JPH0429666U - - Google Patents

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Publication number
JPH0429666U
JPH0429666U JP6792590U JP6792590U JPH0429666U JP H0429666 U JPH0429666 U JP H0429666U JP 6792590 U JP6792590 U JP 6792590U JP 6792590 U JP6792590 U JP 6792590U JP H0429666 U JPH0429666 U JP H0429666U
Authority
JP
Japan
Prior art keywords
tank
processing
wafer carrier
inner tank
immersed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6792590U
Other languages
English (en)
Other versions
JP2504256Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990067925U priority Critical patent/JP2504256Y2/ja
Publication of JPH0429666U publication Critical patent/JPH0429666U/ja
Application granted granted Critical
Publication of JP2504256Y2 publication Critical patent/JP2504256Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
図は本考案の一実施例を示す側断面図である。 Ｄ……処理液、１……内槽、６……整流板、７
……外槽、８……管路、９……ポンプ、１１……
流量調整弁、２０……ウエハ、２１……ウエハキ
ヤリヤ、３０……移動手段、３１……上下動シリ
ンダ、３４……左右動シリンダ、３５，３６……
ソレノイド弁。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウエハを収納するウエハキヤリヤを処理液に浸
    漬した処理槽において、前記ウエハキヤリヤを浸
    漬でき、下方に整流手段を設けた内槽と、該内槽
    を囲む外槽と、該内槽の四周からオーバフローし
    た処理液を外槽を介して前記整流手段の下方に循
    環させる循環手段と、前記ウエハキヤリヤを前記
    内槽内で水平方向及び上下方向に移動させる移動
    手段とを設けたことを特徴とする処理槽。
JP1990067925U 1990-06-28 1990-06-28 処理槽 Expired - Lifetime JP2504256Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990067925U JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990067925U JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Publications (2)

Publication Number Publication Date
JPH0429666U true JPH0429666U (ja) 1992-03-10
JP2504256Y2 JP2504256Y2 (ja) 1996-07-10

Family

ID=31601938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990067925U Expired - Lifetime JP2504256Y2 (ja) 1990-06-28 1990-06-28 処理槽

Country Status (1)

Country Link
JP (1) JP2504256Y2 (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514908A (ja) * 1974-07-01 1976-01-16 Mitsubishi Electric Corp Waiyaresujohodentatsusochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS514908A (ja) * 1974-07-01 1976-01-16 Mitsubishi Electric Corp Waiyaresujohodentatsusochi

Also Published As

Publication number Publication date
JP2504256Y2 (ja) 1996-07-10

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