JPH0485726U - - Google Patents
Info
- Publication number
- JPH0485726U JPH0485726U JP12660890U JP12660890U JPH0485726U JP H0485726 U JPH0485726 U JP H0485726U JP 12660890 U JP12660890 U JP 12660890U JP 12660890 U JP12660890 U JP 12660890U JP H0485726 U JPH0485726 U JP H0485726U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reduced diameter
- diameter section
- handler
- outer diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
Description
第１図及び第２図は本考案の一実施例を示す図
で、第１図はハンドラー、石英ボート、測温管の
関係を示す正面図、第２図はハンドラーの斜視図
、第３図ないし第７図は従来例を示す図で、第３
図は半導体製造装置の一部構成を示す図、第４図
は支持アーム及びその近傍の構成を示す図、第５
図はハンドラー、石英ボート、測温管の関係を示
す正面図、第６図は測温管の構成図、第７図はハ
ンドラーの斜視図である。
１０１……石英ボート（ボート）、１０３……
縮径部、１０５……ハンドラー。
Figures 1 and 2 are diagrams showing one embodiment of the present invention. Figure 1 is a front view showing the relationship between the handler, quartz boat, and thermometer tube, Figure 2 is a perspective view of the handler, and Figure 3 7 to 7 are diagrams showing conventional examples, and the third
The figure shows a partial configuration of the semiconductor manufacturing equipment, FIG. 4 shows the structure of the support arm and its vicinity, and FIG.
The figure is a front view showing the relationship between the handler, the quartz boat, and the temperature measuring tube, FIG. 6 is a configuration diagram of the temperature measuring tube, and FIG. 7 is a perspective view of the handler. 101...Quartz boat (boat), 103...
Reduced diameter section, 105...handler.
Claims (1)
縮径部を設けて段付構造としたボートと、上記縮
径部に対して水平方向から離接可能に配置され接
近することにより上記縮径部に係合してボートを
保持するとともに係合した状態でその外径部が上
記ボートの外径部より突出しないように形成され
たハンドラーと、を具備したことを特徴とする半
導体製造装置のボート搬送装置。 A boat that accommodates wafers in a stacked state and has a stepped structure with a reduced diameter section at its lower end, and a boat that is arranged so as to be able to move toward and away from the reduced diameter section from the horizontal direction, and that can be moved toward the reduced diameter section by approaching the reduced diameter section. A boat for semiconductor manufacturing equipment, comprising: a handler that engages with the handler to hold the boat and whose outer diameter part does not protrude beyond the outer diameter part of the boat in the engaged state. Conveyance device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (en) | 1990-11-30 | 1990-11-30 | Boat transport equipment for semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990126608U JP2536994Y2 (en) | 1990-11-30 | 1990-11-30 | Boat transport equipment for semiconductor manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0485726U true JPH0485726U (en) | 1992-07-24 |
| JP2536994Y2 JP2536994Y2 (en) | 1997-05-28 |
Family
ID=31874153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990126608U Expired - Lifetime JP2536994Y2 (en) | 1990-11-30 | 1990-11-30 | Boat transport equipment for semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2536994Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6317521A (en) * | 1986-07-09 | 1988-01-25 | Kokusai Electric Co Ltd | Wafer boat transport method |
-
1990
- 1990-11-30 JP JP1990126608U patent/JP2536994Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6317521A (en) * | 1986-07-09 | 1988-01-25 | Kokusai Electric Co Ltd | Wafer boat transport method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2536994Y2 (en) | 1997-05-28 |
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