JPH0625971Y2 - 半導体端面処理用治具 - Google Patents

半導体端面処理用治具

Info

Publication number
JPH0625971Y2
JPH0625971Y2 JP1987063968U JP6396887U JPH0625971Y2 JP H0625971 Y2 JPH0625971 Y2 JP H0625971Y2 JP 1987063968 U JP1987063968 U JP 1987063968U JP 6396887 U JP6396887 U JP 6396887U JP H0625971 Y2 JPH0625971 Y2 JP H0625971Y2
Authority
JP
Japan
Prior art keywords
laser wafer
spacer
pressing
face
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987063968U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63172162U (2
Inventor
小枝子 大柴
正男 小林
浩 和田
洋 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1987063968U priority Critical patent/JPH0625971Y2/ja
Publication of JPS63172162U publication Critical patent/JPS63172162U/ja
Application granted granted Critical
Publication of JPH0625971Y2 publication Critical patent/JPH0625971Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987063968U 1987-04-30 1987-04-30 半導体端面処理用治具 Expired - Lifetime JPH0625971Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987063968U JPH0625971Y2 (ja) 1987-04-30 1987-04-30 半導体端面処理用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987063968U JPH0625971Y2 (ja) 1987-04-30 1987-04-30 半導体端面処理用治具

Publications (2)

Publication Number Publication Date
JPS63172162U JPS63172162U (2) 1988-11-09
JPH0625971Y2 true JPH0625971Y2 (ja) 1994-07-06

Family

ID=30899693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987063968U Expired - Lifetime JPH0625971Y2 (ja) 1987-04-30 1987-04-30 半導体端面処理用治具

Country Status (1)

Country Link
JP (1) JPH0625971Y2 (2)

Also Published As

Publication number Publication date
JPS63172162U (2) 1988-11-09

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