JPH0472343B2 - - Google Patents

Info

Publication number
JPH0472343B2
JPH0472343B2 JP63137514A JP13751488A JPH0472343B2 JP H0472343 B2 JPH0472343 B2 JP H0472343B2 JP 63137514 A JP63137514 A JP 63137514A JP 13751488 A JP13751488 A JP 13751488A JP H0472343 B2 JPH0472343 B2 JP H0472343B2
Authority
JP
Japan
Prior art keywords
arc chamber
chamber
earth metal
discharge chamber
alkaline earth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP63137514A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02175861A (ja
Inventor
Osamu Tsukagoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP63137514A priority Critical patent/JPH02175861A/ja
Publication of JPH02175861A publication Critical patent/JPH02175861A/ja
Publication of JPH0472343B2 publication Critical patent/JPH0472343B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
JP63137514A 1988-06-06 1988-06-06 アルカリ土類金属イオン源及びアルカリ土類金属イオンの生成方法 Granted JPH02175861A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63137514A JPH02175861A (ja) 1988-06-06 1988-06-06 アルカリ土類金属イオン源及びアルカリ土類金属イオンの生成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63137514A JPH02175861A (ja) 1988-06-06 1988-06-06 アルカリ土類金属イオン源及びアルカリ土類金属イオンの生成方法

Publications (2)

Publication Number Publication Date
JPH02175861A JPH02175861A (ja) 1990-07-09
JPH0472343B2 true JPH0472343B2 (de) 1992-11-18

Family

ID=15200452

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63137514A Granted JPH02175861A (ja) 1988-06-06 1988-06-06 アルカリ土類金属イオン源及びアルカリ土類金属イオンの生成方法

Country Status (1)

Country Link
JP (1) JPH02175861A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008311125A (ja) * 2007-06-15 2008-12-25 Nec Electronics Corp 気化装置およびこれを備えたイオン源装置
KR102461901B1 (ko) * 2017-12-12 2022-11-01 어플라이드 머티어리얼스, 인코포레이티드 이온 소스 및 간접적으로 가열된 캐소드 이온 소스

Also Published As

Publication number Publication date
JPH02175861A (ja) 1990-07-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term