JPH0464567U - - Google Patents
Info
- Publication number
- JPH0464567U JPH0464567U JP10955590U JP10955590U JPH0464567U JP H0464567 U JPH0464567 U JP H0464567U JP 10955590 U JP10955590 U JP 10955590U JP 10955590 U JP10955590 U JP 10955590U JP H0464567 U JPH0464567 U JP H0464567U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- ion milling
- metal atoms
- magnet
- argon gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Description
第１図は、本考案のイオンミリング装置におけ
る構成断面図。
１……試料、２……試料支持台、３……イオン
ガス、４……アルゴンガス噴射口、５……真空排
気口、６……マグネツト。
FIG. 1 is a cross-sectional view of the configuration of the ion milling apparatus of the present invention. 1... Sample, 2... Sample support stand, 3... Ion gas, 4... Argon gas injection port, 5... Vacuum exhaust port, 6... Magnet.
Claims (1)
イオンを試料表面に衝撃照射し、試料から金属原
子をたたき出し薄くする際に、アルゴンガス気流
中で運ばれた金属原子をマグネツトにより吸着し
、強制的に排除することを特徴とするイオンミリ
ング装置。 In ion milling equipment for thin film sample preparation,
An ion milling device characterized by bombarding the surface of a sample with ions to knock out metal atoms from the sample to make it thinner.The metal atoms carried in the argon gas stream are adsorbed by a magnet and forcibly removed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10955590U JPH0464567U (en) | 1990-10-18 | 1990-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10955590U JPH0464567U (en) | 1990-10-18 | 1990-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0464567U true JPH0464567U (en) | 1992-06-03 |
Family
ID=31856771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10955590U Pending JPH0464567U (en) | 1990-10-18 | 1990-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0464567U (en) |
-
1990
- 1990-10-18 JP JP10955590U patent/JPH0464567U/ja active Pending