JPH044749B2 - - Google Patents

Info

Publication number
JPH044749B2
JPH044749B2 JP61210994A JP21099486A JPH044749B2 JP H044749 B2 JPH044749 B2 JP H044749B2 JP 61210994 A JP61210994 A JP 61210994A JP 21099486 A JP21099486 A JP 21099486A JP H044749 B2 JPH044749 B2 JP H044749B2
Authority
JP
Japan
Prior art keywords
reaction tube
boat
opening
jacket
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61210994A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6366928A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61210994A priority Critical patent/JPS6366928A/ja
Publication of JPS6366928A publication Critical patent/JPS6366928A/ja
Publication of JPH044749B2 publication Critical patent/JPH044749B2/ja
Granted legal-status Critical Current

Links

JP61210994A 1986-09-08 1986-09-08 熱処理装置 Granted JPS6366928A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61210994A JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61210994A JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Publications (2)

Publication Number Publication Date
JPS6366928A JPS6366928A (ja) 1988-03-25
JPH044749B2 true JPH044749B2 (it) 1992-01-29

Family

ID=16598567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61210994A Granted JPS6366928A (ja) 1986-09-08 1986-09-08 熱処理装置

Country Status (1)

Country Link
JP (1) JPS6366928A (it)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2727090B2 (ja) * 1988-09-29 1998-03-11 東京エレクトロン株式会社 縦型熱処理装置
JP2557105B2 (ja) * 1989-04-28 1996-11-27 東芝セラミックス株式会社 縦型熱処理炉
DE69221152T2 (de) * 1992-05-15 1998-02-19 Shinetsu Quartz Prod Vertikale wärmebehandlungsvorrichtung und wärmeisolationsmaterial

Also Published As

Publication number Publication date
JPS6366928A (ja) 1988-03-25

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