JPH0628107B2 - Magnetic disk - Google Patents
Magnetic diskInfo
- Publication number
- JPH0628107B2 JPH0628107B2 JP60033602A JP3360285A JPH0628107B2 JP H0628107 B2 JPH0628107 B2 JP H0628107B2 JP 60033602 A JP60033602 A JP 60033602A JP 3360285 A JP3360285 A JP 3360285A JP H0628107 B2 JPH0628107 B2 JP H0628107B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- magnetic disk
- protective film
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Lubricants (AREA)
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】 <産業上の利用分野> 本発明は磁気記録用ハードディスクに関し、特に高密度
記録用ハードディスクの保護膜に関するものである。The present invention relates to a magnetic recording hard disk, and more particularly to a protective film for a high density recording hard disk.
<従来の技術> 近年、磁気記録の分野では高密度化の研究が進められて
おり、特に垂直磁気記録方式が発表されて以来、垂直・
面内を問わず磁気記録の限界を目指して研究開発活動が
一段と活発に行なわれている。ハードディスクの分野に
おいても、これまでの塗布型媒体から高保持力、高残留
磁束密度を有する連続薄膜媒体−メッキ,スパッタ膜媒
体−の開発が精力的に行なわれている。しかしながら、
“高密度化”の実現に当っては媒体の磁気特性向上もさ
ることながら、ヘッド・媒体のエアーギャップ量の減少
化を図ることも重要な要素である。現在、ハードディス
クのエアーギャップ量は0.25μm程度の値まで狭小化さ
れた装置が実用化されているが、線記録密度の大幅な向
上を達成するためには、ヘッド・媒体のスペーシング・
ロスを小さくすることが必要となり、従ってエアーギャ
ップ量を更に減少させることが要求される。この点に関
し、媒体保護層の形成はスペーシング・ロスに直接係わ
るために保護層の薄層化は高密度化に伴って一層重要な
問題となる。<Prior Art> In recent years, research has been conducted on high density in the field of magnetic recording, and since the perpendicular magnetic recording system was announced, the
Research and development activities are being carried out more and more aiming at the limit of magnetic recording regardless of the plane. Even in the field of hard disks, continuous thin film media having high coercive force and high residual magnetic flux density-plating and sputter film media-have been vigorously developed from the conventional coating type media. However,
In realizing "high density", it is important to reduce the air gap amount between the head and the medium while improving the magnetic characteristics of the medium. At present, a device in which the air gap amount of a hard disk is narrowed down to a value of about 0.25 μm has been put into practical use, but in order to achieve a significant improvement in linear recording density, the head / medium spacing /
It is necessary to reduce the loss, and therefore it is required to further reduce the air gap amount. In this respect, since the formation of the medium protective layer is directly related to the spacing loss, the thinning of the protective layer becomes a more important problem with the increase in density.
従来、メッキ・ディスクには外部衝撃や摩耗等に対する
表面保護層として潤滑剤を塗布したSiO2が広く用いられ
ている。しかしながら、これの薄層化についてはCSS
(コンタクト・スタート・ストップ)をクリヤする強度
を確保する必要上、300Å程度の膜厚が実用限界とさ
れており、将来の高密度化に対して実用に供するには問
題がある。更に、潤滑剤によるヘッド・媒体の吸着の問
題があり、今後媒体表面の平滑化が進むとますます潤滑
剤の塗布量の制御が難しくなると思われる。このため、
最近ではSiO2に代わる材料として、材料そのものに潤滑
性を持たせた膜が検討されており、特にグラファイト膜
について良好な結果が報告されている。Conventionally, SiO 2 coated with a lubricant is widely used as a surface protection layer against external impacts and abrasions in plated disks. However, regarding thinning of this, CSS
Since it is necessary to secure the strength for clearing (contact start / stop), a film thickness of about 300 Å is set as a practical limit, and there is a problem in putting it into practical use for future high density. Furthermore, there is a problem of adsorption of the head and medium by the lubricant, and it will be more difficult to control the amount of lubricant applied as the surface of the medium becomes smoother in the future. For this reason,
Recently, a film in which the material itself has lubricity has been studied as a material replacing SiO 2 , and particularly good results have been reported for a graphite film.
<発明の目的> 本発明は、上述の保護膜に関する問題点を考慮してなさ
れたものであり、グラファイト膜以上に耐久性と潤滑性
を兼ね備えた保護膜を有する高密度記録に適する磁気デ
ィスクを提供することを目的とする。<Objects of the Invention> The present invention has been made in consideration of the above-mentioned problems relating to the protective film, and provides a magnetic disk having a protective film having both durability and lubricity as compared with a graphite film, which is suitable for high density recording. The purpose is to provide.
<実施例> 以下、本発明に用いられる保護膜について詳細に説明す
る。初めに保護層の材料であるガラス状カーボンについ
て述べる。ガラス状カーボン(製品名:グラハード,花
王石鹸株式会社製)は黒鉛状の微結晶が等方的に分布し
た結晶化の幾分進んだアモルファス構造を有する。この
材料は硬度が高く摩擦係数が小さい自己潤滑性のある材
料で、特に小荷重のもとでの面接触において摩耗しにく
い特徴をもつ。これは一般のグラファイトを利用した潤
滑剤に見られる結晶面の剥離に基づく潤滑作用とは性質
を異にする。既に、この効果(自己潤滑性,耐摩耗性)
については、垂直磁気記録用単磁極ヘッドの基板材料に
用いられて良好な走行特性と耐久性が報告されている
(岩崎,中村,岸根:昭和58年電子通信学会総合全国
大会1-200)。このガラス状カーボン材料をターゲット
として下表に示す条件のもとでRF2極スパッタ装置を
用いて磁性媒体上に保護膜を作製した。<Example> Hereinafter, the protective film used in the present invention will be described in detail. First, the glassy carbon as the material of the protective layer will be described. Glassy carbon (product name: Grahard, manufactured by Kao Soap Co., Ltd.) has an amorphous structure in which crystallized graphite-like microcrystals are isotropically distributed to some extent. This material has a high hardness and a small coefficient of friction and is self-lubricating, and is characterized by being less likely to wear during surface contact under a small load. This is different from the lubrication action based on the exfoliation of the crystal plane, which is found in general lubricants using graphite. Already, this effect (self-lubrication, wear resistance)
In regards to the above, good running characteristics and durability have been reported to be used as a substrate material for a single magnetic pole head for perpendicular magnetic recording (Iwasaki, Nakamura, Kishine: 1985 IEICE General Conference 1-200). Using this glassy carbon material as a target and under the conditions shown in the table below, a protective film was formed on the magnetic medium using an RF bipolar sputtering device.
磁性媒体上に得られた各々の膜は、ターゲット材と同じ
光沢を示し、透過電顕による膜構造解析によればターゲ
ット材と同じアモルファス構造をもっていることが判明
した。従って、上記ターゲットを用いてスパッタ法によ
り作製した膜の特性は、ガラス状カーボンと同様の特性
を示すものと考えられる。次にフェライトヘッドを用い
て膜厚200Åのガラス状カーボン・スパッタ膜とグラフ
ァイト・スパッタ膜を設けた各々の磁気ディスクについ
て低速走行テストを行なった。その結果、ヘッド荷重の
増加に対してガラス状カーボン・スパッタ膜の方が傷が
つきにくくて優れていることが確かめられた。以上のこ
とからガラス状カーボンの薄膜は、高密度記録ハードデ
ィスク用保護膜として適しており厚さ300Å以下でも
十分利用することができることが認められる。しかも広
いスパッタ条件のもとで作製可能であることから、生産
性の向上にも寄与する。 Each film obtained on the magnetic medium showed the same gloss as the target material, and it was found by film structure analysis by transmission electron microscopy that it had the same amorphous structure as the target material. Therefore, the characteristics of the film formed by the sputtering method using the above target are considered to exhibit the same characteristics as glassy carbon. Next, a low-speed running test was performed on each magnetic disk provided with a glass-like carbon sputtered film and a graphite sputtered film having a film thickness of 200 Å using a ferrite head. As a result, it was confirmed that the glass-like carbon sputtered film was superior to the increased head load because it was less likely to be damaged. From the above, it is recognized that the glassy carbon thin film is suitable as a protective film for a high-density recording hard disk and can be sufficiently used even when the thickness is 300 Å or less. Moreover, since it can be produced under a wide range of sputtering conditions, it also contributes to the improvement of productivity.
添附図面は上記ガラス状カーボンを利用した本発明の1
実施例である磁気ディスクの模式断面構成図である。ハ
ードディスク基板1にCo-CrやNi-Fe等から成る高透磁率
の磁性層2が層設され、この磁性層2に情報が磁気記録
される。磁性層2の表面には上述の自己潤滑性を有する
ガラス状カーボンをリアクティブスパッタリング法によ
って薄膜状に被覆した保護膜3が形成されている。保護
膜3の厚さは200Å程度に設定する。磁性層2に対向
してヘッド4が配置されヘッド4を介して記録情報が再
生される。この磁気ディスクは保護膜3の耐摩耗特性に
起因して耐久性が良く、高密度の記録情報を長期にわた
って再生可能とする。The attached drawings show 1 of the present invention using the above glassy carbon.
It is a schematic cross section block diagram of the magnetic disk which is an Example. A magnetic layer 2 having a high magnetic permeability made of Co-Cr, Ni-Fe or the like is layered on a hard disk substrate 1, and information is magnetically recorded on the magnetic layer 2. On the surface of the magnetic layer 2, a protective film 3 is formed by coating the above-mentioned glassy carbon having self-lubricating property into a thin film by a reactive sputtering method. The thickness of the protective film 3 is set to about 200Å. A head 4 is arranged so as to face the magnetic layer 2, and recorded information is reproduced via the head 4. This magnetic disk has good durability due to the abrasion resistance of the protective film 3, and enables high-density recorded information to be reproduced for a long time.
<発明の効果> 以上詳説した如く、本発明によれば、ディスク表面の保
護膜が潤滑性に優れ、また、耐摩耗特性が優れかつ程よ
いことからヘッドを損傷することなく、ヘッド・記録媒
体間のエアーギャップを極めて小さくすることができ、
高密度記録に対応する磁気ディスクを作製することが可
能となる。また、ターゲット材としてガラス状カーボン
を用いることで容易に膜作成でき、通常磁性膜をスパッ
タして作成するため、磁性膜と保護膜とを連続して作成
できて生産性に優れ、しかもガラス状カーボンのある程
度の導電性により、静電気を発生するようなことがな
く、ほこりの吸着や静電破壊(特にヘッドの静電破壊)
を招くことを防止することができる。<Effects of the Invention> As described above in detail, according to the present invention, the protective film on the disk surface is excellent in lubricity, and the abrasion resistance is excellent and moderate, so that the head is not damaged and the recording medium is not damaged. The air gap of can be made extremely small,
It becomes possible to manufacture a magnetic disk compatible with high-density recording. In addition, it is possible to easily form a film by using glassy carbon as a target material, and usually a magnetic film is formed by sputtering. Therefore, it is possible to form a magnetic film and a protective film in succession, which is excellent in productivity. Due to the conductivity of carbon to some extent, static electricity is not generated, and dust is adsorbed or electrostatically destroyed (especially electrostatic breakdown of the head).
Can be prevented.
図面は本発明の1実施例である磁気ディスクの模式断面
構成図である。 1……ディスク基材、2……磁性層、3……保護膜The drawing is a schematic cross-sectional configuration diagram of a magnetic disk according to an embodiment of the present invention. 1 ... Disk substrate, 2 ... Magnetic layer, 3 ... Protective film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 向井 厚雄 大阪府大阪市阿倍野区長池町22番22号 シ ヤープ株式会社内 (72)発明者 ▲吉▼川 光彦 大阪府大阪市阿倍野区長池町22番22号 シ ヤープ株式会社内 審査官 岡本 利郎 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Atsushi Mukai 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka Within Sharp Corporation (72) Inventor ▲ Mitsuhiko Yoshikawa 22-22 Nagaike-cho, Abeno-ku, Osaka-shi, Osaka No. Sharp Co., Ltd. Examiner Toshiro Okamoto
Claims (1)
膜を表面保護膜として被覆したことを特徴とする磁気デ
ィスク。1. A magnetic disk comprising a self-lubricating glassy carbon thin film coated as a surface protective film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60033602A JPH0628107B2 (en) | 1985-02-19 | 1985-02-19 | Magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60033602A JPH0628107B2 (en) | 1985-02-19 | 1985-02-19 | Magnetic disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61190719A JPS61190719A (en) | 1986-08-25 |
| JPH0628107B2 true JPH0628107B2 (en) | 1994-04-13 |
Family
ID=12391028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60033602A Expired - Lifetime JPH0628107B2 (en) | 1985-02-19 | 1985-02-19 | Magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628107B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW342495B (en) | 1996-07-22 | 1998-10-11 | Matsushita Electric Industrial Co Ltd | Master information carrier, method of producing the same, and method for recording master information signal on magnetic recording medium |
| JP3329259B2 (en) * | 1998-03-20 | 2002-09-30 | 松下電器産業株式会社 | Master information carrier and method of manufacturing magnetic recording medium |
| JP3361740B2 (en) | 1998-03-23 | 2003-01-07 | 松下電器産業株式会社 | Master information magnetic recording device and method of manufacturing magnetic recording medium |
| WO2000026904A1 (en) | 1998-10-29 | 2000-05-11 | Matsushita Electric Industrial Co., Ltd. | Master information medium and method of master information recording |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6023406B2 (en) * | 1977-05-18 | 1985-06-07 | 日本電気株式会社 | magnetic disk |
| JPS59213030A (en) * | 1983-05-17 | 1984-12-01 | Denki Kagaku Kogyo Kk | Magnetic recording medium and its manufacture |
-
1985
- 1985-02-19 JP JP60033602A patent/JPH0628107B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61190719A (en) | 1986-08-25 |
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