JPH0529482B2 - - Google Patents
Info
- Publication number
- JPH0529482B2 JPH0529482B2 JP1068243A JP6824389A JPH0529482B2 JP H0529482 B2 JPH0529482 B2 JP H0529482B2 JP 1068243 A JP1068243 A JP 1068243A JP 6824389 A JP6824389 A JP 6824389A JP H0529482 B2 JPH0529482 B2 JP H0529482B2
- Authority
- JP
- Japan
- Prior art keywords
- low
- fluorocarbon
- boiling point
- tank
- point solvent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002904 solvent Substances 0.000 claims description 45
- 238000009835 boiling Methods 0.000 claims description 31
- 238000004140 cleaning Methods 0.000 claims description 30
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 30
- 230000007246 mechanism Effects 0.000 claims description 18
- 238000011084 recovery Methods 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 231100000132 chronic toxicity testing Toxicity 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003673 groundwater Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1068243A JPH02245203A (ja) | 1989-03-20 | 1989-03-20 | フロンまたは低沸点溶剤回収機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1068243A JPH02245203A (ja) | 1989-03-20 | 1989-03-20 | フロンまたは低沸点溶剤回収機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02245203A JPH02245203A (ja) | 1990-10-01 |
| JPH0529482B2 true JPH0529482B2 (de) | 1993-04-30 |
Family
ID=13368135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1068243A Granted JPH02245203A (ja) | 1989-03-20 | 1989-03-20 | フロンまたは低沸点溶剤回収機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02245203A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0796093B2 (ja) * | 1991-11-11 | 1995-10-18 | 森川産業株式会社 | 溶剤気体から溶剤を回収する装置 |
| US6355113B1 (en) | 1991-12-02 | 2002-03-12 | 3M Innovative Properties Company | Multiple solvent cleaning system |
| US5454390A (en) * | 1994-05-16 | 1995-10-03 | International Business Machines Corporation | Vapor rinse-vapor dry process tool |
-
1989
- 1989-03-20 JP JP1068243A patent/JPH02245203A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02245203A (ja) | 1990-10-01 |
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