JPH0454998B2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field The present invention is applicable to carbon dioxide laser, YAG laser,
This relates to a laser device using an excimer laser or the like.

Conventional structure and its problems In loser devices that use invisible lasers such as carbon dioxide lasers, visible lasers such as helium neon lasers are superimposed on them for reasons of operability and safety. .

FIG. 1 shows a commonly used method of superimposing a helium-neon laser on a carbon dioxide laser. In the figure, 1 indicates a carbon dioxide laser beam which is invisible light, and 2 indicates a helium neon laser beam which is visible light. Helium neon laser beam 2
is bent by an annular mirror 3 placed at 45 degrees so as to wrap around the carbon dioxide laser beam 1,
It is guided to a condensing system 4 and focused on a focal point 5.

In this case, the light guide path from the carbon dioxide laser oscillator to the condensing system 4, such as a lens, is covered with a metal or non-metal tube for safety, so that it does not come into direct contact with the human body.

The above-mentioned light guide path is usually within 1 m, and the metal/nonmetal cover covering the light guide path is rarely removed. However, some light guide paths are long, ranging from 4m to 5m.
A point distant by m may be a processing point. Although the light guide path is covered with a cover, it is necessary to oscillate and adjust the carbon dioxide laser with the cover removed.

At this time, the human body could be accidentally exposed to carbon dioxide laser light, which was extremely dangerous.

Purpose of the Invention The present invention solves the above-mentioned drawbacks of the conventional art, and is intended to solve the problem when a moving object such as a human body attempts to cross the optical path from the laser oscillator to the focusing optical system, especially when a moving object such as a human body tries to cross the optical path around the focusing system on the laser oscillator side. However, the purpose is to provide a highly safe laser device that does not expose the human body to high-power invisible laser light.

Structure of the Invention The present invention achieves the above object, and includes an invisible laser light source that emits an invisible laser beam, a visible laser light source that emits a visible laser beam, and a predetermined combination of the invisible laser beam and the visible laser beam. a condensing optical system that condenses light onto a condensing surface; a cover means that covers at least a part of the optical path of the invisible laser beam; and a cover means that is installed in the optical path of the invisible laser beam and the visible laser beam and includes the invisible laser. a superimposing means for superimposing light and a visible laser beam; a visible light separation/deflection means for separating the visible light and deflecting the separated visible light so as to substantially follow the periphery of the superimposed optical path; It comprises at least one detection means disposed at a position where the deflected visible light is incident, and a selection means for receiving a signal from the detection means and selectively causing the invisible laser light to reach a converging surface. In the laser device, when the cover means is opened and a moving object approaches in the direction of the optical path of the superimposed light across the optical path of the separated and deflected visible light, the detection means sends out the laser beam. By the signal
The laser device is characterized in that the selection means does not allow the invisible light to reach a condensing surface.

DESCRIPTION OF EMBODIMENTS FIG. 2 shows a schematic diagram of a laser device that is an embodiment of the present invention.

In the figure, 6 is a carbon dioxide laser oscillator that generates a high-power invisible laser beam, 7 is a helium neon laser oscillator that generates a visible laser beam,
8 is a mirror that serves to superimpose the visible laser beam on the invisible laser beam and at the same time split a part of the visible laser beam, 9 is the object to be irradiated, and 4 is the mirror that is irradiated with the invisible laser beam superimposed with the visible laser beam. A condensing system for condensing light onto an object to be irradiated; 10 is a high-speed detector such as a phototransistor, which detects the visible laser light split by mirror 8; 11 processes a signal from the detector 10 and drives a relay; The logic/drive circuit 12 is a shutter operated by a signal from the logic drive circuit 11.

FIG. 3 shows an enlarged view of the mirror 8 of this embodiment.
An aperture 14 is provided in the center of the mirror 8, and the invisible laser beam 15 passes through the aperture 14 from left to right in the drawing. Further, the mirror 8 has a disk shape, and is further provided with an inclined surface 16 that descends toward the outside in the radial direction near the periphery.

The visible laser beam 17 is incident on the mirror 8 from a direction perpendicular to the invisible laser beam 15, and the visible laser beam 17 enters the mirror 8 from the direction perpendicular to the invisible laser beam 15.
The visible laser beam 18 is superimposed to surround the invisible laser beam 15, which is convenient during processing.

On the other hand, the inclined surface 16 of the visible laser beam 17
The reflected visible laser light 19 is detected by one or more detectors 10 shown in FIG. In addition,
In this embodiment as well, a cover (not shown) is provided on the optical path between the carbon dioxide laser oscillator 6 and the condensing system 4, as in the conventional example.

Next, the operation of this embodiment will be explained using FIG. First, drive the carbon dioxide laser oscillator 6,
While emitting the invisible laser beam, a cover (not shown) between the mirror 8 and the condensing system 4 is opened for the purpose of adjusting the optical axis of the mirror 8 or the like. In a normal state, that is, in a state where the visible laser light 19 is not blocked so that a moving object enters the optical path of the invisible laser light 15, the laser light emitted from the carbon dioxide laser oscillator 6 is blocked by the shutter 12. (ie, shutter 12 is open), helium-neon laser light is superimposed by mirror 8, and is irradiated onto object 9 by condensing system 4.

At this time, a part of the helium-neon laser beam from the helium-neon laser oscillator 7 is reflected by the inclined surface of the mirror 8 (indicated by 16 in FIG. 3) and introduced into the detector 10, and a detection signal is constantly sent out. ing.

In this normal state, the carbon dioxide laser oscillator 6
is excited, and the shutter 12 placed outside the output window of the oscillator is open.

If the helium neon light guided to the detector is blocked by a human body or the like on the way and is not guided to the detector 10, the signal from the detector 10 will be zero. At this time, the shutter 2 is immediately closed by the logic/drive circuit 11, and the high-power carbon dioxide laser light is cut off, so that the human body is not exposed to the high-power laser light.

The same effect can be obtained by operating the logic/drive circuit 11 to stop excitation of the carbon dioxide laser oscillator 6 instead of closing the shutter 12 when the helium neon light is no longer introduced into the detector 10. .

To increase safety, a plurality of detectors 10 receive the helium neon light, and when the signal from any one detector 10 becomes zero, the excitation means is stopped or the shutter is closed. It may be done so that it occurs instantaneously.

Logic/drive circuit 1 that processes the signal of the detector 10
A specific circuit diagram of No. 1 is shown in FIG.

The figure shows a case where two detectors 10 are provided. A signal from a phototransistor 20 that detects helium neon laser light is processed by an AND circuit 21, and a signal from a transistor 22 drives a relay 23 to open and close the shutter 12. Now, suppose that the phototransistor 20 having the above configuration is placed, for example, 10 cm outside the condensing system 4. It takes about 100 msec or more for normal human body movement to block the helium neon light entering the phototransistor 20 and cross the carbon dioxide laser light, so in the case of the circuit configuration shown in Figure 4, the relay 23 is activated during this time. I was able to close shutter 12.

Effects of the Invention As described above, the present invention allows the optical path of invisible laser light between the mirror and the focusing system, which is frequently opened for adjustment, to be guided to the detector while the laser oscillator remains in oscillation. The optical path of the visible laser beam that is transmitted is set, and if a worker, etc. crosses the optical path of the visible laser beam and approaches the invisible laser beam between the mirror and the condensing system, the oscillation of the laser oscillator is stopped. By operating the shutter and preventing invisible laser light from being guided between the mirror and the focusing system, workers are prevented from being exposed to high-power invisible laser light, and safety is ensured. Realize a laser device with high performance.

[Brief explanation of drawings]

Fig. 1 is a diagram explaining a conventional method of superimposing a helium neon laser on a carbon dioxide laser, Fig. 2 is a schematic diagram of a laser device that is an embodiment of the present invention, and Fig. 3 is a diagram illustrating a method of superimposing a helium neon laser on a carbon dioxide laser. FIG. 4, which is an enlarged view of the mirror portion of one embodiment, is a specific circuit diagram of the logic/drive circuit of one embodiment of the present invention. 1... Carbon dioxide laser beam, 2... Helium neon laser beam, 3... Annular mirror, 4...
Condenser mirror, 5... Focus, 6... Carbon dioxide laser oscillator, 7... Helium neon laser oscillator, 8
... Mirror (optical component), 9 ... Irradiated object, 10
...Detector, 11...Logic/drive circuit, 12...
Shutter, 13...Optical axis, 14...Aperture, 1
5... Invisible laser beam, 16... Inclined surface, 17
...Visible laser light, 18,19...Visible laser reflected light, 20...Phototransistor, 21
...AND circuit, 22...transistor, 23...
…relay.

Claims (1)

[Scope of Claims] 1. An invisible laser light source that emits an invisible laser beam, a visible laser light source that emits a visible laser beam, and condensing the invisible laser beam and the visible laser beam onto a predetermined condensing surface. a condensing optical system that covers at least a part of the optical path of the invisible laser beam, and a cover means that is installed in the optical path of the invisible laser beam and the visible laser beam and superimposes the invisible laser beam and the visible laser beam. a superimposing means for separating the visible light and deflecting the separated visible light so that the separated visible light substantially follows the periphery of the superimposed optical path; at least one detection means arranged at a position to
and a selection means for receiving a signal from the detection means and selectively causing the invisible laser light to reach a condensing surface, wherein the cover means is opened and the optical path of the superimposed light is changed. When a moving object approaches in the direction of , crossing the optical path of the separated and deflected visible light, the selection means does not allow the invisible light to reach a condensing surface due to the signal sent by the detection means. A laser device featuring: 2. When the cover means is opened and a moving object approaches across the optical path of the visible light separated and deflected in the direction of the optical path of the superimposed light, the selection means is activated by the signal sent by the detection means to select the non-visible light source. 2. The laser device according to claim 1, wherein the laser device is controlled so as not to emit invisible laser light. 3. When the cover means is opened and a moving object approaches across the optical path of the visible light separated and deflected in the direction of the optical path of the superimposed light, the selection means is activated by the signal sent by the detection means to select the invisible laser. 2. The laser device according to claim 1, wherein the optical path of the light is blocked. 4. The superimposing means and the visible light separation/deflection means are provided on the same optical component, and the superimposing means is provided at the center of the optical component and has an opening for passing invisible laser light, and an opening around the opening. and a first reflecting section provided to reflect the visible laser light, and the separating means is a second reflecting section provided around the first reflecting section. The laser device according to item 2 or 3.