the substrate holding member 1.

Further, an outer peripheral mask 8 having an inverted-shaped cross section is removably fitted to the outer edge of the work 4, and an inner peripheral mask 9 having a T-shaped cross section is removably fitted to the center of the work 4. When the substrate holding member 1 holding the substrate 31 is in the upper position due to the above-mentioned vertical movement, that is, in the position shown in FIG. The length of the vertical portion of each mask 8.9 is determined so that it is close to the top surface with almost no gap.

Next, manufacturing of a magneto-optical recording medium using this film forming apparatus will be explained.

First, the substrate 31 is held by the substrate holding member 1, and then the outer circumferential mask 8 and the inner circumferential mask 9 are attached and fixed to the workpiece 4. By driving the slide drive shaft 31, the substrate holding member l
to the lower position [Fig. 1(a)]. Then, a base protective layer 32 is formed on the substrate 31 by sputtering, vapor deposition, CVD, or the like. At this time, since the distance between the substrate 31 and each mask 8.9 is large, the base protective layer 32 is formed so as to extend around the portion below each mask 8.9.

Next, the slide drive shaft 31 is driven to hold the substrate holding member l.
is moved to an upper position [FIG. 1(b)], and a recording layer 33 is formed on the base protective layer 32 by sputtering, vapor deposition, CVD, or the like. At this time, the substrate 31 and each mask 8.
Since there is almost no gap between the mask 8 and the mask 9, the recording layer 33 is not formed under each mask 8, 9. Therefore, the recording layer 33 is formed only in a narrower area than the base protective layer 32. Furthermore, by forming the upper protective layer 34 in the same manner as the lower protective layer 32, a magneto-optical recording medium in which the recording layer 33 is wrapped by both recording layers 32 and 34 as shown in FIG. is manufactured.

The size of the gap 71.7□, that is, the length of the vertical movement stroke of the substrate holding member 1, may be determined as appropriate depending on the material and thickness of the layer to be formed, the distance between the substrate and the base material, the size of the substrate, etc. All you have to do is decide. The base material here refers to a sputtering target, a vapor deposition source, etc. for forming each layer. To give specific figures, by sputtering, using a target with a diameter of about 50 to 250 mm as a base material, a substrate 31 with a diameter of 135 mm located at a distance of about 50 to 200 mm from the target is coated with a thickness of 100 to 2000 mm. The base protective layer 32 and the top protective layer 34 are made of a dielectric material with a thickness of 100 to 2000 mm.
When a magneto-optical recording medium having a recording layer 33 made of a human-sized rare earth-transition element alloy was manufactured, if the aforementioned stroke length was about 3 to 5 mm, each protective layer 32° 34 0.5 to 1.0 m from the end of each
The film was formed to the outer side of about 100 m.

Second Embodiment FIG. 2 is a sectional view of essential parts showing the structure of a film forming apparatus according to a second embodiment of the present invention. This film forming apparatus is a film forming apparatus of the first embodiment modified so that the substrate can rotate on its own axis.

In this film forming apparatus, a workpiece 4 has a cylindrical workpiece rotation axis 1
41, and the workpiece rotation axis 14. is bearing 15
It is rotatably attached to the workpiece holding member 10□ via. Further, the lower end of the cylindrical slide shaft 2□ is rotatably supported by a slide drive shaft 32 via a bearing 13. As explained in the first embodiment, the protrusion provided at the tip of the cylindrical slide shaft 3□ passes through the hole extending from the groove 5 on the upper surface of the workpiece 4 to the groove 6 on the lower surface, and the protrusion is attached to the bottom surface of the substrate holding member 1. Therefore, when the workpiece 4 rotates, the substrate holding member 1 and the cylindrical slide shaft 22 also rotate with this rotation.

Next, a rotational drive mechanism for forcibly rotating the workpiece 4 will be explained.

A rotation drive gear 11. is attached to the upper surface of the workpiece holding member 10z via a gear shaft 121. is rotatably provided, and the teeth of the rotation drive gear Ill mesh with teeth integrally provided near the center of the outer surface of the work rotation shaft 141. Therefore, when the rotation drive gear 11□ is rotationally driven by a drive source (not shown), the workpiece rotation axis 14+ rotates, and the substrate holding member 1, the cylindrical slide shaft 2□, the workpiece 4, the outer circumference mask 8, the inner circumference mask 9, The substrate 31 also rotates as the work rotation axis 14 rotates. Similar to the film forming apparatus of the first embodiment, the substrate holding member 1 can be moved up and down by moving the slide drive shaft 32 in the vertical direction in the drawing.

Next, manufacturing of a magneto-optical recording medium using this film forming apparatus will be explained.

First, the substrate 31 is held on the substrate holding member 1, - then,
The outer circumferential mask 8 and the inner circumferential mask 9 are attached and fixed to the workpiece 4. Next, the rotation drive gear 11 is rotationally driven,
The substrate holding member 1, the workpiece 4, the outer circumferential mask 8, the inner circumferential mask 9, and the substrate 31 are rotated. While rotating, the slide drive shaft 3□ is driven up and down to move the substrate 31 up and down, as in the first embodiment, while the base protective layer 32 and the recording layer 3 are moved up and down.
3. A magneto-optical recording medium is manufactured by sequentially forming the upper protective layer 34.

If this film forming apparatus is used, the substrate and mask can be rotated during film formation, which has the advantage that the deposited layer will be more uniform, compared to a film forming apparatus in which the substrate and mask do not rotate.

Note that a chain or a belt may be used instead of the rotation drive gear 111 to rotate the work rotation shaft 14. Further, instead of each bearing 13.15, a metal or resin bearing may be used.

Third Embodiment FIG. 3 is a sectional view of essential parts showing the structure of a film forming apparatus according to a third embodiment of the present invention. This film forming apparatus is the same as the film forming apparatus of the second embodiment, with a modification such that the rotational drive gear is attached to the lower side of the workpiece holding member.

The workpiece 4 is fixed to a cylindrical workpiece rotation shaft 14 □ that is integrally provided with teeth at the lower end of the outer surface, and the workpiece rotation shaft 142 is connected to the workpiece holding member 10 via a bearing 15 .
．． is rotatably attached to. Moreover, the work holding member 10. An autorotation drive gear 112 is rotatably attached to the lower side of the workpiece via a gear shaft 12□, and the teeth of the autorotation drive gear 11□ mesh with the teeth of the workpiece rotation shaft 14i. This film forming apparatus, like the film forming apparatus of the second embodiment, rotates the rotation drive gear 112 to
The substrate holding member 1, the workpiece 4, the outer circumferential mask 8, the inner circumferential mask 9, and the substrate 31 can be rotated along with the rotation of the workpiece rotation axis 142, and a magneto-optical recording medium can be manufactured by the same method.

In this film forming apparatus, since the rotational drive gear 11□ is provided below the workpiece holding member 1o, that is, on the opposite side of the workpiece 4, the film forming material is not deposited on the rotational drive gear 11□. This has the advantage that dust generation due to the rotation of the gear on which the film-forming material is deposited can be prevented.

Note that a chain or a belt may be used instead of the rotation drive gear 11□ to rotate the workpiece rotation axis 14□. Moreover, instead of each bearing 1315, a metal or resin bearing may be used.

Fourth Embodiment FIG. 4 is a sectional view of essential parts showing the structure of a film forming apparatus according to a fourth embodiment of the present invention. This film forming apparatus is the same as the film forming apparatus of the first embodiment, modified so that the substrate can revolve and rotate.

In this film forming apparatus, a workpiece 4 has a cylindrical workpiece rotation axis 1
42, and the work rotation axis 14□ is fixed to the bearing 15.
It is rotatably attached to the workpiece holding member 104 via. In addition, the cylindrical slide shaft 22 has a bearing 13
It is rotatably attached to an inverted-shaped slide drive shaft 33 via. A gear shaft 12 is provided below the workpiece holding member 104. An autorotation drive gear 113 is rotatably attached via the. The rotational drive gear 113 is
It meshes with a toothed portion provided at the lower end of the workpiece rotation shaft 142 and a gear 16, which will be described later. Work holding member 10
4 is fixed to a cylindrical revolution shaft 19 having a cylindrical shape and an opening at the center of the side surface, and the cylindrical revolution shaft 19 is fixed to a bearing 21.
It is rotatably attached to the support column 22 via.

Further, the gear 16 is attached to the bearing 17 on the cylindrical revolving shaft 19.
The upper half of the gear 16 is engaged with the rotation drive gear 113. Further, the lower half of the gear 16 meshes with a drive gear 18 that is rotated by a drive source (not shown). A tooth portion integrally provided on the outer periphery of the cylindrical revolution shaft 19 meshes with a revolution drive gear 20 rotated by a revolution drive source (not shown). Cylindrical slide shaft 2 via bearing 13 at one end
□ is rotatably attached to the inverted-shaped slide drive shaft 3. is introduced into the interior of the cylindrical revolution shaft 19 through an opening on the side surface of the cylindrical revolution shaft 19, and the other end is rotatably attached to the slide first stage shaft 24 via a bearing 23.

When the drive gear 18 is rotationally driven, the rotation is transmitted to the gear 16, the rotation drive gear 115, and the workpiece rotation axis 14□, and the rotation is transmitted to the substrate holding member 1, the cylindrical slide shaft 22, the workpiece 4, the outer circumference mask 8, the inner circumference mask 9, The substrate 31 is the workpiece holding member 10
4, the workpiece rotates along with the rotation of the workpiece rotation axis 142. On the other hand, when the revolution drive gear 20 is rotationally driven, the cylindrical revolution shaft 19 rotates, and accordingly, the work holding member 10
4 and slide drive shaft 3. and rotates. Therefore, the substrate holding member l, the cylindrical slide shaft 2□, the workpiece 4, the outer circumferential mask 8, the inner circumferential mask 9, and the substrate 31 revolve around the cylindrical revolution axis 19. The slide drive shaft 33 is drawn into the cylindrical revolution shaft 19 and is attached to the first stage slide shaft 24 via the bearing 23, so if the first stage slide shaft 24 is driven up and down, the slide drive shaft 33
also moves up and down, and as a result, as in the first embodiment,
The substrate holding member 1 also moves up and down.

Next, a method for manufacturing a magneto-optical recording medium using this film forming apparatus will be described.

First, the substrate 31 is held on the substrate holding member 1, and then the outer circumferential mask 8 and the inner circumferential mask 9 are attached and fixed to the workpiece 4.Next, the driving gear 18 is rotationally driven to hold the substrate holding member 1 and the workpiece. 4, outer circumference mask 8, inner circumference mask 9, substrate 3
1 and rotates the revolution drive gear 20 to rotate the substrate holding member 1, the workpiece 4, the outer mask 8, and the inner mask 9.
, causing the substrate 31 to revolve. While rotating and revolving,
While moving the substrate 31 up and down by driving the first slide shaft 24 up and down, the base protective layer 32, the recording layer 33, and the top protective layer 34 are sequentially formed on the substrate 31 as in the first embodiment. As a result, a magneto-optical recording medium is formed.

Using this film deposition system, the substrate and mask can both revolve and rotate on their own axis during film formation, so the deposited layer is more uniform compared to a film deposition system in which the substrate and mask do not rotate or rotate. It has the advantage of becoming

In addition, in order to perform these rotations and revolutions, each gear l
ls, 16, 18.20, but chains or belts may be used instead. Also,
Bearings made of metal or resin may be used instead of the bearings 13°15.17, 21.23.

The embodiments of the present invention have been described above, but in the second, third, and fourth embodiments, multiple workpieces are arranged concentrically in order to simultaneously form films on multiple substrates. It may be provided so as to be arranged. However, when each workpiece is revolved, it is desirable that the center of revolution coincides with the center of the concentric circles.

The present invention is not limited to film forming apparatuses suitable for manufacturing magneto-optical recording media, but can be applied to general film forming apparatuses that form multilayer films having two or more layers each having a different film forming area. be.

〔Effect of the invention〕

As explained above, the present invention fixes the mask to the workpiece and provides a movable substrate holding member between the workpiece and the mask, so that two or more layers with different film formation areas can be formed without moving the mask. Since it is possible to form a multilayer film having layers of There is an effect.

[Brief explanation of the drawing]

1(a) and (b) are sectional views of main parts showing the film forming process of a film forming apparatus according to a first embodiment of the present invention, and FIG. 2 is a sectional view of a film forming apparatus according to a second embodiment of the present invention. Main part sectional view showing the configuration, 3rd
The figure is a cross-sectional view of main parts showing the structure of a film forming apparatus according to a third embodiment of the present invention, FIG. 4 is a cross-sectional view of main parts showing the structure of a film forming apparatus according to a fourth embodiment of the present invention, and FIG. A schematic cross-sectional view of a magneto-optical recording medium, and FIGS. 6(a) and 6(b) are cross-sectional views of main parts showing the film forming process of a conventional film forming apparatus, respectively. 1... Board holding member, 1a... Protrusion, 21
．． 2□...Cylindrical slide shaft, 31.32.3s...Slide drive shaft, 4...Workpiece, 5.6...Groove, 7+, 7a...Gap, 8...Outer periphery mask, 9... Inner circumference mask, 10+, 10*, 10s, 104... Work holding member, 1+, llt, lls... Rotation drive gear, 2+,
12i, 12s...gear shaft, 3.15.17, 21
．． 23...Bearing, 4+, 14i...Work rotation axis, 6...Gear, 18...Drive gear, 9.
...Cylindrical revolution axis, 2o...Revolution drive gear, 2.
...Support column, 1...Substrate, 3...Recording layer, 1...Workpiece, 3...Inner peripheral mask, 4...Slide first stage shaft, 2...Underlying protective layer, 4... ...Top protective layer, 2...Outer mask, 4...Protrusion. 9 prisoner mask

Claims (2)

[Claims] 1. A mask is integrally provided at intervals on a workpiece provided on a workpiece holding member, and a substrate holding member for holding a substrate disposed between the workpiece and the mask is connected to the workpiece and the substrate holding member. A film forming apparatus configured to include a drive means for moving between the masks and to change the distance between the substrate and the mask. 2. Claim 1, wherein the workpiece is rotatably supported by the workpiece holding member, the substrate holding member is rotatably supported by the driving means, and a rotational drive mechanism for forcibly rotating the workpiece is provided. The film forming apparatus described.