JPH0523584Y2 - - Google Patents
Info
- Publication number
- JPH0523584Y2 JPH0523584Y2 JP1987145329U JP14532987U JPH0523584Y2 JP H0523584 Y2 JPH0523584 Y2 JP H0523584Y2 JP 1987145329 U JP1987145329 U JP 1987145329U JP 14532987 U JP14532987 U JP 14532987U JP H0523584 Y2 JPH0523584 Y2 JP H0523584Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- jig
- holder
- claws
- legs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145329U JPH0523584Y2 (cs) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145329U JPH0523584Y2 (cs) | 1987-09-25 | 1987-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6451669U JPS6451669U (cs) | 1989-03-30 |
| JPH0523584Y2 true JPH0523584Y2 (cs) | 1993-06-16 |
Family
ID=31413817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987145329U Expired - Lifetime JPH0523584Y2 (cs) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523584Y2 (cs) |
-
1987
- 1987-09-25 JP JP1987145329U patent/JPH0523584Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6451669U (cs) | 1989-03-30 |
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