JPH0517874Y2 - - Google Patents

Info

Publication number
JPH0517874Y2
JPH0517874Y2 JP1988058161U JP5816188U JPH0517874Y2 JP H0517874 Y2 JPH0517874 Y2 JP H0517874Y2 JP 1988058161 U JP1988058161 U JP 1988058161U JP 5816188 U JP5816188 U JP 5816188U JP H0517874 Y2 JPH0517874 Y2 JP H0517874Y2
Authority
JP
Japan
Prior art keywords
exposed
suction
chuck
mounting table
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988058161U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01161325U (sr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988058161U priority Critical patent/JPH0517874Y2/ja
Publication of JPH01161325U publication Critical patent/JPH01161325U/ja
Application granted granted Critical
Publication of JPH0517874Y2 publication Critical patent/JPH0517874Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988058161U 1988-04-28 1988-04-28 Expired - Lifetime JPH0517874Y2 (sr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988058161U JPH0517874Y2 (sr) 1988-04-28 1988-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988058161U JPH0517874Y2 (sr) 1988-04-28 1988-04-28

Publications (2)

Publication Number Publication Date
JPH01161325U JPH01161325U (sr) 1989-11-09
JPH0517874Y2 true JPH0517874Y2 (sr) 1993-05-13

Family

ID=31283986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988058161U Expired - Lifetime JPH0517874Y2 (sr) 1988-04-28 1988-04-28

Country Status (1)

Country Link
JP (1) JPH0517874Y2 (sr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4583903B2 (ja) * 2004-12-15 2010-11-17 日本電子株式会社 移動ブロック支持機構及びステージ装置並びに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH01161325U (sr) 1989-11-09

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