JPH0582968B2 - - Google Patents

Info

Publication number
JPH0582968B2
JPH0582968B2 JP61061981A JP6198186A JPH0582968B2 JP H0582968 B2 JPH0582968 B2 JP H0582968B2 JP 61061981 A JP61061981 A JP 61061981A JP 6198186 A JP6198186 A JP 6198186A JP H0582968 B2 JPH0582968 B2 JP H0582968B2
Authority
JP
Japan
Prior art keywords
film
tungsten
metal
opening
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61061981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62219945A (ja
Inventor
Kyoichi Suguro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP6198186A priority Critical patent/JPS62219945A/ja
Publication of JPS62219945A publication Critical patent/JPS62219945A/ja
Publication of JPH0582968B2 publication Critical patent/JPH0582968B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP6198186A 1986-03-22 1986-03-22 半導体装置の製造方法 Granted JPS62219945A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6198186A JPS62219945A (ja) 1986-03-22 1986-03-22 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6198186A JPS62219945A (ja) 1986-03-22 1986-03-22 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62219945A JPS62219945A (ja) 1987-09-28
JPH0582968B2 true JPH0582968B2 (fr) 1993-11-24

Family

ID=13186865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6198186A Granted JPS62219945A (ja) 1986-03-22 1986-03-22 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62219945A (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5149672A (en) * 1988-08-01 1992-09-22 Nadia Lifshitz Process for fabricating integrated circuits having shallow junctions
US4999317A (en) * 1989-09-29 1991-03-12 At&T Bell Laboratories Metallization processing
US5084415A (en) * 1989-10-23 1992-01-28 At&T Bell Laboratories Metallization processing
US5700716A (en) 1996-02-23 1997-12-23 Micron Technology, Inc. Method for forming low contact resistance contacts, vias, and plugs with diffusion barriers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208161A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS61147549A (ja) * 1984-12-21 1986-07-05 Toshiba Corp 半導体装置
JPS61248442A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 半導体素子用微細電極配線

Also Published As

Publication number Publication date
JPS62219945A (ja) 1987-09-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term