JPS63167207U - - Google Patents
Info
- Publication number
- JPS63167207U JPS63167207U JP6106487U JP6106487U JPS63167207U JP S63167207 U JPS63167207 U JP S63167207U JP 6106487 U JP6106487 U JP 6106487U JP 6106487 U JP6106487 U JP 6106487U JP S63167207 U JPS63167207 U JP S63167207U
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric converter
- light beam
- signal
- phase difference
- synchronous detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 10
- 230000001360 synchronised effect Effects 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000009977 dual effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106487U JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6106487U JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63167207U true JPS63167207U (th) | 1988-10-31 |
| JPH064247Y2 JPH064247Y2 (ja) | 1994-02-02 |
Family
ID=30894056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6106487U Expired - Lifetime JPH064247Y2 (ja) | 1987-04-22 | 1987-04-22 | 移動台の移動距離測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH064247Y2 (th) |
-
1987
- 1987-04-22 JP JP6106487U patent/JPH064247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH064247Y2 (ja) | 1994-02-02 |
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