JPH0477247U

JPH0477247U -

Info

Publication number: JPH0477247U
Application number: JP12190690U
Authority: JP
Priority date: 1990-11-20
Filing date: 1990-11-20
Publication date: 1992-07-06

Description

[Brief explanation of the drawing]

第１図は本考案の実施例を示す半導体ウエハ測
定装置の概略の構成図、第２図は従来の半導体ウ
エハ測定装置の構成図、第３図は第２図中のステ
ージ部の全体斜視図、第４図は第３図の拡大上面
部、第５図は第２図の等価回路図、第６図は第１
図中のステージ部の上面図、第７図は第６図Ａ−
ａ断面図である。１１１ａ，１１１ｂ……第１、第２の電極、１
４０−１〜１４０−ｎ……トランジスタ、１４０
−１ｃ……第１の非制御電極、１４０……半導体
ウエハ、１１０……ステージ、１４０−１ａ……
第２の非制御電極、１２０ａ，１２０ｂ……第３
、第４の電極、１３０ａ……電圧測定装置、１３
０ｂ……電流供給装置。 FIG. 1 is a schematic configuration diagram of a semiconductor wafer measuring device showing an embodiment of the present invention, FIG. 2 is a configuration diagram of a conventional semiconductor wafer measuring device, and FIG. 3 is an overall perspective view of the stage section in FIG. 2. , Fig. 4 is an enlarged top view of Fig. 3, Fig. 5 is an equivalent circuit diagram of Fig. 2, and Fig. 6 is an enlarged top view of Fig. 1.
The top view of the stage part in the figure, Figure 7 is Figure 6A-
It is a sectional view. 111a, 111b...first, second electrode, 1
40-1 to 140-n...transistor, 140
-1c...first non-control electrode, 140...semiconductor wafer, 110...stage, 140-1a...
Second non-control electrode, 120a, 120b...Third
, fourth electrode, 130a...voltage measuring device, 13
0b... Current supply device.

Claims

[Claims for Utility Model Registration] A stage on which a semiconductor wafer is mounted, on which insulated first and second electrodes are formed on the upper surface and first non-control electrodes of a plurality of transistors are commonly formed on the back surface; third and fourth electrodes provided above the stage and in contact with second non-control electrodes of each of the transistors formed on the surface of the semiconductor wafer; and between the second and fourth electrodes. A semiconductor wafer measuring device comprising: a current supply device that supplies a constant current to a semiconductor wafer; and a voltage measuring device that measures a voltage between the first and third electrodes; The electrodes are electrically insulated and divided into a plurality of parts, and arranged alternately at predetermined intervals to form a plurality of electrode pairs, and are switched and connected to any one of the plurality of electrode pairs to form a plurality of electrode pairs. electrode switching means for connecting the second electrode to the fourth electrode via the current supply device and the first electrode in the electrode pair to the third electrode via the voltage measuring device; A semiconductor wafer measuring device characterized by: