JPH04336443A - 顕微鏡 - Google Patents
顕微鏡Info
- Publication number
- JPH04336443A JPH04336443A JP3107925A JP10792591A JPH04336443A JP H04336443 A JPH04336443 A JP H04336443A JP 3107925 A JP3107925 A JP 3107925A JP 10792591 A JP10792591 A JP 10792591A JP H04336443 A JPH04336443 A JP H04336443A
- Authority
- JP
- Japan
- Prior art keywords
- microscope
- light source
- light
- semiconductor chip
- reflectance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 description 21
- 239000010931 gold Substances 0.000 description 18
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 17
- 229910052737 gold Inorganic materials 0.000 description 17
- 230000003287 optical effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3107925A JPH04336443A (ja) | 1991-05-14 | 1991-05-14 | 顕微鏡 |
| KR1019920007759A KR960014968B1 (ko) | 1991-05-14 | 1992-05-08 | 현미경 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3107925A JPH04336443A (ja) | 1991-05-14 | 1991-05-14 | 顕微鏡 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04336443A true JPH04336443A (ja) | 1992-11-24 |
Family
ID=14471529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3107925A Pending JPH04336443A (ja) | 1991-05-14 | 1991-05-14 | 顕微鏡 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH04336443A (ko) |
| KR (1) | KR960014968B1 (ko) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398619A (ja) * | 1986-10-16 | 1988-04-30 | Olympus Optical Co Ltd | 顕微鏡用照明装置 |
| JPS63237428A (ja) * | 1987-03-26 | 1988-10-03 | Oki Electric Ind Co Ltd | 半導体素子のパタ−ン認識装置 |
-
1991
- 1991-05-14 JP JP3107925A patent/JPH04336443A/ja active Pending
-
1992
- 1992-05-08 KR KR1019920007759A patent/KR960014968B1/ko not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6398619A (ja) * | 1986-10-16 | 1988-04-30 | Olympus Optical Co Ltd | 顕微鏡用照明装置 |
| JPS63237428A (ja) * | 1987-03-26 | 1988-10-03 | Oki Electric Ind Co Ltd | 半導体素子のパタ−ン認識装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR920022015A (ko) | 1992-12-19 |
| KR960014968B1 (ko) | 1996-10-23 |
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