JPH0536738B2 - - Google Patents

Info

Publication number
JPH0536738B2
JPH0536738B2 JP58051977A JP5197783A JPH0536738B2 JP H0536738 B2 JPH0536738 B2 JP H0536738B2 JP 58051977 A JP58051977 A JP 58051977A JP 5197783 A JP5197783 A JP 5197783A JP H0536738 B2 JPH0536738 B2 JP H0536738B2
Authority
JP
Japan
Prior art keywords
pressure
weight
base
glass
borosilicate glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58051977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59176639A (ja
Inventor
Masaru Shinho
Kyoshi Fukuda
Shunji Shiromizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5197783A priority Critical patent/JPS59176639A/ja
Publication of JPS59176639A publication Critical patent/JPS59176639A/ja
Publication of JPH0536738B2 publication Critical patent/JPH0536738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Glass Compositions (AREA)
JP5197783A 1983-03-28 1983-03-28 半導体圧力変換器 Granted JPS59176639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5197783A JPS59176639A (ja) 1983-03-28 1983-03-28 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5197783A JPS59176639A (ja) 1983-03-28 1983-03-28 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS59176639A JPS59176639A (ja) 1984-10-06
JPH0536738B2 true JPH0536738B2 (ko) 1993-05-31

Family

ID=12901921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5197783A Granted JPS59176639A (ja) 1983-03-28 1983-03-28 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS59176639A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177030A (ja) * 1987-01-19 1988-07-21 Nippon Denso Co Ltd 半導体圧力センサ
JPH0274536A (ja) * 1988-09-07 1990-03-14 Toshiba Glass Co Ltd プレス成形用硬質ガラス
JPH0483139A (ja) * 1990-07-26 1992-03-17 Nippondenso Co Ltd 半導体歪みセンサ
JP6119703B2 (ja) * 2014-09-04 2017-04-26 横河電機株式会社 センサ装置、歪センサ装置、及び圧力センサ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4924208A (ko) * 1972-06-30 1974-03-04
JPS51110982A (ja) * 1975-03-26 1976-09-30 Hitachi Ltd Handotaiatsuryokuhenkanki
JPS55106331A (en) * 1979-02-09 1980-08-15 Hitachi Ltd Pressure sensor of semiconductor strain gauge
JPS57186136A (en) * 1981-05-13 1982-11-16 Hitachi Ltd Semiconductor pressure transducer

Also Published As

Publication number Publication date
JPS59176639A (ja) 1984-10-06

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