JPH0465903B2 - - Google Patents

Info

Publication number
JPH0465903B2
JPH0465903B2 JP62278880A JP27888087A JPH0465903B2 JP H0465903 B2 JPH0465903 B2 JP H0465903B2 JP 62278880 A JP62278880 A JP 62278880A JP 27888087 A JP27888087 A JP 27888087A JP H0465903 B2 JPH0465903 B2 JP H0465903B2
Authority
JP
Japan
Prior art keywords
workpiece
gear
revolution
rotation
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62278880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01123069A (ja
Inventor
Ken Namekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Kentetsu Co Ltd
Original Assignee
Nihon Kentetsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Kentetsu Co Ltd filed Critical Nihon Kentetsu Co Ltd
Priority to JP62278880A priority Critical patent/JPH01123069A/ja
Publication of JPH01123069A publication Critical patent/JPH01123069A/ja
Publication of JPH0465903B2 publication Critical patent/JPH0465903B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP62278880A 1987-11-04 1987-11-04 薄膜蒸着装置 Granted JPH01123069A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62278880A JPH01123069A (ja) 1987-11-04 1987-11-04 薄膜蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62278880A JPH01123069A (ja) 1987-11-04 1987-11-04 薄膜蒸着装置

Publications (2)

Publication Number Publication Date
JPH01123069A JPH01123069A (ja) 1989-05-16
JPH0465903B2 true JPH0465903B2 (it) 1992-10-21

Family

ID=17603400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62278880A Granted JPH01123069A (ja) 1987-11-04 1987-11-04 薄膜蒸着装置

Country Status (1)

Country Link
JP (1) JPH01123069A (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0741945A (ja) * 1993-07-30 1995-02-10 Nippon Piston Ring Co Ltd 回転式コンプレッサ用ベーンの物理蒸着膜形成方法および装置
JP2018024948A (ja) * 2017-11-15 2018-02-15 有限会社ファームファクトリー 真空蒸着装置

Also Published As

Publication number Publication date
JPH01123069A (ja) 1989-05-16

Similar Documents

Publication Publication Date Title
CN105603377B (zh) 公转与自转均可独立调速的真空镀膜机工件转架运动机构
JPS6214444Y2 (it)
JPH01123069A (ja) 薄膜蒸着装置
JPH038412B2 (it)
JPH0560741U (ja) ２軸回転テーブル
JP2750771B2 (ja) 多関節搬送装置
JPH11323550A (ja) 真空成膜装置用回転テーブル
JPS5933485B2 (ja) パイプ切断装置
JP2538333B2 (ja) 歯切盤
JPH06172996A (ja) 自公転ホルダー装置
JPH0639879Y2 (ja) 弁座ラッピングマシンにおける定盤施回機構
JPH09225882A (ja) ロボットアームにおけるチャックの旋回装置
JPH0596466A (ja) 両面研磨方法及び装置
JP2672994B2 (ja) レーザ加工ヘッド
JPH01290768A (ja) スパッタリング装置
JP3673965B2 (ja) 研磨装置
JP2517534B2 (ja) ロ−タリ−植付装置における歯車装置
JPH02908Y2 (it)
JPH05215201A (ja) カム形状の可変機構、及びこれを用いた連続糊付け機械
JP3051437B2 (ja) 遊星歯車式研磨装置による研磨制御方法
JPH04289016A (ja) 切断装置
JPS6317670Y2 (it)
JPH0253507A (ja) 同期回転機構を有する刃先出入調整装置
JPS62213939A (ja) 粘性抵抗装置付き回転装置
JPH0253193B2 (it)