JPH055897B2 - - Google Patents

Info

Publication number
JPH055897B2
JPH055897B2 JP5729688A JP5729688A JPH055897B2 JP H055897 B2 JPH055897 B2 JP H055897B2 JP 5729688 A JP5729688 A JP 5729688A JP 5729688 A JP5729688 A JP 5729688A JP H055897 B2 JPH055897 B2 JP H055897B2
Authority
JP
Japan
Prior art keywords
microwave
alumina
introduction window
window
alumina ceramics
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5729688A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6456873A (en
Inventor
Shigehira Iida
Takashi Arai
Junichiro Hashizume
Tetsuya Takei
Keishi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP5729688A priority Critical patent/JPS6456873A/ja
Publication of JPS6456873A publication Critical patent/JPS6456873A/ja
Publication of JPH055897B2 publication Critical patent/JPH055897B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00—Recording-members for original recording by exposure, e.g. to light, to heat or to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/02—Charge-receiving layers
    • G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
    • G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photovoltaic Devices (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP5729688A 1988-03-10 1988-03-10 Microwave plasma cvd device having improved microwave introducing window Granted JPS6456873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5729688A JPS6456873A (en) 1988-03-10 1988-03-10 Microwave plasma cvd device having improved microwave introducing window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5729688A JPS6456873A (en) 1988-03-10 1988-03-10 Microwave plasma cvd device having improved microwave introducing window

Publications (2)

Publication Number Publication Date
JPS6456873A JPS6456873A (en) 1989-03-03
JPH055897B2 true JPH055897B2 (fr) 1993-01-25

Family

ID=13051590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5729688A Granted JPS6456873A (en) 1988-03-10 1988-03-10 Microwave plasma cvd device having improved microwave introducing window

Country Status (1)

Country Link
JP (1) JPS6456873A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5129359A (en) * 1988-11-15 1992-07-14 Canon Kabushiki Kaisha Microwave plasma CVD apparatus for the formation of functional deposited film with discharge space provided with gas feed device capable of applying bias voltage between the gas feed device and substrate
JPH0613197A (ja) * 1992-06-15 1994-01-21 Nippon Koshuha Kk 高周波電力導入路

Also Published As

Publication number Publication date
JPS6456873A (en) 1989-03-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees