JPH0575288B2 - - Google Patents

Info

Publication number
JPH0575288B2
JPH0575288B2 JP63002766A JP276688A JPH0575288B2 JP H0575288 B2 JPH0575288 B2 JP H0575288B2 JP 63002766 A JP63002766 A JP 63002766A JP 276688 A JP276688 A JP 276688A JP H0575288 B2 JPH0575288 B2 JP H0575288B2
Authority
JP
Japan
Prior art keywords
etching
surface end
crystal resonator
plate
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63002766A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01179513A (ja
Inventor
Motoyasu Hanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP276688A priority Critical patent/JPH01179513A/ja
Publication of JPH01179513A publication Critical patent/JPH01179513A/ja
Publication of JPH0575288B2 publication Critical patent/JPH0575288B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP276688A 1988-01-09 1988-01-09 水晶振動子のエッチング加工方法 Granted JPH01179513A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP276688A JPH01179513A (ja) 1988-01-09 1988-01-09 水晶振動子のエッチング加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP276688A JPH01179513A (ja) 1988-01-09 1988-01-09 水晶振動子のエッチング加工方法

Publications (2)

Publication Number Publication Date
JPH01179513A JPH01179513A (ja) 1989-07-17
JPH0575288B2 true JPH0575288B2 (de) 1993-10-20

Family

ID=11538460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP276688A Granted JPH01179513A (ja) 1988-01-09 1988-01-09 水晶振動子のエッチング加工方法

Country Status (1)

Country Link
JP (1) JPH01179513A (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69129957T2 (de) * 1990-04-27 1998-12-24 Seiko Epson Corp., Tokio/Tokyo In AT-Richtung geschnittenes Kristalloszillatorelement und sein Herstellungsverfahren
JP4638682B2 (ja) * 2004-03-23 2011-02-23 シチズンホールディングス株式会社 水晶振動子の製造方法
JP4645991B2 (ja) * 2007-11-12 2011-03-09 セイコーエプソン株式会社 水晶デバイスと音叉型水晶振動片ならびに音叉型水晶振動片の製造方法
JP6158501B2 (ja) * 2012-11-30 2017-07-05 京セラ株式会社 水晶片の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57157616A (en) * 1981-03-25 1982-09-29 Seiko Instr & Electronics Ltd Gt-cut quartz oscillator

Also Published As

Publication number Publication date
JPH01179513A (ja) 1989-07-17

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