JPH0521865Y2 - - Google Patents

Info

Publication number
JPH0521865Y2
JPH0521865Y2 JP1987045986U JP4598687U JPH0521865Y2 JP H0521865 Y2 JPH0521865 Y2 JP H0521865Y2 JP 1987045986 U JP1987045986 U JP 1987045986U JP 4598687 U JP4598687 U JP 4598687U JP H0521865 Y2 JPH0521865 Y2 JP H0521865Y2
Authority
JP
Japan
Prior art keywords
workpiece
tube
transfer table
sealed chamber
workpiece transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987045986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63153519U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987045986U priority Critical patent/JPH0521865Y2/ja
Publication of JPS63153519U publication Critical patent/JPS63153519U/ja
Application granted granted Critical
Publication of JPH0521865Y2 publication Critical patent/JPH0521865Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987045986U 1987-03-28 1987-03-28 Expired - Lifetime JPH0521865Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987045986U JPH0521865Y2 (it) 1987-03-28 1987-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987045986U JPH0521865Y2 (it) 1987-03-28 1987-03-28

Publications (2)

Publication Number Publication Date
JPS63153519U JPS63153519U (it) 1988-10-07
JPH0521865Y2 true JPH0521865Y2 (it) 1993-06-04

Family

ID=30865231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987045986U Expired - Lifetime JPH0521865Y2 (it) 1987-03-28 1987-03-28

Country Status (1)

Country Link
JP (1) JPH0521865Y2 (it)

Also Published As

Publication number Publication date
JPS63153519U (it) 1988-10-07

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