JPH048430U - - Google Patents

Info

Publication number
JPH048430U
JPH048430U JP4849890U JP4849890U JPH048430U JP H048430 U JPH048430 U JP H048430U JP 4849890 U JP4849890 U JP 4849890U JP 4849890 U JP4849890 U JP 4849890U JP H048430 U JPH048430 U JP H048430U
Authority
JP
Japan
Prior art keywords
liquid phase
phase growth
growth apparatus
component element
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4849890U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4849890U priority Critical patent/JPH048430U/ja
Publication of JPH048430U publication Critical patent/JPH048430U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例である半導体液相
成長装置を示す説明断面図、第２図はこの考案の
他の実施例を示す説明断面図、第３図は従来の半
導体液相成長装置を示す説明断面図、第４図は従
来の半導体液相成長装置を使用して薄膜を成長し
た場合の成長順簿膜番号とλｃの関係を示した図
である。図中、１は電気炉、２は反応管、３はス
ライドボート、４は基板、５はメルト、６はＨｇ
Ｔｅ、７はリザーバを示す。なお、図中、同一符
号は同一、又は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 易蒸発性成分元素を含む化合物半導体の薄膜を
    エピタキシヤル成長させる液相成長装置において
    、前記液相成長装置を使用に供する前に、予め前
    記易蒸発性成分元素又はその化合物を前記液相成
    長装置の反応管内に備えたことを特徴とする半導
    体液相成長装置。
JP4849890U 1990-05-08 1990-05-08 Pending JPH048430U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4849890U JPH048430U (ja) 1990-05-08 1990-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4849890U JPH048430U (ja) 1990-05-08 1990-05-08

Publications (1)

Publication Number Publication Date
JPH048430U true JPH048430U (ja) 1992-01-27

Family

ID=31565358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4849890U Pending JPH048430U (ja) 1990-05-08 1990-05-08

Country Status (1)

Country Link
JP (1) JPH048430U (ja)

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