JPH064247Y2 - 移動台の移動距離測定装置 - Google Patents
移動台の移動距離測定装置Info
- Publication number
- JPH064247Y2 JPH064247Y2 JP6106487U JP6106487U JPH064247Y2 JP H064247 Y2 JPH064247 Y2 JP H064247Y2 JP 6106487 U JP6106487 U JP 6106487U JP 6106487 U JP6106487 U JP 6106487U JP H064247 Y2 JPH064247 Y2 JP H064247Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- photoelectric converter
- light
- signals
- phase difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 22
- 230000003287 optical effect Effects 0.000 claims description 17
- 230000010287 polarization Effects 0.000 claims description 13
- 230000004907 flux Effects 0.000 claims description 8
- 230000001360 synchronised effect Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 7
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106487U JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106487U JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63167207U JPS63167207U (th) | 1988-10-31 |
| JPH064247Y2 true JPH064247Y2 (ja) | 1994-02-02 |
Family
ID=30894056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6106487U Expired - Lifetime JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064247Y2 (th) |
-
1987
- 1987-04-22 JP JP6106487U patent/JPH064247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63167207U (th) | 1988-10-31 |
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