JPH0557470B2 - - Google Patents

Info

Publication number: JPH0557470B2
Authority: JP; Japan
Prior art keywords: roll; gasket; coating; metal; vacuum
Prior art date: 1988-03-18
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP6370688A

Other languages

English (en)

Japanese (ja)

Other versions

JPH01238772A (ja

Inventor

Yasuhiro Kobayashi

Masao Iguchi

Kazuhiro Suzuki

Fumihito Suzuki

Tsuneo Nagamine

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

JFE Steel Corp

Ulvac Inc

Original Assignee

Ulvac Inc

Nihon Shinku Gijutsu KK

Kawasaki Steel Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-03-18

Filing date

1988-03-18

Publication date

1993-08-24

1988-03-18 Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK, Kawasaki Steel Corp filed Critical Ulvac Inc

1988-03-18 Priority to JP6370688A priority Critical patent/JPH01238772A/ja

1989-09-22 Publication of JPH01238772A publication Critical patent/JPH01238772A/ja

1993-08-24 Publication of JPH0557470B2 publication Critical patent/JPH0557470B2/ja

Status Granted legal-status Critical Current

Links

239000002184 metal Substances 0.000 claims description 27
229910052751 metal Inorganic materials 0.000 claims description 27
238000007789 sealing Methods 0.000 claims description 12
229910052737 gold Inorganic materials 0.000 claims description 8
229910052709 silver Inorganic materials 0.000 claims description 8
239000010410 layer Substances 0.000 claims description 7
239000011247 coating layer Substances 0.000 claims description 5
238000000576 coating method Methods 0.000 description 21
239000011248 coating agent Substances 0.000 description 20
239000010949 copper Substances 0.000 description 14
239000010408 film Substances 0.000 description 13
238000010438 heat treatment Methods 0.000 description 13
238000000034 method Methods 0.000 description 7
230000003647 oxidation Effects 0.000 description 7
238000007254 oxidation reaction Methods 0.000 description 7
238000002474 experimental method Methods 0.000 description 5
229910052802 copper Inorganic materials 0.000 description 4
239000000758 substrate Substances 0.000 description 4
238000007740 vapor deposition Methods 0.000 description 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
230000000694 effects Effects 0.000 description 3
238000007733 ion plating Methods 0.000 description 3
239000000463 material Substances 0.000 description 3
239000001301 oxygen Substances 0.000 description 3
229910052760 oxygen Inorganic materials 0.000 description 3
229910052782 aluminium Inorganic materials 0.000 description 2
238000010586 diagram Methods 0.000 description 2
150000002739 metals Chemical class 0.000 description 2
229910052759 nickel Inorganic materials 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
229910000881 Cu alloy Inorganic materials 0.000 description 1
229910017770 Cu—Ag Inorganic materials 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000007872 degassing Methods 0.000 description 1
238000000151 deposition Methods 0.000 description 1
239000007789 gas Substances 0.000 description 1
239000011521 glass Substances 0.000 description 1
229910002804 graphite Inorganic materials 0.000 description 1
239000010439 graphite Substances 0.000 description 1
229910052742 iron Inorganic materials 0.000 description 1
WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
230000007774 longterm Effects 0.000 description 1
239000007769 metal material Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
239000002356 single layer Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
239000010959 steel Substances 0.000 description 1
239000002344 surface layer Substances 0.000 description 1
239000010409 thin film Substances 0.000 description 1
238000007738 vacuum evaporation Methods 0.000 description 1
238000001947 vapour-phase growth Methods 0.000 description 1
229910052725 zinc Inorganic materials 0.000 description 1
239000011701 zinc Substances 0.000 description 1

Landscapes

Physical Vapour Deposition (AREA)
Gasket Seals (AREA)

JP6370688A 1988-03-18 1988-03-18 真空シール用金属製ガスケット Granted JPH01238772A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP6370688A JPH01238772A (ja)	1988-03-18	1988-03-18	真空シール用金属製ガスケット

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP6370688A JPH01238772A (ja)	1988-03-18	1988-03-18	真空シール用金属製ガスケット

Publications (2)

Publication Number	Publication Date
JPH01238772A JPH01238772A (ja)	1989-09-22
JPH0557470B2 true JPH0557470B2 (cs)	1993-08-24

Family

ID=13237086

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP6370688A Granted JPH01238772A (ja)	1988-03-18	1988-03-18	真空シール用金属製ガスケット

Country Status (1)

Country	Link
JP (1)	JPH01238772A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN114999679B (zh) *	2022-05-26	2025-08-26	华能山东石岛湾核电有限公司	一种高温气冷堆用大口径小截面镀银密封环真空包装方法

1988
- 1988-03-18 JP JP6370688A patent/JPH01238772A/ja active Granted

Also Published As

Publication number	Publication date
JPH01238772A (ja)	1989-09-22

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