JPH0459680A - Production of glazed base board - Google Patents

Production of glazed base board

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Publication number
JPH0459680A
JPH0459680A JP17289690A JP17289690A JPH0459680A JP H0459680 A JPH0459680 A JP H0459680A JP 17289690 A JP17289690 A JP 17289690A JP 17289690 A JP17289690 A JP 17289690A JP H0459680 A JPH0459680 A JP H0459680A
Authority
JP
Japan
Prior art keywords
photosensitive resin
glass paste
base plate
glaze
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17289690A
Other languages
Japanese (ja)
Inventor
Hideaki Uehara
秀秋 上原
Yoshiyuki Horibe
堀部 芳幸
Toshiaki Ishimaru
敏明 石丸
Yukihisa Hiroyama
幸久 広山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP17289690A priority Critical patent/JPH0459680A/en
Publication of JPH0459680A publication Critical patent/JPH0459680A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To increase positional accuracy of partial glaze by applying a glass paste containing a specific photosensitive resin composition and inorganic glass powder on a ceramic base plate, masking a glaze pattern part, irradiating light, developing and baking. CONSTITUTION:Glass paste 2 is obtained by mixing 0.3-2.1cm<3> photosensitive resin composition composed of a positive-type photosensitive resin, a sensitizer, a plasticizer, a binder resin and a heat stabilizer, etc., and exposed part becomes to be soluble in a developing solution with 1cm<3> glass powder having <=5mum averaged granular diameter and a solvent. Next, said glass paste 2 is applied on a ceramic base plate 1 having <=1mumRa surface roughness and dried, then desired glaze pattern part in the resultant paste layer is masked by a photomask 3, thus light 4 is irradiated and resultant system is developed to obtain a base plate form having not-exposed glass paste 6. Then, said plate is baked to afford the aimed glazed base plate 7.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明はサーマルヘッド等に用いるグレーズド基板に関
し、特にセラミック基板表面に部分的にグレーズ層を形
成したグレーズド基板の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a glazed substrate used for a thermal head or the like, and particularly to a method for manufacturing a glazed substrate in which a glazed layer is partially formed on the surface of a ceramic substrate.

(従来の技術) 従来、セラミック表面の一部にグレーズ層を形成した部
分グレーズド基板は、主にスクリーン印刷でグレーズ層
を形成し、焼付けて作成していた。
(Prior Art) Conventionally, partially glazed substrates in which a glaze layer is formed on a portion of a ceramic surface have been produced mainly by forming a glaze layer by screen printing and then baking the glaze layer.

しかし、スクリーン印刷はメツシュを使用するため、グ
レーズラインの直線性が悪く、これが原因で部分グレー
ズ頂上部の凹凸が生じるという欠点があった。この欠点
を除くため目開きの小さいメツシュを使用すると所定の
グレーズ厚みを出すために何度も印刷乾燥を繰り返す必
要があった。例えば、60メツシユで60μmの乾燥膜
厚が得られていたグレーズペーストを用いて400メツ
シユのスクリーンを使用すると、60μmの乾燥厚みを
得るのに4回印刷、乾燥を繰シ返す必要があった。
However, since screen printing uses a mesh, the linearity of the glaze line is poor, which has the disadvantage of causing unevenness at the top of the partial glaze. If a mesh with a small opening was used to eliminate this drawback, it would be necessary to repeat printing and drying many times in order to obtain a predetermined glaze thickness. For example, when using a 400-mesh screen with a glaze paste that had a dry film thickness of 60 μm with 60 meshes, it was necessary to repeat printing and drying four times to obtain a dry film thickness of 60 μm.

これらスクリーン印刷法の欠点を取シ除くために特開昭
63−71365号公報では基材上に転写用のグレース
パターン1!r:あらかじめ形成しておき、このパター
ンをセラミック基板上に加圧転写する方法が開示されて
いる。
In order to eliminate these drawbacks of the screen printing method, Japanese Patent Application Laid-Open No. 63-71365 discloses a grace pattern 1 for transfer onto a base material! r: A method is disclosed in which a pattern is formed in advance and then transferred under pressure onto a ceramic substrate.

(発明が解決しようとする課題) しかし、特開昭63−71365号公報に開示されてい
る方法では、ファインラインの形成と厚いグレーズ層を
一度に形成するという点は改善されるものの、グレーズ
ラインの位置精度が低下するという欠点があった。すな
わち、−度基材に形成したパターンをセラミック基板に
加圧、転写するため位置ずれが避けられなかった。
(Problems to be Solved by the Invention) However, although the method disclosed in JP-A-63-71365 improves the ability to form fine lines and form a thick glaze layer at the same time, The disadvantage was that the positional accuracy of That is, since the pattern formed on the substrate is pressed and transferred onto the ceramic substrate, misalignment is unavoidable.

本発明ハ9部分グレーズのファインライン性にすぐれ、
厚いグレーズ層を一度に形成でき、さらに部分グレーズ
の位置精度が高いグレーズド基板の製造法を提供するも
のである。
The present invention has excellent fine line properties of the 9-part glaze,
The present invention provides a method for manufacturing a glazed substrate in which a thick glaze layer can be formed at one time and the positional accuracy of partial glazes is high.

(課題を解決するための手段) 本発明は、jI光された部分が現像液に可溶となる感光
性樹脂組成物及び無機ガラス粉末を含むガラスペースト
をセラミック基板に塗布後、所望のグレースパターン部
だけをマスキングして光を照射し9次いで現像後焼成す
ることを特徴とするグレーズド基板の製造方法に関する
(Means for Solving the Problems) The present invention provides a method for forming a desired gray pattern after coating a ceramic substrate with a glass paste containing a photosensitive resin composition and an inorganic glass powder in which the illuminated portion is soluble in a developer. The present invention relates to a method for manufacturing a glazed substrate, which is characterized by masking only a portion thereof, irradiating it with light, developing it, and then baking it.

本発明において用いる感光性樹脂組成物は。The photosensitive resin composition used in the present invention is as follows.

船釣にポジ型感光性樹脂組成物として公知のものが使用
できる。
For boat fishing, known positive photosensitive resin compositions can be used.

そのようなポジ型感光性樹脂組成物には9例えば、テト
ラヒドロキシベンゾフェノン、ビスフェノール型エポキ
シ樹脂、ポリビニルフェノール等のOH基を有する化合
物と1.2−ナフトキノン−2−ジアジド−5−スルホ
ニルクロリドと全反応させて得られるナフトキノンジア
ジド感光基を有する化合物、O−ニトロベンジルアクリ
レート/メタクリル酸メチル/アクリル酸共重合体等の
側鎖に0−ニトロベンジル感光基を有する高分子化合物
、ポリアルデヒド樹脂、ポリカーボネート樹脂等の強酸
によシ分解する樹脂と光によシ強酸を発生するオニウム
塩化合物との組み合わせ、側鎖にビニル基を有するアク
リルポリマとチオール基を有するモノカルボン酸との組
み合わせ等を主成分とし、必要に応じて増感剤、可そ剤
、バインダ樹脂、熱安定剤等を含んだものが知られてい
る。
Such positive photosensitive resin compositions include, for example, a compound having an OH group such as tetrahydroxybenzophenone, bisphenol type epoxy resin, polyvinylphenol, 1,2-naphthoquinone-2-diazide-5-sulfonyl chloride and Compounds with naphthoquinone diazide photosensitive groups obtained by reaction, polymeric compounds with O-nitrobenzyl photosensitive groups in side chains such as O-nitrobenzyl acrylate/methyl methacrylate/acrylic acid copolymers, polyaldehyde resins, polycarbonates The main components are a combination of a resin that decomposes with a strong acid and an onium salt compound that generates a strong acid when exposed to light, or a combination of an acrylic polymer with a vinyl group in the side chain and a monocarboxylic acid with a thiol group. It is known to contain a sensitizer, a softening agent, a binder resin, a heat stabilizer, etc. as necessary.

これらの樹脂組成物は通常溶剤に溶解して使用される。These resin compositions are usually used after being dissolved in a solvent.

溶剤は感光性樹脂組成物と相客性の良いものであれば特
に制限はない。無機ガラス粉末は。
The solvent is not particularly limited as long as it is compatible with the photosensitive resin composition. Inorganic glass powder.

良好な部分グレースパターンを得るために粉末の平均粒
径が5μm以下のものが好ましい。
In order to obtain a good partial gray pattern, it is preferable that the powder has an average particle size of 5 μm or less.

このガラス粉末に感光性樹脂組成物及び該樹脂組成物の
溶剤を加えてガラスペーストを作成するが、感光性樹脂
組成物をあまり多く添加すると焼付けてグレースパター
ンを得る時忙ガラスの濃度が低いためガラスのはしけが
起こってし塘う。また、感光性樹脂が少な過ぎるとペー
スト化が困難になる。このため、感光性樹脂組成物の添
加量はガラス粉末の容積1 cm3に対して好ましくは
0.3 cm3からZ1cm’であり、さらに好ましく
は0.4dから1、5 am’である。また、後述する
それぞれの塗布法に適した粘度、チクントロピー性など
をガラスペーストに付与するために溶剤が加えられる。
A photosensitive resin composition and a solvent for the resin composition are added to this glass powder to create a glass paste, but if too much photosensitive resin composition is added, the concentration of the glass will be low when baking to obtain a grace pattern. A glass barge appears and disappears. Furthermore, if the amount of photosensitive resin is too small, it will be difficult to form a paste. Therefore, the amount of the photosensitive resin composition added is preferably from 0.3 cm3 to Z1 cm', more preferably from 0.4 d to 1.5 am' per cm3 of volume of the glass powder. Further, a solvent is added to give the glass paste a viscosity, chikuntropy, etc. suitable for each coating method described below.

またセラミック基板はアルミナ基板やhlN基板、ベリ
リヤ基板等が用いられる。また、セラミック基板の表面
粗さが小さい方が良好なグレーズ層くターンが得られ、
好ましくld1μmRa以下である。
Further, as the ceramic substrate, an alumina substrate, an hlN substrate, a beryllia substrate, or the like is used. In addition, the smaller the surface roughness of the ceramic substrate, the better the glaze layer and turn.
Preferably, ld is 1 μmRa or less.

セラミック基板にガラスペーストラ均一に塗布する方法
は、スクリーン印刷法、ディッピング法。
Screen printing and dipping methods are used to uniformly apply glass paste to ceramic substrates.

ロールコータ法、スピンコータ法、転写法等が用いられ
るが、スクリーン印刷法が厚く印刷できて好ましい。
A roll coater method, a spin coater method, a transfer method, etc. are used, but a screen printing method is preferable because it can print thickly.

光の照射は所望のグレーパターン部以外の部分が真光さ
れるようにグレースパターン部だけを光が透過しないフ
ィルム等で被覆(マスキング)して行われる。マスキン
グの方法は特忙制限はない。
Light irradiation is performed by covering (masking) only the gray pattern portion with a film or the like that does not transmit light so that the portions other than the desired gray pattern portion are exposed to direct light. There are no special restrictions on masking methods.

光は感光が充分にできる波長及び量を選定する。The wavelength and amount of light is selected to provide sufficient photosensitivity.

光照射後必要に応じてボストベークを行うのが好ましい
。次いでマスクを撤去し、充分に現像、水洗を行い、露
光されない部分のガラスペーストを除去する。現像液は
感光性樹脂組成物用の酸、アルカリ、有機溶剤等が用い
られ、スプレー等により付着しているガラス粉末をも除
去する。最後に焼成して基板にグレースパターンを焼付
けるが、グレースパターンに欠点が生じないようにする
必要があり、蓋付の入れものに設置して焼付けるのが好
ましい。
After the light irradiation, it is preferable to perform a post bake as necessary. Next, the mask is removed, and the glass paste is thoroughly developed and washed with water to remove the glass paste in the areas that will not be exposed to light. The developer used is an acid, alkali, organic solvent, etc. for photosensitive resin compositions, and adhering glass powder is also removed by spraying or the like. Finally, it is fired to print a grace pattern on the substrate, but it is necessary to prevent defects from occurring in the grace pattern, so it is preferable to place it in a container with a lid and print it.

本発明の例を図面を用いて説明する。第1図に示したセ
ラミック基板l上に感光性樹脂組成物とガラス粉末及び
溶剤からなるガラスペースト2を塗布し、その後乾燥し
てから第2図に示すように所望のグレースパターン部分
以外を露光できるように作製したフォトマスク3を重ね
光4を照射する。
An example of the present invention will be explained using the drawings. A glass paste 2 consisting of a photosensitive resin composition, glass powder, and a solvent is applied onto the ceramic substrate l shown in Fig. 1, and after drying, the parts other than the desired gray pattern are exposed as shown in Fig. 2. A photomask 3 which has been prepared in such a manner is overlapped and light 4 is irradiated.

次に露光部分を洗い落とし、第3図に示すように露光さ
れないガラスペースト6を有する基板形状を得る。これ
を電気炉等で焼成してブレース層8を有するグレーズド
基板7を得る。
Next, the exposed portion is washed off to obtain a substrate shape having the glass paste 6 not exposed to light as shown in FIG. This is fired in an electric furnace or the like to obtain a glazed substrate 7 having a brace layer 8.

(実施例) 以下本発明の詳細な説明する。(Example) The present invention will be explained in detail below.

実施例 感光性樹脂組成物の溶液として、以下のものを調整した
Examples The following solutions of photosensitive resin compositions were prepared.

(1) 0−ニトロベンジルアクリレート/メタクリル
酸メチル/アクリル酸(60/30/10重量比)共重
合体(分子量約3万)100重量部、ベンジルジメチル
ケタール10重量部及び溶剤としてのプロピレングリコ
ールモノメチルエーテルアセテート60重量部。
(1) 100 parts by weight of 0-nitrobenzyl acrylate/methyl methacrylate/acrylic acid (60/30/10 weight ratio) copolymer (molecular weight approximately 30,000), 10 parts by weight of benzyl dimethyl ketal, and propylene glycol monomethyl as a solvent. 60 parts by weight of ether acetate.

■ メタクリル酸メチル/アリルメタクリレート165
735重量比)共重合体(分子量約5万)100重量部
、メルカプトコノ・り酸30重量部。
■ Methyl methacrylate/allyl methacrylate 165
735 weight ratio) copolymer (molecular weight approximately 50,000), 100 parts by weight, and 30 parts by weight of mercaptoconophosphoric acid.

ベンゾフェノン10重量部、44′−ビス(ジエチルア
ミノ)ベンゾフェノン0.3重量部及びプロピレングリ
コールモノメチルエーテルアセテート60重量部。
10 parts by weight of benzophenone, 0.3 parts by weight of 44'-bis(diethylamino)benzophenone and 60 parts by weight of propylene glycol monomethyl ether acetate.

■ レゾルシノールモノメタクリレート/2−エチルへ
キシルメタクリレート(70/30重量比)共重合体1
00重量部、ベンジルジメチルケタール10重量部及び
プロピレングリコールモノメチルエーテルアセテート6
0重量部。
■ Resorcinol monomethacrylate/2-ethylhexyl methacrylate (70/30 weight ratio) copolymer 1
00 parts by weight, 10 parts by weight of benzyl dimethyl ketal and 6 parts by weight of propylene glycol monomethyl ether acetate.
0 parts by weight.

■、■又は■の感光性樹脂組成物の溶液及び硼珪酸アル
ミニウム系ガラス粉末(組成は510240 mol 
%、 Altos 10 mol %、 BzOs 1
5mol!%、 CaO15mol、 MgO5mol
 %及びPbO15mo1%で平均粒径が第1表に示さ
れる)1r:第1表の割合で混合した。この混合物を捕
潰機でテレピン油(和光紬薬製試薬1級)を添加しなが
ら混練し、粘度が500Pa−8になるように調整し、
ガラスペースト1〜10番を得た。このガラスペースト
を60メツシユのスクリーンを用いて100=角でII
!Im厚で第1表に示す表面粗さを有するアルミナ基板
上に均一に塗布した。塗布後80℃20分間乾燥器内で
乾燥させた。乾燥物に幅400μm及び長さ100mm
のパターン部分以外を露光できるフィルムマスクをかぶ
せて高圧水銀灯で露光した。露光量ll″t325nm
の光に対して2000m J / am2とした。露光
後の試料を1%水酸化ナトリウム水溶液のシャワーをあ
てて現像した。現倫後、水洗し、水切シしたサンプルを
セラミック製の耐火物容器に並べ、不透明石英製の板で
蓋をした。これを電気炉中、毎時150℃の昇温速度で
1100℃まで昇温し、30分保持後炉冷した。
Solution of photosensitive resin composition of ■, ■ or ■ and aluminum borosilicate glass powder (composition is 510240 mol
%, Altos 10 mol%, BzOs 1
5mol! %, CaO15mol, MgO5mol
% and PbO15mo1%, the average particle size is shown in Table 1) 1r: Mixed at the ratio shown in Table 1. This mixture was kneaded using a crusher while adding turpentine oil (grade 1 reagent manufactured by Wako Tsumugi Pharmaceutical Co., Ltd.), and the viscosity was adjusted to 500 Pa-8.
Glass pastes Nos. 1 to 10 were obtained. Apply this glass paste to 100=II using a 60 mesh screen.
! It was uniformly coated onto an alumina substrate having a thickness of Im and a surface roughness shown in Table 1. After coating, it was dried in a dryer at 80°C for 20 minutes. Width 400μm and length 100mm for dry matter
The film was covered with a film mask that exposed areas other than the patterned areas, and exposed using a high-pressure mercury lamp. Exposure amount ll″t325nm
2000 mJ/am2 for the light. The exposed sample was developed by showering with a 1% aqueous sodium hydroxide solution. After testing, the washed and drained samples were placed in a ceramic refractory container and covered with an opaque quartz plate. This was heated to 1100° C. at a rate of 150° C./hour in an electric furnace, held for 30 minutes, and then cooled in the furnace.

冷却したサンプルのグレーズライン部分の幅、高さを評
価した結果、第2表に示すように試料番号が1.2,3
,8.9及びlOのものは良好な結果が得られた。しか
し、樹脂の量が多い4番にガラスがはじけ、逆に少ない
5番はペーストがゲル化し、ガラス粉末粒径の大きい6
番及び基板表面粗さの粗い4番は焼成後のグレーズライ
ンに不具合が生じた。
As a result of evaluating the width and height of the glaze line part of the cooled sample, the sample numbers were 1.2 and 3 as shown in Table 2.
, 8.9 and 1O gave good results. However, the glass bursts in No. 4, which has a large amount of resin, and conversely, the paste gels in No. 5, which has a small amount of resin, and No. 6, which has a large glass powder particle size, causes the paste to gel.
No. 4 and No. 4, which had a rough substrate surface, had a problem with the glaze line after firing.

第1表 第2表 比較例 硼珪酸アルミニウム系ガラス粉末(平均粒径5μm 5
iCh 40 mo/%、 A/*0310mo/%、
 B2031’5moI!%、 CaO15mot!%
、 MgO5rno1%及びPbO15mo/%)10
0重量部とエチルセルロース(関東化学1100cp)
5重量部及びテレピン油を描潰機で混合した。テレピン
油はガラスペーストの粘度が500Pa−sになるよう
に適宜加え友。このペーストを長さ100m、幅400
μmのパターンが抜いである100メツシユ、200メ
ツシュ又t−j400メツシユでエマルジョン厚み20
μmのスクリーンを用いて100鵡角×lIm厚で表面
粗さ0.4μmRaのアルミナ基板上に印刷した。印刷
物を乾燥機甲100℃20分間乾燥した後、セラミック
製耐火物容器に韮べて不透明石英の板で蓋をして電気炉
中、毎時150℃の昇温速度で1100℃まで昇温し、
30分保持後炉冷した。冷卸したサンプルのグレーズラ
イン部分の幅、高さを評価した結果、100メツシユの
スクリーンを用いたときに幅が600μm±90μm及
び高さが40μm±6μmであ、Q、200メツシユの
スクリーンを用いたときは2幅500μm±40μm及
び高さが28μm±3μm、4QQメツシュのスクリー
ンを用いたときは440μm±25μm及び高さが15
μm±2μmであった。
Table 1 Table 2 Comparative Examples Aluminum borosilicate glass powder (average particle size 5 μm 5
iCh 40 mo/%, A/*0310 mo/%,
B2031'5moI! %, CaO15mot! %
, MgO5rno1% and PbO15mo/%) 10
0 parts by weight and ethyl cellulose (Kanto Kagaku 1100cp)
5 parts by weight and turpentine were mixed in a drawer. Add turpentine oil as appropriate so that the viscosity of the glass paste becomes 500 Pa-s. This paste is 100m long and 400m wide.
Emulsion thickness is 20 with 100 mesh, 200 mesh, or 400 mesh with micrometer pattern.
Using a μm screen, printing was performed on an alumina substrate with a surface roughness of 0.4 μmRa and a thickness of 100 square meters×1 Im. After drying the printed matter at 100°C for 20 minutes in a drying machine, it was placed in a ceramic refractory container, covered with an opaque quartz plate, and heated to 1100°C at a rate of 150°C per hour in an electric furnace.
After holding for 30 minutes, the mixture was cooled in the furnace. As a result of evaluating the width and height of the glaze line part of the cooled sample, the width was 600 μm ± 90 μm and the height was 40 μm ± 6 μm when using a 100 mesh screen. When using a 4QQ mesh screen, the width was 500 μm ± 40 μm and the height was 28 μm ± 3 μm, and when a 4QQ mesh screen was used, the screen was 440 μm ± 25 μm and the height was 15 μm.
It was μm±2 μm.

実施例で評価が良かった試料番号1,2,3゜8.9及
び10に比べて比較例ではグレーズラインの幅精度及び
高さ精度がいずれも劣っていた。
Compared to Sample Nos. 1, 2, 3° 8.9, and 10, which were evaluated well in the Examples, the width accuracy and height accuracy of the glaze line in the Comparative Example were poor in both.

また、比較例中9幅精度の最も良かった400メツシユ
スクリーン使用の場合では、グレーズ高さが15μmと
低く、1.Vに高さの高いグレーズラインを形成するこ
とはできなかった。
In addition, in the case of using a 400 mesh screen, which had the best width accuracy among the comparative examples, the glaze height was as low as 15 μm, and the glaze height was as low as 1. It was not possible to form a high glaze line in the V.

(発明の効果) 本発明によれば部分グレーズのファインライン性にすぐ
れ、厚いグレーズ層を一度に形成でき。
(Effects of the Invention) According to the present invention, a partial glaze has excellent fine line properties and a thick glaze layer can be formed at once.

さらに部分グレーズの位置精度が高いグレーズド基板が
容易に得られる。
Furthermore, a glazed substrate with high positional accuracy of the partial glaze can be easily obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のガラスペーストを塗布したセラミック
基板の斜視図、第2図#′iフォトマスクを用いてガラ
スペーストの不要部分に光を照射する説明図、第3図は
露光部分を除去したセラミック基板の斜視図及び第4図
はグレーズド基板の斜視図〆−ある。 符号の説明 1・・・セラミック基板   2・・・ガラスペースト
3・・・フォトマスク    4・・・光5・・・乾燥
後のガラスペースト 6・・・露光されないガラスペースト 7・・・グレーズド基板   8・・・グレーズ層代理
人 弁理士 若 林 邦手配 第1図 第3図 第2図 第4図
Figure 1 is a perspective view of a ceramic substrate coated with the glass paste of the present invention, Figure 2 is an explanatory diagram of irradiating light onto unnecessary areas of the glass paste using a #'i photomask, and Figure 3 is an illustration of removing the exposed areas. FIG. 4 is a perspective view of a glazed ceramic substrate. Explanation of symbols 1... Ceramic substrate 2... Glass paste 3... Photomask 4... Light 5... Glass paste after drying 6... Glass paste not exposed to light 7... Glazed substrate 8 ...Glaze layer agent Patent attorney Wakabayashi Japanese arrangement Figure 1 Figure 3 Figure 2 Figure 4

Claims (1)

【特許請求の範囲】[Claims] 1、露光された部分が現像液に可溶となる感光性樹脂組
成物及び無機ガラス粉末を含むガラスペーストをセラミ
ック基板に塗布後、所望のグレースパターン部だけをマ
スキングして光を照射し、次いで現像後焼成することを
特徴とするグレーズド基板の製造方法。
1. After coating a ceramic substrate with a glass paste containing a photosensitive resin composition and inorganic glass powder that makes the exposed area soluble in a developer, mask only the desired gray pattern area and irradiate it with light. A method for producing a glazed substrate, which comprises baking after development.
JP17289690A 1990-06-29 1990-06-29 Production of glazed base board Pending JPH0459680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17289690A JPH0459680A (en) 1990-06-29 1990-06-29 Production of glazed base board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17289690A JPH0459680A (en) 1990-06-29 1990-06-29 Production of glazed base board

Publications (1)

Publication Number Publication Date
JPH0459680A true JPH0459680A (en) 1992-02-26

Family

ID=15950347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17289690A Pending JPH0459680A (en) 1990-06-29 1990-06-29 Production of glazed base board

Country Status (1)

Country Link
JP (1) JPH0459680A (en)

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