JPH062268Y2 - カセット搬送装置のカセット検知装置 - Google Patents

カセット搬送装置のカセット検知装置

Info

Publication number: JPH062268Y2
Authority: JP; Japan
Prior art keywords: cassette; arm; rod; support shaft; block
Prior art date: 1988-02-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP2139988U

Other languages

English (en)

Japanese (ja)

Other versions

JPH01125548U (cs

Inventor

賢司杉本

敏朗廣江

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Dainippon Screen Manufacturing Co Ltd

Original Assignee

Dainippon Screen Manufacturing Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1988-02-19

Filing date

1988-02-19

Publication date

1994-01-19

1988-02-19 Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd

1988-02-19 Priority to JP2139988U priority Critical patent/JPH062268Y2/ja

1989-08-28 Publication of JPH01125548U publication Critical patent/JPH01125548U/ja

1994-01-19 Application granted granted Critical

1994-01-19 Publication of JPH062268Y2 publication Critical patent/JPH062268Y2/ja

2003-02-19 Anticipated expiration legal-status Critical

Status Expired - Lifetime legal-status Critical Current

Links

238000001514 detection method Methods 0.000 title claims description 13
239000000758 substrate Substances 0.000 claims description 23
238000005260 corrosion Methods 0.000 claims description 7
230000007797 corrosion Effects 0.000 claims description 6
238000013459 approach Methods 0.000 claims description 3
239000007789 gas Substances 0.000 description 5
238000012545 processing Methods 0.000 description 5
238000012546 transfer Methods 0.000 description 5
230000005540 biological transmission Effects 0.000 description 3
WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
230000003028 elevating effect Effects 0.000 description 2
238000005516 engineering process Methods 0.000 description 2
230000007257 malfunction Effects 0.000 description 2
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
238000010586 diagram Methods 0.000 description 1
229910001873 dinitrogen Inorganic materials 0.000 description 1
230000000694 effects Effects 0.000 description 1
239000011521 glass Substances 0.000 description 1
230000005484 gravity Effects 0.000 description 1
238000007654 immersion Methods 0.000 description 1
239000004973 liquid crystal related substance Substances 0.000 description 1
239000000463 material Substances 0.000 description 1
238000000034 method Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
230000003287 optical effect Effects 0.000 description 1
239000011347 resin Substances 0.000 description 1
229920005989 resin Polymers 0.000 description 1
238000007789 sealing Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 1

JP2139988U 1988-02-19 1988-02-19 カセット搬送装置のカセット検知装置 Expired - Lifetime JPH062268Y2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP2139988U JPH062268Y2 (ja)	1988-02-19	1988-02-19	カセット搬送装置のカセット検知装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2139988U JPH062268Y2 (ja)	1988-02-19	1988-02-19	カセット搬送装置のカセット検知装置

Publications (2)

Publication Number	Publication Date
JPH01125548U JPH01125548U (cs)	1989-08-28
JPH062268Y2 true JPH062268Y2 (ja)	1994-01-19

Family

ID=31238606

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP2139988U Expired - Lifetime JPH062268Y2 (ja)	1988-02-19	1988-02-19	カセット搬送装置のカセット検知装置

Country Status (1)

Country	Link
JP (1)	JPH062268Y2 (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2531910Y2 (ja) *	1992-03-31	1997-04-09	株式会社スガイ	物品把持装置
WO2011141960A1 (ja) *	2010-05-12	2011-11-17	ムラテックオートメーション株式会社	自動倉庫及び移載方法

1988
- 1988-02-19 JP JP2139988U patent/JPH062268Y2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
JPH01125548U (cs)	1989-08-28

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