JPS63102017A - Magnetic recording medium - Google Patents
Magnetic recording mediumInfo
- Publication number
- JPS63102017A JPS63102017A JP24687486A JP24687486A JPS63102017A JP S63102017 A JPS63102017 A JP S63102017A JP 24687486 A JP24687486 A JP 24687486A JP 24687486 A JP24687486 A JP 24687486A JP S63102017 A JPS63102017 A JP S63102017A
- Authority
- JP
- Japan
- Prior art keywords
- boron
- film
- magnetic
- protective film
- magnetic recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 35
- 239000010408 film Substances 0.000 claims abstract description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 230000001681 protective effect Effects 0.000 claims abstract description 19
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 17
- 229910052751 metal Inorganic materials 0.000 claims abstract description 15
- 239000002184 metal Substances 0.000 claims abstract description 14
- 229910052580 B4C Inorganic materials 0.000 claims abstract description 12
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052796 boron Inorganic materials 0.000 claims abstract description 12
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 12
- 229910052582 BN Inorganic materials 0.000 claims abstract description 11
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000000956 alloy Substances 0.000 abstract description 4
- 229910045601 alloy Inorganic materials 0.000 abstract description 4
- 230000005294 ferromagnetic effect Effects 0.000 abstract description 4
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- 229910017061 Fe Co Inorganic materials 0.000 abstract 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 3
- 239000010952 cobalt-chrome Substances 0.000 description 3
- -1 Co-8m Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- 229910020707 Co—Pt Inorganic materials 0.000 description 1
- 229910020516 Co—V Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910017110 Fe—Cr—Co Inorganic materials 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 235000010724 Wisteria floribunda Nutrition 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- FPVKHBSQESCIEP-JQCXWYLXSA-N pentostatin Chemical compound C1[C@H](O)[C@@H](CO)O[C@H]1N1C(N=CNC[C@H]2O)=C2N=C1 FPVKHBSQESCIEP-JQCXWYLXSA-N 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分舒〕
本発明は磁気記録媒体、さらに眸しくは走行耐久性にす
ぐれる金属薄膜型磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application] The present invention relates to a magnetic recording medium, and more particularly to a metal thin film type magnetic recording medium that has excellent running durability.
近年、記録媒体の高密度化に伴い、従来の塗布型磁気記
録媒体に替わって、いわゆる金属薄膜型磁気記録媒体が
注目されるようにガってきている。In recent years, as the density of recording media has increased, so-called metal thin film magnetic recording media have been attracting attention in place of conventional coated magnetic recording media.
しかし、金属薄膜型磁気記録媒体は、従来の塗布型磁気
記録媒体のように潤滑剤や研磨剤を磁性中に混入させる
ことが困難なので、一般に走行耐久性に劣り、例えばC
o−Cr合金膜を設けた垂直磁気記録ディスクの場合1
00回程度の走行パスで表面の合金とヘッドとの間で凝
着等が生じて走行不能になることが多い。However, metal thin film magnetic recording media generally have poor running durability because it is difficult to mix lubricants or abrasives into the magnetic material as in conventional coated magnetic recording media.
In case of perpendicular magnetic recording disk with o-Cr alloy film 1
After about 00 running passes, adhesion occurs between the alloy on the surface and the head, and the head often becomes unable to run.
そこで、このような問題を解決するために、液体潤滑剤
を磁性層表面に塗布したり、固体保護膜を磁性膜表面に
設けることが提案されている。この中では、固体潤滑剤
であるカーボンを主成分とする保護膜を磁性膜表面に設
けることが特に走行耐久性向上に効果があることが知ら
れている。In order to solve this problem, it has been proposed to apply a liquid lubricant to the surface of the magnetic layer or to provide a solid protective film on the surface of the magnetic layer. Among these, it is known that providing a protective film mainly composed of carbon, which is a solid lubricant, on the surface of the magnetic film is particularly effective in improving running durability.
しかしながら、このようなカーボンを主成分とする保護
層を磁性層表面に設けてもなお走行耐久性が充分でない
。これは主にヘッドに生じた付着物が保護との摩擦係数
を増大させることに原因するものと考えられる。However, even if such a protective layer containing carbon as a main component is provided on the surface of the magnetic layer, running durability is still insufficient. This is thought to be mainly due to the fact that the deposits on the head increase the coefficient of friction between the head and the protector.
さらに、ほう素、ケイ素、遷移金属元素等をダイアモン
ド状カーボン保護膜に含有させることが提案されている
が(特開昭乙O−コタタ3乙号)、潤滑性が劣り、した
がって十分な耐久性が得られない。Furthermore, it has been proposed to incorporate boron, silicon, transition metal elements, etc. into the diamond-like carbon protective film (Japanese Unexamined Patent Publication No. 2003-100002), but the lubricity is poor and therefore the durability is insufficient. is not obtained.
本発明は、磁気ヘッドに付着物を生せしめない、かつ走
行耐久性の著しく改良された金属薄膜型磁気記録媒体を
提供するにある。SUMMARY OF THE INVENTION The present invention provides a thin metal film type magnetic recording medium that does not cause deposits on a magnetic head and has significantly improved running durability.
本発明は、非磁性基板上に磁性金属薄膜を設けてなる磁
気記録媒体において、該薄膜上にほう素、窒化ほう素、
および炭化ほう素から選ばれる少なくとも1種を含有す
るグラファイト状カーボンを主成分とする保護膜が設け
られていることを特徴とする磁気記録媒体、に関する。The present invention provides a magnetic recording medium in which a magnetic metal thin film is provided on a non-magnetic substrate, in which boron, boron nitride,
The present invention relates to a magnetic recording medium characterized in that it is provided with a protective film whose main component is graphitic carbon containing at least one selected from the group consisting of boron carbide and boron carbide.
上記グラファイト状カーボンを主成分とする保賜膜とは
、真空蒸着法、スパッタリング法等で作成されるグラフ
ァイト様のアモルファス膜を意味する。すなわち、X線
回折によっては明確なピークが見られず、かつX線電子
分光法1xps)により求められる炭素のプラズモン損
失エネルギー値がグラファイトのそれを示すような膜で
ある。The above-mentioned protective film containing graphite-like carbon as a main component means a graphite-like amorphous film created by a vacuum evaporation method, a sputtering method, or the like. In other words, it is a film in which no clear peak is observed by X-ray diffraction, and the plasmon loss energy value of carbon determined by X-ray electron spectroscopy (1xps) shows that of graphite.
上記グラファイト状カーボンを主成分とする保護膜中に
含有されるほう素、窒化ほう素、および炭化ほう素の重
量は10係以下であり、0.j〜5憾であることが好ま
しい。The weight of boron, boron nitride, and boron carbide contained in the protective film mainly composed of graphitic carbon is 10 parts or less, and 0. It is preferable that it is j~5.
本発明の磁性金属薄膜には、Fe、Co、Ni等の強磁
性金属、あるいはpe−Co、Fe−Ni1Co−Ni
、Fe−8i、Co−Cr。The magnetic metal thin film of the present invention includes ferromagnetic metals such as Fe, Co, and Ni, or pe-Co, Fe-Ni1Co-Ni, etc.
, Fe-8i, Co-Cr.
Co−V、Co−8m、Co−Pt、Co−P。Co-V, Co-8m, Co-Pt, Co-P.
Co−N1−P、Fe−Cr−Co等の強磁性合金、あ
るいはまたこれらに微量の金属元素等が添加されたもの
が使用される。A ferromagnetic alloy such as Co-N1-P or Fe-Cr-Co, or one in which a trace amount of a metal element or the like is added to these alloys is used.
非磁性基板としてはポリエチレンテレフタレート、ポリ
イミド、ポリアミド等のフィルム状の高分子材料、ポリ
カーボネイト、ポリメチルメタクリレート等のディスク
状の高分子材料、ガラス等のセラミック、アルミニウム
等の金属等が使用可能である。基板の形状はシート、カ
ード、ディスク、ドラム、テープ等のいずれでも良い。As the non-magnetic substrate, it is possible to use film-like polymeric materials such as polyethylene terephthalate, polyimide, polyamide, etc., disc-shaped polymeric materials such as polycarbonate, polymethyl methacrylate, ceramics such as glass, metals such as aluminum, etc. The shape of the substrate may be a sheet, card, disk, drum, tape, or the like.
本発明の磁気記録媒体を作成するには、まず非磁性基板
上に磁性金属薄膜を真空蒸着、スパッタリング、イオン
ブレーティング、メッキ等の方法で被着せしめて形成し
、更にその上にほう素、窒化ほう素、炭化ほう素のうち
少なくとも一種を含有するグラファイト状カーボンを主
成分とする保護膜を真空蒸着、スパッタリング等で形成
すれば良い。To create the magnetic recording medium of the present invention, first, a magnetic metal thin film is deposited on a nonmagnetic substrate by a method such as vacuum evaporation, sputtering, ion blating, or plating, and then boron, A protective film whose main component is graphitic carbon containing at least one of boron nitride and boron carbide may be formed by vacuum evaporation, sputtering, or the like.
この場合、磁性膜は2種の異なる磁性体を用いて積層し
ても良いし、下地層を設けた単層型にしても良い。また
、中間層を設けた積層型にしても良い。なお磁性膜の厚
さはいずれの場合でもO0/−jμm程度が適当である
。In this case, the magnetic film may be laminated using two different magnetic materials, or may be a single layer type with an underlayer provided. Alternatively, a laminated type having an intermediate layer may be used. In any case, the appropriate thickness of the magnetic film is approximately O0/-j .mu.m.
また、保護膜の厚さは厚すぎると記録、再生時に充分な
出力が得られず、−力落すぎると走行耐久性の向上が見
られないので、io〜1000k、好ましくは3o−2
00に程度である。In addition, if the thickness of the protective film is too thick, sufficient output will not be obtained during recording and reproduction, and if the force is too low, no improvement in running durability will be seen.
It is about 0.00.
以下、本発明の実施例について説明する。 Examples of the present invention will be described below.
非磁性基板として厚さ50μmのポリイミドフィルムを
用いた。A polyimide film with a thickness of 50 μm was used as a nonmagnetic substrate.
まず、この基板上にCoCrをターゲットとしたArガ
ス中のスパッタリングにより厚さ2300にのCoCr
薄膜を形成した。First, CoCr was deposited on this substrate to a thickness of 2300 mm by sputtering in Ar gas using CoCr as a target.
A thin film was formed.
次に、グラファイトターゲットとほう素、窒化ほう素、
炭化ほう素等のターゲットを用いてArガス中で2元同
時スノツタリングを行い、上記CoCr薄膜上に上記物
質の中から少なくとも一種を含有するグラファイト状カ
ーボンを主成分とする厚さ200大の保護膜を各種作成
した。Next, a graphite target and boron, boron nitride,
Binary simultaneous snottering is performed in Ar gas using a target such as boron carbide, and a protective film with a thickness of 200 mm mainly composed of graphitic carbon containing at least one of the above substances is formed on the CoCr thin film. We created various types of .
これらを直径3.5インチのディスクの形状に加工し、
市販のディスクジャケットに組み込んだ。These are processed into a disc shape with a diameter of 3.5 inches,
It was incorporated into a commercially available disc jacket.
市販のフロッピーディスクドライブにより記録を行った
後、再生信号と摩擦係数をモニターしなからA 00
r、p、mで回転させ、摩擦係数が急激に大きくなるま
でのノ(ス数を測定することにより走行耐久性のテスト
を行った。After recording with a commercially available floppy disk drive, monitor the playback signal and friction coefficient.
Running durability was tested by rotating at r, p, and m and measuring the number of passes until the friction coefficient suddenly increased.
ほう素、窒化ほう素、炭化ほう素等の含有量はオージェ
電子分光法を用いて測定した各々の元素と炭素との微分
ス堅りトルのピーク比より求めた。The content of boron, boron nitride, boron carbide, etc. was determined from the peak ratio of the differential hardness of each element and carbon measured using Auger electron spectroscopy.
々お、膜厚方向で保護膜の構成元素の組成に変化がない
ことも同様にして確認した。Furthermore, it was similarly confirmed that there was no change in the composition of the constituent elements of the protective film in the film thickness direction.
比較の為、上記物質を含有しないグラファイト状カーボ
ンを主成分とする厚さ200にの保護膜を設は九媒体も
作成し、これを比較例とした。For comparison, a medium with a protective film having a thickness of 200 mm and consisting mainly of graphite-like carbon that does not contain the above-mentioned substances was also prepared, and this was used as a comparative example.
得られた結果を第7表〜第3表に示した。表から明らか
なように、ほう素、窒化ほう素、および炭化ほう素を適
量含有したカーボ゛ンを主成分とする保護膜を設けた媒
体は、これらを含有しないカーボンを主成分とする保護
膜を設けた媒体と比較して走行耐久性に優れている。ヘ
ッドを顕微鏡観察した結果、含有した金属の量が多く走
行耐久性が悪かった媒体には付着物はないものの傷が入
り、走行耐久性の優れた媒体には付着物も傷もなく、金
属を含有しかい媒体は傷はないものの付着物が発生して
いることを確認した。The obtained results are shown in Tables 7 to 3. As is clear from the table, media with a protective film mainly composed of carbon containing appropriate amounts of boron, boron nitride, and boron carbide are different from those with a protective film mainly composed of carbon that does not contain these. Excellent running durability compared to media with As a result of observing the heads under a microscope, media with high metal content and poor running durability had no deposits but were scratched, while media with excellent running durability had no deposits or scratches and contained metal. Although there were no scratches on the media, it was confirmed that there were deposits on the media.
第1表
第2表
第3表
〔発明の効果〕
本発明の磁気記録媒体は、走行時磁気ヘッドに付着物を
生ぜしめないと同時に、走行耐久性に顕著にすぐれるも
のである。Table 1 Table 2 Table 3 [Effects of the Invention] The magnetic recording medium of the present invention does not produce deposits on the magnetic head during running, and at the same time has significantly excellent running durability.
特許出願人 富士写真フィルム株式会社−ヂ −Patent applicant: Fuji Photo Film Co., Ltd.
Claims (1)
において、該薄膜上にほう素、窒化ほう素、および炭化
ほう素から選ばれる少なくとも1種を10重量%以下含
有するグラファイト状カーボンを主成分とする保護膜が
設けられていることを特徴とする磁気記録媒体。In a magnetic recording medium comprising a magnetic metal thin film provided on a non-magnetic substrate, the thin film mainly contains graphitic carbon containing 10% by weight or less of at least one selected from boron, boron nitride, and boron carbide. A magnetic recording medium characterized by being provided with a protective film as a component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24687486A JPS63102017A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24687486A JPS63102017A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102017A true JPS63102017A (en) | 1988-05-06 |
Family
ID=17155018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24687486A Pending JPS63102017A (en) | 1986-10-17 | 1986-10-17 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102017A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360017A (en) * | 1991-06-07 | 1992-12-14 | Fujitsu Ltd | Metallic thin film type magnetic disk and production thereof |
| JP2006351135A (en) * | 2005-06-17 | 2006-12-28 | Hoya Corp | Magnetic disk and manufacturing method for magnetic disk |
-
1986
- 1986-10-17 JP JP24687486A patent/JPS63102017A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04360017A (en) * | 1991-06-07 | 1992-12-14 | Fujitsu Ltd | Metallic thin film type magnetic disk and production thereof |
| JP2006351135A (en) * | 2005-06-17 | 2006-12-28 | Hoya Corp | Magnetic disk and manufacturing method for magnetic disk |
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