JPH0549355B2 - - Google Patents

Info

Publication number
JPH0549355B2
JPH0549355B2 JP16630489A JP16630489A JPH0549355B2 JP H0549355 B2 JPH0549355 B2 JP H0549355B2 JP 16630489 A JP16630489 A JP 16630489A JP 16630489 A JP16630489 A JP 16630489A JP H0549355 B2 JPH0549355 B2 JP H0549355B2
Authority
JP
Japan
Prior art keywords
cleaning
processing chamber
solvent
communication port
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16630489A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330881A (ja
Inventor
Masahide Uchino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Field Co Ltd
Original Assignee
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Field Co Ltd filed Critical Japan Field Co Ltd
Priority to JP16630489A priority Critical patent/JPH0330881A/ja
Publication of JPH0330881A publication Critical patent/JPH0330881A/ja
Publication of JPH0549355B2 publication Critical patent/JPH0549355B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP16630489A 1989-06-28 1989-06-28 洗浄装置 Granted JPH0330881A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16630489A JPH0330881A (ja) 1989-06-28 1989-06-28 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16630489A JPH0330881A (ja) 1989-06-28 1989-06-28 洗浄装置

Publications (2)

Publication Number Publication Date
JPH0330881A JPH0330881A (ja) 1991-02-08
JPH0549355B2 true JPH0549355B2 (fr) 1993-07-26

Family

ID=15828860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16630489A Granted JPH0330881A (ja) 1989-06-28 1989-06-28 洗浄装置

Country Status (1)

Country Link
JP (1) JPH0330881A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10321580A (ja) * 1997-05-15 1998-12-04 Tokyo Electron Ltd 基板の洗浄ユニット及び洗浄システム
JP2017170425A (ja) * 2016-03-18 2017-09-28 株式会社クリンビー ワーク洗浄方法およびワーク洗浄装置

Also Published As

Publication number Publication date
JPH0330881A (ja) 1991-02-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees