JPH06271069A - Stopping device for elevator mechanism - Google Patents

Abstract

(57) [Summary] [Purpose] To provide a stop device for an elevator mechanism that can surely stop an unintentional object in the lower direction of the transport mechanism when the object comes into contact therewith. [Structure] An elevator 1, an elevator arm 2 for vertically transporting an object provided on the elevator 1, and a lower limit sensor 6 for detecting a lower limit attached to the elevator 1 are connected to the elevator 1 that operates in the vertical direction. A second stop switch 10 is provided in the transport mechanism section. If there is an unintended object below, the elevator 1 descends, and the elevator 1 is stopped before the arm 2 passes the limit sensor 6 and hits the elevator pedestal.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stopping apparatus for a boat elevator, a wafer carrier elevator, a cassette loader elevator, or other elevator mechanism for transporting wafers up and down in a semiconductor manufacturing apparatus. is there.

[0002]

2. Description of the Related Art FIGS. 5 and 6 show an example of a conventional boat elevator. As shown in FIG. 5, the elevator 1 conveys the boat 3 and the cap 4 mounted on the elevator arm 2 and the flange 5 up and down. FIG. 6 shows a semiconductor manufacturing apparatus using the elevator,
There are three elevators 1a, 1b, 1c, and elevator arms 2a, 2b, 2c each having a nut screwed with it by the rotation of a lead screw slides a sliding rod up and down. In this mechanism, the lower limit sensor 6 (micro switch) attached to the elevator 1 detects the lower limit and forcibly stops the elevator 1.

[0003]

However, if the lower limit sensor 6 does not operate, the elevator arm 2 may collide with the elevator pedestal and be damaged. Also,
If you forget to put something under the elevator or something falls down due to operator's carelessness, etc.
It could distort the elevator itself. The present invention solves the above-mentioned conventional problems by duplicating the limit sensor, and if there is an unintended object in the lower direction of the transport mechanism section, stop it surely at the time of contact with it and damage it. A stop device for an elevator mechanism capable of preventing the above is provided.

[0004]

The present invention is directed to an elevator 1
A lower limit limit sensor 6 for detecting a lower limit attached to the elevator arm 2 for vertically moving an object provided on the elevator arm 2, and a lower limit sensor 6 for detecting a lower limit attached to the elevator 1. 2 is a stop device for an elevator mechanism, which is provided with a second stop switch 10.

[0005]

When there is an unintended object below, the elevator 1 descends, the arm 2 passes the lower limit sensor 6, and the elevator 1 is stopped before the arm 2 hits the elevator pedestal.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS. On the lower part 2d of the elevator arm 2, a folded upper part on both sides of a panel 11 having a size to cover the lower surface thereof is attached so as to rotate up and down by a fulcrum 7. Long holes 11a and 11b are formed in the upper and lower folded portions of both sides of the panel 11 for loosely fitting the operating adjustment pin 8 and the non-operating adjustment pin 9 pivotally provided on the lower portion 2d.

The operating portion of the second stop switch 10 fixed to the lower portion 2d is opposed to the upper surface of the panel 11.
The long hole 11a of the pin 8 defines the mechanical limit,
The pin 8 is adjusted so that the stop switch is not damaged during operation to prevent the switch 10 from being damaged. Long hole 11b of pin 9
Is for adjusting the non-operating point, and has a size that allows a margin during operation.

Next, the operation of this device will be described. Panel 1
If there is an unintended object below 1, the elevator 1 moves down, and before the arm 2 passes the lower limit sensor 6 and hits the elevator pedestal, this panel 11 pushes up about the fulcrum 7 and stops. The switch 10 is operated and the elevator 1 is stopped.

As described above, since the stop switch 10 operates before the arm 2 hits the elevator pedestal, the arm 2
Also, damage to the elevator 1 can be prevented. Therefore, if the operator moves carelessly and leaves the object under the elevator, the damage to the object can be prevented, and the elevator itself is not distorted.

[0010]

According to the present invention, not only can the elevator mechanism portion be prevented from being damaged by double mounting the elevator stop mechanism, but also accidents due to the carelessness of the operator during maintenance can be prevented. , Expensive quartz boat,
The wafer and the moving and loading mechanism thereof are prevented from being damaged, which is a great economical effect.

[Brief description of drawings]

FIG. 1 is a front view of an embodiment of the present invention.

FIG. 2 is a front view of a lower portion of an elevator arm.

FIG. 3 is a plan view thereof.

FIG. 4 is a side view thereof.

FIG. 5 is a front view of a conventional device.

FIG. 6 is a perspective view of a conventional device.

[Explanation of symbols]

 1 Elevator 2 Elevator arm 6 Lower limit sensor 10 Stop switch

Claims (1)

[Claims] 1. A transport mechanism unit connected to an elevator that operates in the vertical direction, which comprises an elevator, an elevator arm that vertically transports an object provided on the elevator, and a lower limit sensor that detects a lower limit attached to the elevator. The second stop switch is installed in the, and if there is an unintended object below it, the elevator will descend and stop the elevator before the arm passes the lower limit sensor and hits the elevator pedestal. Elevator mechanism stop device.