JPS6023406B2 - magnetic disk - Google Patents
magnetic diskInfo
- Publication number
- JPS6023406B2 JPS6023406B2 JP52058140A JP5814077A JPS6023406B2 JP S6023406 B2 JPS6023406 B2 JP S6023406B2 JP 52058140 A JP52058140 A JP 52058140A JP 5814077 A JP5814077 A JP 5814077A JP S6023406 B2 JPS6023406 B2 JP S6023406B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- carbon
- magnetic
- magnetic disk
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
この発明は保護皮膜を有する磁気ディスクに関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic disk having a protective coating.
磁気ディスクの占める空間的大きさをできる限り有効に
使うためには、情報の記録密度を可能な限り高めること
が最上の手段とされている。In order to use the space occupied by a magnetic disk as effectively as possible, the best means is to increase the information recording density as much as possible.
しかしこの事は磁気ディスクの磁気特性を向上させるこ
との他に磁性膜の膜厚を薄くし、しかも磁気へツドとの
間隙を極力小さくすることを要求し、その結果必然的に
増える磁気ヘッドとの衝突、摩耗から磁気ディスクの情
報を守るために保護皮膜を設けることが必須とされてい
る。このような保護皮膜は当然ながら、極めて薄い膜で
しかも十分な潤滑性もしくは堅固さを備えたものでなけ
ればならないが、このような条件を満す保護膜は皆無に
近い状態であり、磁気ディスクの装置の高密度化に大き
な障害となっている。この発明の目的は従来の磁気ディ
スクの機械的耐久性を飛躍的に向上させた高性能磁気デ
ィスクを提供することにある。However, this requires not only improving the magnetic properties of the magnetic disk, but also reducing the thickness of the magnetic film and minimizing the gap between the magnetic head and the magnetic head, which inevitably increases the number of magnetic heads. It is essential to provide a protective film to protect information on magnetic disks from collisions and wear. Naturally, such a protective film must be extremely thin and have sufficient lubricity or hardness, but there are almost no protective films that meet these conditions, and magnetic disks This is a major obstacle to increasing the density of devices. An object of the present invention is to provide a high-performance magnetic disk that dramatically improves the mechanical durability of conventional magnetic disks.
この発明の構成は、磁気ディスク表面に、グラフアィト
状炭素薄膜,ダイアモンド状炭素薄膜,グラフアィト状
炭素薄膜とダイヤモンド状炭素薄膜とを交互に重ねた薄
膜、もしくは、グラフアィト状炭素とダイヤモンド状炭
素との混在する薄膜のいずれかより成る保護皮膜を設け
たことを特徴とする。The structure of the present invention is such that a thin film of graphite-like carbon, a diamond-like carbon thin film, a thin film of graphite-like carbon and a thin film of diamond-like carbon are alternately stacked on the surface of a magnetic disk, or a mixture of graphite-like carbon and diamond-like carbon. The invention is characterized in that it is provided with a protective film made of any of the following thin films.
以下この発明に関し図面を用いて説明する。This invention will be explained below with reference to the drawings.
第1図はこの発明の一実施例を示したもので、aは磁気
ディスク11の平面図、bはそのXX′断面を示した図
である。基板12の表面に設けられた磁性膜13とその
上に保護膜としてほぼ全面にわたって設けられた炭素を
主成分とする皮膜14より成る。第2図はこの発明の他
の実施例を示す図で、aは平面図、bはXX′断面図で
ある。FIG. 1 shows an embodiment of the present invention, in which a is a plan view of a magnetic disk 11 and b is a cross-sectional view XX' thereof. It consists of a magnetic film 13 provided on the surface of a substrate 12 and a film 14 whose main component is carbon, which is provided over almost the entire surface as a protective film. FIG. 2 is a diagram showing another embodiment of the present invention, in which a is a plan view and b is a XX' sectional view.
基板22の表面に磁性膜23を設け、この磁性膜23の
表面うち磁気ヘッドとの衝突摩擦の生じ易い領域のみに
炭素を主成分そする皮膜を設けてある。このような磁気
ディスクは最近の高性能磁気ディスク装置に対して特に
有効である。A magnetic film 23 is provided on the surface of the substrate 22, and a film containing carbon as a main component is provided only in areas of the surface of the magnetic film 23 where collision friction with the magnetic head is likely to occur. Such magnetic disks are particularly effective for recent high-performance magnetic disk drives.
このような装置は停止中から駆動初期で磁気ヘッドで磁
気ディスク面上の特定の領域に定在するようになってお
り、しかも互に接触もしくは接触に近い状態にあるが、
通常の動作時には磁気ディスクの高速回転につて空気力
学的に磁気ヘッドが微小間隙を残して浮揚しもはや相互
に衝突をしなくなった時点でディスク面の他の領域則ち
記憶領域へ情熱を書込み読出しを行うべき移動するよう
構成となっている。従ってこのような特定の領域にこの
発明になる皮膜24を設けることによってディスク面の
磨耗を防ぐことができると共に記憶領域では皮膜24を
無くし磁性膜23と磁気ヘッドとの浮揚間隔を極めて小
さくできる。第2図の例では磁気ヘッドの浮揚状態が極
めて安定している装置に通した磁気ディスクの一例であ
る。第3図はこの発明のさらに他の実施例を示す図で、
aは平面図、bはXX′断面図である。In such a device, the magnetic head is positioned in a specific area on the magnetic disk surface from the stoppage to the initial stage of operation, and the heads are in contact or close to contacting each other.
During normal operation, as the magnetic disk rotates at high speed, the magnetic heads aerodynamically levitate, leaving a small gap, and when they no longer collide with each other, they write and read passion to other areas on the disk surface, that is, the storage area. It should be configured to move. Therefore, by providing the film 24 according to the present invention in such a specific area, it is possible to prevent wear of the disk surface, and also to eliminate the film 24 in the storage area, making it possible to extremely reduce the flying distance between the magnetic film 23 and the magnetic head. The example shown in FIG. 2 is an example of a magnetic disk passed through a device in which the floating state of the magnetic head is extremely stable. FIG. 3 is a diagram showing still another embodiment of the present invention,
A is a plan view, and b is a cross-sectional view taken along the line XX'.
磁気ディスク面上で磁気ヘッドとの衝突摩擦の生じ易い
領域では、磁性膜はなくこの発明の特徴とする炭素を主
成分そする皮膜24が基板22上に設けられている。こ
の実施例では第2図に示す実施例と同様の効果の他に、
磁気ディスクの表面の段差を解消して均一平面とするこ
とができるので、空気の流れがより均十となり浮揚状態
のより安定な磁気ディスク装置を達成することができる
。In areas on the magnetic disk surface where collision friction with the magnetic head is likely to occur, there is no magnetic film, and a film 24 whose main component is carbon, which is a feature of the present invention, is provided on the substrate 22. In this embodiment, in addition to the same effects as the embodiment shown in FIG.
Since the level difference on the surface of the magnetic disk can be eliminated to make it a uniform plane, the air flow becomes more uniform, and a magnetic disk device with a more stable floating state can be achieved.
また他実施例として、磁気ヘッドとの衝突摩擦の生じ易
い領域では本発明の特徴とする皮膜を厚くし、記憶領域
ではその皮膜を薄く設けた構成を挙げることができる。As another embodiment, a structure in which the film, which is a feature of the present invention, is made thicker in areas where collision friction with the magnetic head is likely to occur, and the film is thinner in the storage area, can be mentioned.
さてこの発明をさらに具体的にするために前記炭素系皮
膜の製法の一例を挙げよう。第4図はこのような目的の
ために設計された装置の一例を模式的に示したもので、
ニードルバルブ31を通して送風管32よりアルゴンガ
スがイオン化室37に導かれ一部は真空排気口42より
、残りは絞り38を通って試料室41に入り、真空排気
口43より系外に排出され。アルゴン圧が約10‐2m
mHg程度にされたイオン化室37にはそれぞれの先端
に炭素3および35を有する電極34および36があり
、外部のコイル44に流れる電流の作る磁場のもとで高
圧電源E(100〜1000ボルト程度)により炭素電
極33と35の間で放電が起り炭素原子又は炭素イオン
が発生する。このようにして発生した炭素原子又は炭素
イオンは高真空(ガス圧10‐3〜10‐6mmH餅屋
度)に引かれた試料室41に導入された電極40を持つ
試料台39上の磁気ディスク表面に達し炭素を主成分と
する皮膜を形成する。試料室41の圧力が10‐3〜1
0‐5mmHg台にあるときに生じる炭素系皮膜は潤滑
性の高いグラフアィト状となるが、1971年発行の学
術雑誌ジヤーナル.オブ.アプライド.フイズイツクス
(JomM1 ofAppled Physies)第
42巻第7号2953乃至29班頁の報告にもあるよう
に、試料室41のガス圧を10‐5〜10‐6mmHg
台することにより高硬度を有するダイアモンド状炭素系
皮膜を生成することが知られている。このような炭素系
皮膜の厚さは情報の書込み議出しを行う記憶領域で高々
500〜1000オングストローム位が、第2図で示し
たた停止中の磁気ヘッド定圧部24で1000〜100
00オングストローク位が通し膜の成長速度(毎時数十
乃至数百オングストローム程度)をもとに所定の成長時
間により制御される。なお前記皮膜の構造はグラフアィ
ト状もしくはダイアモンド状のいずれかに限るものでは
なく、両者の混合もしくは緑層とすることもあり、この
ようにすることによって潤滑性と耐磨耗性を兼備した保
護膜とすることができ、しかもこれは試料室41内のガ
ス圧を制御することによって容易に作成することができ
る。以上に述べた実施例および皮膜作製法はこの発明を
具現するための一例にすぎず、炭素を主成分とするグラ
フアイト状もしくはダイアモンド状ごならには両者と共
に含む皮膜を設けた磁気ディスクであればいずれもこの
発明の特徴が生されることは言うまでもない。Now, in order to make this invention more specific, an example of the method for producing the carbon-based film will be given. Figure 4 schematically shows an example of a device designed for this purpose.
Argon gas is introduced into the ionization chamber 37 from the blower pipe 32 through the needle valve 31, and part of it enters the sample chamber 41 through the vacuum exhaust port 42, the rest passes through the throttle 38, and is exhausted to the outside of the system through the vacuum exhaust port 43. Argon pressure is about 10-2m
The ionization chamber 37, which is maintained at about mHg, has electrodes 34 and 36 having carbon 3 and carbon 35 at their tips, and is powered by a high voltage power supply E (approximately 100 to 1000 volts) under a magnetic field created by a current flowing through an external coil 44. ), a discharge occurs between the carbon electrodes 33 and 35 and carbon atoms or carbon ions are generated. The carbon atoms or carbon ions generated in this way are introduced into a sample chamber 41 drawn to a high vacuum (gas pressure 10-3 to 10-6 mmH Mochiya degree). and forms a film whose main component is carbon. The pressure in the sample chamber 41 is 10-3 to 1
The carbon-based film that forms when the temperature is between 0 and 5 mmHg becomes graphite-like with high lubricity, as reported in the academic journal Journal published in 1971. of. Applied. As reported in JomM1 of Applied Physies, Vol. 42, No. 7, Pages 2953 to 29, the gas pressure in the sample chamber 41 is set to 10-5 to 10-6 mmHg.
It is known that a diamond-like carbon-based film with high hardness can be produced by mounting. The thickness of such a carbon-based film is approximately 500 to 1000 angstroms in the storage area where information is written and transmitted, and 1000 to 100 angstroms in the magnetic head constant pressure section 24 when it is stopped as shown in FIG.
A stroke of approximately 0.00 angstroms is controlled by a predetermined growth time based on the growth rate of the film (approximately several tens to hundreds of angstroms per hour). The structure of the film is not limited to either graphite or diamond-like, but may be a mixture of both or a green layer.By doing so, a protective film with both lubricity and abrasion resistance can be created. Moreover, this can be easily created by controlling the gas pressure inside the sample chamber 41. The above-described embodiments and film production methods are merely examples for embodying the present invention, and magnetic disks may be coated with graphite-like or diamond-like materials containing both carbon as a main component. Needless to say, the features of the present invention can be achieved in both cases.
以上説明した如く、炭素を主成分とする皮膜を磁気ディ
スクの表面の全面もしくは一部分に設けることにより、
磁気ヘッドとの衝突磨耗に強い磁気ディスクを達成する
ことができる。As explained above, by providing a film mainly composed of carbon on the entire surface or a part of the surface of the magnetic disk,
A magnetic disk that is resistant to wear due to collision with a magnetic head can be achieved.
第1〜3図はこの発明の実施例を示す図で、それぞれa
は平面図、bはそのXX′断面図、第4図は炭素系皮膜
作製装置の一例を示す概略図である。
11,21・・・磁気ディスク、12,22・・・・・
・基板、13,23・・・・・・磁性膜、14,24・
・・・・・炭素系皮膜、31・・・・・・ニードルバル
プ、32・・・・・・送気管、33,35・・・・・・
炭素電極、34,36,40・・・・・・電極、37・
・・・・・イオン化室、38・・・・・・絞り、39・
・・・・・試料台、41……試料室、42,43・・・
・・・真空排気口、44・・・・・・コイル。
第1図第2図
第3図
第4図Figures 1 to 3 are diagrams showing embodiments of the present invention.
4 is a plan view, b is a cross-sectional view XX′ thereof, and FIG. 4 is a schematic diagram showing an example of a carbon-based film manufacturing apparatus. 11, 21...magnetic disk, 12, 22...
・Substrate, 13, 23...Magnetic film, 14, 24・
...Carbon-based film, 31...Needle valve, 32...Air pipe, 33,35...
Carbon electrode, 34, 36, 40... Electrode, 37.
...Ionization chamber, 38...Aperture, 39.
...Sample stand, 41...Sample chamber, 42,43...
...Vacuum exhaust port, 44...Coil. Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
素薄膜、グラフアイト状炭素薄膜とダイアモンド状炭素
薄膜とを交互に重ねた薄膜。 もしくは、グラフアイト状炭素とダイアモンド状炭素と
の混在する薄膜のいずれかより成る保護皮膜を設けたこ
とを特徴とする磁気デイスク。2 保護皮膜が磁性膜の
全面に設けられていることを特徴とする特許請求の範囲
第1項記載の磁気デイスク。 3 保護皮膜が磁性膜の表面の磁気デイスクとの衝突摩
擦の生じ易い領域のみに、もしくは他の領域より厚く設
けられていることを特徴とする特許請求の範囲第1項記
載の磁気デイスク。 4 保護皮膜が、磁気ヘツドとの摩擦の生じ易い領域で
かつ磁性膜の無い領域に設けられていることを特徴とす
る特許請求の範囲第1項記載の磁気デイスク。[Claims] 1. A thin film in which a graphite-like carbon thin film, a diamond-like carbon thin film, and a graphite-like carbon thin film and a diamond-like carbon thin film are alternately stacked on the surface. Alternatively, a magnetic disk characterized in that it is provided with a protective film made of either a thin film containing a mixture of graphite-like carbon and diamond-like carbon. 2. The magnetic disk according to claim 1, wherein a protective film is provided on the entire surface of the magnetic film. 3. The magnetic disk according to claim 1, wherein the protective film is provided only in areas of the surface of the magnetic film where collision friction with the magnetic disk is likely to occur, or is provided thicker than in other areas. 4. A magnetic disk according to claim 1, wherein the protective film is provided in an area where friction with the magnetic head is likely to occur and where there is no magnetic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52058140A JPS6023406B2 (en) | 1977-05-18 | 1977-05-18 | magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP52058140A JPS6023406B2 (en) | 1977-05-18 | 1977-05-18 | magnetic disk |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53143206A JPS53143206A (en) | 1978-12-13 |
| JPS6023406B2 true JPS6023406B2 (en) | 1985-06-07 |
Family
ID=13075674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52058140A Expired JPS6023406B2 (en) | 1977-05-18 | 1977-05-18 | magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6023406B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10633470B2 (en) | 2013-03-13 | 2020-04-28 | Ube Industries, Ltd. | Method of producing a conjugated diene polymer, a modified conjugated diene polymer, and a vinyl cis-polybutadiene composition |
| WO2020229155A1 (en) | 2019-05-14 | 2020-11-19 | Compagnie Generale Des Etablissements Michelin | Tyre having external sidewalls |
| WO2021005295A1 (en) | 2019-07-09 | 2021-01-14 | Compagnie Generale Des Etablissements Michelin | Rubber composition for a tyre tread |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3027162A1 (en) * | 1979-07-23 | 1981-02-19 | Datapoint Corp | STORAGE DISK WITH A THICK MAGNETIC ALLOY LAYER AND METHOD FOR THEIR PRODUCTION |
| FR2514743B1 (en) * | 1981-10-21 | 1986-05-09 | Rca Corp | CARBON-BASED AMORPHOUS FILM OF THE DIAMOND TYPE AND MANUFACTURING METHOD THEREOF |
| JPS59127232A (en) * | 1983-01-11 | 1984-07-23 | Seiko Epson Corp | Magnetic recording medium |
| JPS60155668A (en) * | 1984-01-26 | 1985-08-15 | Denki Kagaku Kogyo Kk | Formation of protective hydrocarbon film on surface of magnetic storage medium |
| JPH0612567B2 (en) * | 1984-10-22 | 1994-02-16 | 日本電気株式会社 | Hard magnetic disk and manufacturing method thereof |
| JPS61126627A (en) * | 1984-11-26 | 1986-06-14 | Hitachi Ltd | Magnetic recording medium |
| JP2892588B2 (en) * | 1984-11-26 | 1999-05-17 | 株式会社 日立製作所 | Manufacturing method of magnetic recording medium |
| JPH0628107B2 (en) * | 1985-02-19 | 1994-04-13 | シャープ株式会社 | Magnetic disk |
| JPS61210518A (en) * | 1985-03-13 | 1986-09-18 | Matsushita Electric Ind Co Ltd | Method for manufacturing magnetic recording media |
| JPH0622052B2 (en) * | 1985-03-26 | 1994-03-23 | ソニー株式会社 | Magnetic disk |
| JPH0711857B2 (en) * | 1986-04-18 | 1995-02-08 | 松下電器産業株式会社 | Magnetic recording medium |
| JPS6482321A (en) * | 1987-09-24 | 1989-03-28 | Hitachi Ltd | Magnetic recording medium |
| JPH03209608A (en) * | 1990-01-11 | 1991-09-12 | Matsushita Electric Ind Co Ltd | Magnetic head |
| JP2746073B2 (en) * | 1993-08-25 | 1998-04-28 | 日本電気株式会社 | Manufacturing method of magnetic memory |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2804401A (en) * | 1955-04-11 | 1957-08-27 | Bernard A Cousino | Magnetic sound tape |
| JPS4827706A (en) * | 1971-08-10 | 1973-04-12 | ||
| JPS5218001B2 (en) * | 1972-02-23 | 1977-05-19 | ||
| JPS5227522B2 (en) * | 1973-11-30 | 1977-07-21 | ||
| JPS5433521B2 (en) * | 1974-04-19 | 1979-10-22 | ||
| JPS5115967A (en) * | 1974-07-30 | 1976-02-07 | Sharp Kk | Denjishudanno seigyokairo |
| JPS5140902A (en) * | 1974-10-04 | 1976-04-06 | Fujitsu Ltd | JIKIKIROKUBAITAINOHOGOMAKU |
| JPS5179301A (en) * | 1974-12-30 | 1976-07-10 | Hitachi Ltd | JIKIKIROKUBAITAI |
| JPS51128686A (en) * | 1975-05-01 | 1976-11-09 | Orient Watch Co Ltd | Surface coating method with diamond-like carbon |
| SE406435B (en) * | 1977-06-30 | 1979-02-12 | Siporex Int Ab | DEVICE FOR CUTTING ELEMENTS OF A BODY OF HARDENED GAS CONCRETE AND FOR MOVING THE ELEMENT TO WORKSTATIONS FOR FURTHER TREATMENT |
-
1977
- 1977-05-18 JP JP52058140A patent/JPS6023406B2/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10633470B2 (en) | 2013-03-13 | 2020-04-28 | Ube Industries, Ltd. | Method of producing a conjugated diene polymer, a modified conjugated diene polymer, and a vinyl cis-polybutadiene composition |
| WO2020229155A1 (en) | 2019-05-14 | 2020-11-19 | Compagnie Generale Des Etablissements Michelin | Tyre having external sidewalls |
| WO2021005295A1 (en) | 2019-07-09 | 2021-01-14 | Compagnie Generale Des Etablissements Michelin | Rubber composition for a tyre tread |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53143206A (en) | 1978-12-13 |
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