JPH0471009B2 - - Google Patents

Info

Publication number
JPH0471009B2
JPH0471009B2 JP28776685A JP28776685A JPH0471009B2 JP H0471009 B2 JPH0471009 B2 JP H0471009B2 JP 28776685 A JP28776685 A JP 28776685A JP 28776685 A JP28776685 A JP 28776685A JP H0471009 B2 JPH0471009 B2 JP H0471009B2
Authority
JP
Japan
Prior art keywords
catalyst
reaction
hours
activity
trichlorosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP28776685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62148314A (ja
Inventor
Mamoru Tachikawa
Kazutoshi Takatsuna
Mitsuharu Shiozawa
Yoshiharu Okumura
Takeo Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tonen General Sekiyu KK
Original Assignee
Tonen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tonen Corp filed Critical Tonen Corp
Priority to JP28776685A priority Critical patent/JPS62148314A/ja
Publication of JPS62148314A publication Critical patent/JPS62148314A/ja
Publication of JPH0471009B2 publication Critical patent/JPH0471009B2/ja
Granted legal-status Critical Current

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  • Silicon Compounds (AREA)
  • Catalysts (AREA)
JP28776685A 1985-12-23 1985-12-23 シランの製造方法 Granted JPS62148314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28776685A JPS62148314A (ja) 1985-12-23 1985-12-23 シランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28776685A JPS62148314A (ja) 1985-12-23 1985-12-23 シランの製造方法

Publications (2)

Publication Number Publication Date
JPS62148314A JPS62148314A (ja) 1987-07-02
JPH0471009B2 true JPH0471009B2 (de) 1992-11-12

Family

ID=17721476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28776685A Granted JPS62148314A (ja) 1985-12-23 1985-12-23 シランの製造方法

Country Status (1)

Country Link
JP (1) JPS62148314A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132621A1 (ja) * 2010-04-22 2011-10-27 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011132621A1 (ja) * 2010-04-22 2011-10-27 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法
JPWO2011132621A1 (ja) * 2010-04-22 2013-07-18 電気化学工業株式会社 水素化ハロゲン化シランの不均化反応用の触媒及びそれを用いたモノシランの製造方法

Also Published As

Publication number Publication date
JPS62148314A (ja) 1987-07-02

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