JPH0520917B2 - - Google Patents

Info

Publication number
JPH0520917B2
JPH0520917B2 JP63204873A JP20487388A JPH0520917B2 JP H0520917 B2 JPH0520917 B2 JP H0520917B2 JP 63204873 A JP63204873 A JP 63204873A JP 20487388 A JP20487388 A JP 20487388A JP H0520917 B2 JPH0520917 B2 JP H0520917B2
Authority
JP
Japan
Prior art keywords
hole
plasma
holes
contaminants
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63204873A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01155682A (ja
Inventor
Yuujein Merinko Uorutaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPH01155682A publication Critical patent/JPH01155682A/ja
Publication of JPH0520917B2 publication Critical patent/JPH0520917B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0055—After-treatment, e.g. cleaning or desmearing of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/09—Treatments involving charged particles
    • H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/10—Using electric, magnetic and electromagnetic fields; Using laser light
    • H05K2203/105—Using an electrical field; Special methods of applying an electric potential
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/42—Plated through-holes or plated via connections
    • H05K3/429—Plated through-holes specially for multilayer circuits, e.g. having connections to inner circuit layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • ing And Chemical Polishing (AREA)
  • Cleaning In General (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Drying Of Semiconductors (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP63204873A 1987-10-30 1988-08-19 汚染物質を徐去する方法 Granted JPH01155682A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/114,941 US4853081A (en) 1987-10-30 1987-10-30 Process for removing contaminant
US114941 1987-10-30

Publications (2)

Publication Number Publication Date
JPH01155682A JPH01155682A (ja) 1989-06-19
JPH0520917B2 true JPH0520917B2 (2) 1993-03-22

Family

ID=22358380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63204873A Granted JPH01155682A (ja) 1987-10-30 1988-08-19 汚染物質を徐去する方法

Country Status (3)

Country Link
US (1) US4853081A (2)
EP (1) EP0313855A3 (2)
JP (1) JPH01155682A (2)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03261138A (ja) * 1990-03-09 1991-11-21 Mitsubishi Electric Corp 半導体装置のクリーニング方法およびクリーニング装置
US5221425A (en) * 1991-08-21 1993-06-22 International Business Machines Corporation Method for reducing foreign matter on a wafer etched in a reactive ion etching process
US5487810A (en) * 1992-03-26 1996-01-30 Bayer Ag Process for pretreating surfaces of plastic items
US5498311A (en) * 1994-06-15 1996-03-12 Quatro Corporation Process for manufacture of printed circuit boards
US5814155A (en) * 1996-06-26 1998-09-29 Vlsi Technology, Inc. Plasma ashing enhancement
US5863447A (en) * 1997-04-08 1999-01-26 International Business Machines Corporation Method for providing a selective reference layer isolation technique for the production of printed circuit boards
US7045020B2 (en) * 2003-05-22 2006-05-16 Applied Materials, Inc. Cleaning a component of a process chamber
EP1570921A1 (de) * 2004-03-02 2005-09-07 Siemens Aktiengesellschaft Verfahren zur Plasmareinigung eines Bauteils
GB2417251A (en) * 2004-08-18 2006-02-22 Nanofilm Technologies Int Removing material from a substrate surface using plasma

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4012307A (en) * 1975-12-05 1977-03-15 General Dynamics Corporation Method for conditioning drilled holes in multilayer wiring boards
US4162932A (en) * 1977-10-26 1979-07-31 Perstorp, Ab Method for removing resin smear in through holes of printed circuit boards
US4328081A (en) * 1980-02-25 1982-05-04 Micro-Plate, Inc. Plasma desmearing apparatus and method
US4425210A (en) * 1980-11-04 1984-01-10 Fazlin Fazal A Plasma desmearing apparatus and method
US4392932A (en) * 1981-11-12 1983-07-12 Varian Associates, Inc. Method for obtaining uniform etch by modulating bias on extension member around radio frequency etch table
EP0126171B1 (de) * 1983-05-19 1987-01-07 Ibm Deutschland Gmbh Verfahren zur ganzflächigen Nacharbeitung von Mehrlagenschaltungen mit fehlerhaften äusseren Kupferleiterzügen
JPS59225525A (ja) * 1983-06-06 1984-12-18 Agency Of Ind Science & Technol 反応性イオンビ−ムエツチング装置
US4496420A (en) * 1984-04-06 1985-01-29 Bmc Industries, Inc. Process for plasma desmear etching of printed circuit boards and apparatus used therein
US4544439A (en) * 1984-07-26 1985-10-01 International Business Machines Corporation System for repairing electrical short circuits between parallel printed circuits
US4615763A (en) * 1985-01-02 1986-10-07 International Business Machines Corporation Roughening surface of a substrate
JPS61241997A (ja) * 1985-04-19 1986-10-28 株式会社日立製作所 多層プリント基板のスルホ−ルスミア除去方法
US4599134A (en) * 1985-06-10 1986-07-08 Ibm Corporation Plasma etching with tracer
US4667058A (en) * 1985-07-01 1987-05-19 Solarex Corporation Method of fabricating electrically isolated photovoltaic modules arrayed on a substrate and product obtained thereby
EP0208012B1 (de) * 1985-07-12 1991-09-25 Ibm Deutschland Gmbh Verfahren zum Herstellen von verschmierungsfreien Bohrungen
US4654115A (en) * 1986-04-08 1987-03-31 International Business Machines Corporation Process for removing contaminant

Also Published As

Publication number Publication date
EP0313855A2 (en) 1989-05-03
EP0313855A3 (en) 1990-10-10
US4853081A (en) 1989-08-01
JPH01155682A (ja) 1989-06-19

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