JPH07129911A - Magnetic head and manufacturing method thereof - Google Patents

Magnetic head and manufacturing method thereof

Info

Publication number
JPH07129911A
JPH07129911A JP5272769A JP27276993A JPH07129911A JP H07129911 A JPH07129911 A JP H07129911A JP 5272769 A JP5272769 A JP 5272769A JP 27276993 A JP27276993 A JP 27276993A JP H07129911 A JPH07129911 A JP H07129911A
Authority
JP
Japan
Prior art keywords
film
magnetic
insulating film
magnetic head
winding groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5272769A
Other languages
Japanese (ja)
Inventor
Yasuhiro Nakaya
安広 仲谷
Shunsaku Muraoka
俊作 村岡
Akinaga Natsui
昭長 夏井
Hiroshi Yoda
広 養田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5272769A priority Critical patent/JPH07129911A/en
Publication of JPH07129911A publication Critical patent/JPH07129911A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】 【目的】 主磁路が軟磁性合金薄膜と絶縁膜を積層し非
磁性基板で挟み込んだ構造の磁気ヘッドにおいて、巻線
溝部に溶融するガラスが狭ギャップヘッドでは良好な状
態が得られず、また、巻線溝部に形成したCr膜とチッ
プ側面において渦電流損失が生じ高周波特性が劣化する
ので、この問題を解決する磁気ヘッドおよびその製造方
法を実現する。 【構成】 主磁路が軟磁性合金薄膜1と絶縁膜2で構成
され、非磁性基板3で挟み込んだ構造の磁気ヘッドの巻
線溝部4に絶縁膜5(例えばSiO2膜)を成膜し、その上
にギャップ材6を成膜しガラス7を溶融し接合した磁気
ヘッド。または、軟磁性合金薄膜と絶縁膜を積層し、非
磁性基板で挟み込んだ構造の磁気ヘッドにおいて、巻線
溝部に絶縁膜とCr膜を成膜した上にガラスを配し、ギ
ャップ材を成膜し接合された磁気ヘッド。
(57) [Abstract] [Purpose] In a magnetic head having a structure in which the main magnetic path is formed by laminating a soft magnetic alloy thin film and an insulating film and sandwiching them with a non-magnetic substrate, the glass melted in the winding groove is in a good state in a narrow gap head. In addition, since the eddy current loss occurs in the Cr film formed in the winding groove portion and the side surface of the chip and the high frequency characteristics are deteriorated, a magnetic head and a method for manufacturing the same can be realized. [Structure] An insulating film 5 (for example, a SiO 2 film) is formed in a winding groove portion 4 of a magnetic head whose main magnetic path is composed of a soft magnetic alloy thin film 1 and an insulating film 2 and which is sandwiched between nonmagnetic substrates 3. , A magnetic head in which the gap material 6 is deposited and the glass 7 is melted and joined. Alternatively, in a magnetic head having a structure in which a soft magnetic alloy thin film and an insulating film are laminated and sandwiched between non-magnetic substrates, glass is placed on the insulating film and the Cr film formed in the winding groove portion, and a gap material is formed. Bonded magnetic head.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、VTR(video tape re
corder ),DAT(dynamic addresstranslation)等に使
用する磁気ヘッドおよびその製造方法に関するものであ
る。
The present invention relates to a VTR (video tape re
The present invention relates to a magnetic head used for corder), DAT (dynamic address translation), etc., and a manufacturing method thereof.

【0002】[0002]

【従来の技術】近年、磁気記録技術の動向はビデオヘッ
ド等の高周波領域での特性が要求されるに従い、サブミ
クロンの記録波長に十分対応できる磁気ヘッドおよび記
録媒体が要望されている。このような現状の中で磁気ヘ
ッドは、保磁力(Hc)の高い記録媒体(例えば、メタル,
Ba−Feテ−プ)に十分な書き込みを行うため、フェラ
イト等の非金属磁性材料と比べ、より飽和磁束密度(B
s)の高い軟磁性合金薄膜で(例えば、センダスト,非晶
質材料)主磁路を構成した積層型の磁気ヘッドの開発が
行われ、一部は実用化されS−VHS,業務用D−VT
R用などに搭載されている。
2. Description of the Related Art In recent years, with the trend of magnetic recording technology demanding characteristics in a high frequency region of a video head or the like, there is a demand for a magnetic head and a recording medium which can sufficiently cope with a recording wavelength of submicron. Under such circumstances, a magnetic head is a recording medium with a high coercive force (Hc) (for example, metal,
In order to perform sufficient writing in the Ba-Fe tape), the saturation magnetic flux density (B
A magnetic head of a laminated type having a main magnetic path formed of a soft magnetic alloy thin film having a high s) (for example, sendust, an amorphous material) has been developed, and some have been put into practical use for S-VHS, commercial D- VT
It is installed for R and so on.

【0003】以下、図面を参照しながら従来の磁気ヘッ
ドについて説明する。図6は積層型磁気ヘッドを示す図
であり、軟磁性合金薄膜30と絶縁膜31が積層され非磁性
基板32で挟み込んだ構造であり、一対で磁気ヘッドとな
るコア半体の少なくとも一方に巻線溝33が形成され、ギ
ャップ面は鏡面に研磨された後、ギャップ材34を介して
接合され、ガラス35で接合強度を高めた構造である。ま
た、製造方法は、図7に示すように、軟磁性合金薄膜36
と絶縁膜37が積層され、両側面を非磁性基板38で挟み込
んだコア半体に少なくとも一方に巻線溝39を形成し、ギ
ャップ面を鏡面に研磨した後、ギャップ材40を介して突
き合わせ接合し、同時にガラス41を巻線溝部で溶融す
る。
A conventional magnetic head will be described below with reference to the drawings. FIG. 6 is a view showing a laminated magnetic head, which has a structure in which a soft magnetic alloy thin film 30 and an insulating film 31 are laminated and sandwiched by a non-magnetic substrate 32, and a pair is wound around at least one of the core halves to be the magnetic head. A line groove 33 is formed, the gap surface is mirror-polished, and then bonded through a gap material 34, and the glass 35 has a structure in which the bonding strength is increased. Further, the manufacturing method is as shown in FIG.
And the insulating film 37 are laminated, and a winding groove 39 is formed on at least one of the core halves with both sides sandwiched by the non-magnetic substrate 38, the gap surface is mirror-polished, and then butt-joined via the gap material 40. At the same time, the glass 41 is melted in the winding groove.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、上記の
従来の構成,製造方法では、ギャップ長が狭い積層型の
磁気ヘッドでは(業務用D−VTRでは0.2μm)、ガラス
溶融面がセラミックと金属膜で構成されているため、巻
線溝で溶融するガラスの溶融の仕方にムラが生じ、ヘッ
ドチップにしたとき、ガラスがなく強度不足のものや、
ダンゴ状になって巻線のスペ−スが確保できないなどの
課題があった。本発明は上記の従来の問題点を解決する
もので、信頼性の高い磁気ヘッドおよびその製造方法を
提供することを目的とするものである。
However, in the above-described conventional structure and manufacturing method, in the laminated magnetic head having a narrow gap length (0.2 μm in the D-VTR for professional use), the glass melting surface has the ceramic and the metal film. Since it is composed of, there is unevenness in the melting method of the glass that melts in the winding groove, and when it is used as a head chip, there is no glass and the strength is insufficient,
There was a problem that the space of the winding could not be secured due to the dango shape. The present invention solves the above-mentioned conventional problems, and an object of the present invention is to provide a highly reliable magnetic head and a manufacturing method thereof.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するため
に、本発明の磁気ヘッドは、ギャップ形成時にガラスモ
−ルドするときは、巻線溝部に下地の軟磁性合金薄膜の
影響がガラスの濡れに影響が出ない程度絶縁膜を形成す
る。また、ギャップ接合前にガラスをモ−ルドする方法
として、巻線溝部に絶縁膜とCr膜を成膜してガラスを
溶融させ、後で巻線スペ−スを研削などで除去して確保
し、ギャップ材を介して接合を行うものである。
In order to achieve the above object, in the magnetic head of the present invention, when the glass mold is formed at the time of forming the gap, the influence of the soft magnetic alloy thin film of the underlying layer on the winding groove portion causes the wetting of the glass. An insulating film is formed to the extent that it does not affect As a method of molding the glass before the gap bonding, an insulating film and a Cr film are formed in the winding groove portion to melt the glass, and the winding space is later removed by grinding or the like to secure the glass. The bonding is performed through the gap material.

【0006】[0006]

【作用】この構成,製造方法によって、ガラスが下地の
影響を受けずに溶融させることができ、また、ギャップ
形成前にガラスをモ−ルドするものは、巻線溝部に絶縁
膜とCr膜とを成膜することによって、双方ともガラス
の濡れ性が良くなり、巻線溝に良好な状態でモ−ルドで
きるようになるため、接着強度に優れ、また、コアの側
面の積層膜が短絡しないので、渦電流による損失が生じ
ることもなく、高周波特性に優れた磁気ヘッドが得られ
る。
With this structure and manufacturing method, the glass can be melted without being affected by the underlying layer, and the glass is molded before forming the gap, in which the insulating film and the Cr film are formed in the winding groove. By forming a film on both sides, the wettability of the glass is improved, and it becomes possible to mold the winding groove in a good state, so that the adhesive strength is excellent and the laminated film on the side surface of the core does not short-circuit. Therefore, a magnetic head having excellent high frequency characteristics can be obtained without causing a loss due to an eddy current.

【0007】[0007]

【実施例】以下、本発明の第1の実施例の磁気ヘッドに
ついて図1を参照しながら説明する。図1において、軟
磁性合金薄膜1と絶縁膜2が積層され非磁性基板3で挟
み込んだ構造の一対のコア半体の少なくとも一方に、巻
線溝4を形成した溝部に絶縁膜5を成膜しギャップ材6
を介して突き合わせガラス7を溶融し接合したものであ
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A magnetic head according to a first embodiment of the present invention will be described below with reference to FIG. In FIG. 1, an insulating film 5 is formed in a groove portion where a winding groove 4 is formed in at least one of a pair of core halves having a structure in which a soft magnetic alloy thin film 1 and an insulating film 2 are laminated and sandwiched by a non-magnetic substrate 3. Gap material 6
The butt glass 7 is melted and joined via the.

【0008】次に、本発明の第2の実施例について図2
を参照しながら説明する。図2(a)は軟磁性合金薄膜8
と絶縁膜9が積層され、非磁性基板10で挟み込んだコア
半体に巻線溝11を形成した後、絶縁膜(SiO2など)12を
成膜したものである。また、図2(b)はギャップ突き合
わせ面を鏡面に研磨した後ギャップ材13を成膜したコア
半体である。さらに、図2(c)は一対のコア半体のギャ
ップ面を突き合わせ、ガラス14を溶融し接合したコアブ
ロックである。
Next, a second embodiment of the present invention will be described with reference to FIG.
Will be described with reference to. Figure 2 (a) shows the soft magnetic alloy thin film 8
The insulating film 9 and the insulating film 9 are laminated, the winding groove 11 is formed in the core half sandwiched by the non-magnetic substrate 10, and then the insulating film (SiO 2 or the like) 12 is formed. Further, FIG. 2B shows a core half body in which the gap member 13 is formed after the gap abutting surface is mirror-polished. Further, FIG. 2 (c) shows a core block in which the gap surfaces of a pair of core halves are butted and the glass 14 is melted and joined.

【0009】次に、本発明の第3の実施例の磁気ヘッド
について図3を参照しながら説明する。図3において、
軟磁性合金薄膜15と絶縁膜16が積層され、非磁性基板17
で挟み込んだ構造の一対のコア半体の少なくとも一方
に、巻線溝18を形成した溝部に絶縁膜19とCr膜20を成
膜し、溝部にガラス21を配し、ギャップ材22を介して接
合したものである。
Next, a magnetic head according to a third embodiment of the present invention will be described with reference to FIG. In FIG.
The soft magnetic alloy thin film 15 and the insulating film 16 are laminated to form a non-magnetic substrate 17
The insulating film 19 and the Cr film 20 are formed in the groove portion where the winding groove 18 is formed on at least one of the pair of core halves having the structure sandwiched by It is joined.

【0010】次に、本発明の第4の実施例について図4
を参照しながら説明する。図4(a)は第2の実施例と同
様の構成のコア半体の巻線溝23を含むギャップ面に絶縁
膜(SiO2など)24とCr膜25を成膜した後、ガラス26を
溶融したものである。また、図4(b)はギャップ面を研
磨し巻線スペ−ス27を研削加工などにより確保したもの
である。また、図4(c)はギャップ材28を成膜したコア
半体である。さらに、図4(d)はギャップ面を突き合わ
せ、ガラス29を溶融させギャップ接合したコアブロック
である。
Next, a fourth embodiment of the present invention will be described with reference to FIG.
Will be described with reference to. In FIG. 4A, an insulating film (such as SiO 2 ) 24 and a Cr film 25 are formed on a gap surface including a winding groove 23 of a core half having the same structure as that of the second embodiment, and then a glass 26 is formed. It is melted. Further, FIG. 4 (b) shows a case where the gap surface is polished and the winding space 27 is secured by grinding or the like. Further, FIG. 4C is a core half body in which the gap material 28 is formed. Further, FIG. 4D shows a core block in which the gap surfaces are butted, the glass 29 is melted, and the gap is joined.

【0011】図5は上記の発明の磁気特性に関する効果
を示す一例であり、ヘッドの透磁率が従来例では1MHz
付近で急激に低下しているが、本発明のものは、高周波
領域まで高い値を示している。また、ヘッド出力では30
MHzで2〜3dBの差があった。
FIG. 5 is an example showing the effect relating to the magnetic characteristics of the above-mentioned invention. The magnetic permeability of the head is 1 MHz in the conventional example.
Although it sharply decreases in the vicinity, the present invention shows a high value up to a high frequency region. Also, the head output is 30
There was a 2-3 dB difference in MHz.

【0012】[0012]

【発明の効果】以上のように本発明は、ギャップ形成時
にガラスをモ−ルドするときは、巻線溝部に下地の軟磁
性合金薄膜の影響がガラスの濡れに影響が出ない程度に
絶縁膜を形成し、また、ギャップ接合前にガラスをモ−
ルドするものは、巻線溝部に絶縁膜とCr膜を成膜した
後に溶融させることによって、双方ともガラスの濡れ性
が良くなり、巻線溝に良好な状態でモ−ルドできるよう
になるため接着強度に優れ、しかも積層膜の短絡がない
ので渦電流による損失が生じることもなく、高周波特性
に優れた磁気ヘッドが得られるという効果を有する。
As described above, according to the present invention, when the glass is molded at the time of forming the gap, the insulating film is formed in the winding groove portion to the extent that the effect of the soft magnetic alloy thin film as the base does not affect the wetting of the glass. Glass and mold the glass before gap bonding.
As for the material to be welded, since the insulating film and the Cr film are formed in the winding groove portion and then melted, both the wettability of the glass is improved, and the winding groove can be molded in a good state. Since the adhesive strength is excellent and the laminated films are not short-circuited, loss due to eddy current does not occur, and a magnetic head excellent in high frequency characteristics can be obtained.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の第1の実施例におけるヘッドコアの外
観図である。
FIG. 1 is an external view of a head core according to a first embodiment of the present invention.

【図2】本発明の第2の実施例における下地膜成膜後,
ギャップ膜成膜時およびギャップ接合時のヘッドコア等
の外観図である。
FIG. 2 is a diagram showing a second embodiment of the present invention after forming a base film,
It is an external view of a head core and the like at the time of forming a gap film and at the time of gap bonding.

【図3】本発明の第3の実施例におけるヘッドコアの外
観図である。
FIG. 3 is an external view of a head core according to a third embodiment of the present invention.

【図4】本発明の第4の実施例におけるガラスのモ−ル
ド後,巻線スペ−スを加工した後,ギャップ膜成膜時の
ヘッドコアおよびギャップ接合時のヘッドコア等の外観
図である。
FIG. 4 is an external view of a head core at the time of forming a gap film, a head core at the time of gap bonding after processing a winding space after molding a glass in a fourth embodiment of the present invention.

【図5】本発明の磁気特性に関する効果を示す図であ
る。
FIG. 5 is a diagram showing an effect relating to magnetic characteristics of the present invention.

【図6】従来の磁気ヘッドの外観形状図である。FIG. 6 is an external view of a conventional magnetic head.

【図7】従来の磁気ヘッドのギャップ膜成膜時およびギ
ャップ形成前の外観図である。
FIG. 7 is an external view of a conventional magnetic head during formation of a gap film and before formation of a gap.

【符号の説明】[Explanation of symbols]

1,8,15,30,36…軟磁性合金薄膜、 2,5,9,
12,16,19,24,31,37…絶縁膜、 3,10,17,32,
38…非磁性基板、 4、11、18、23、33、39…巻線溝、
6,13,22,28,34,40…ギャップ材、 7,14,2
1,26,29,35,41…ガラス、 20,25…Cr膜。
1, 8, 15, 30, 36 ... Soft magnetic alloy thin film, 2, 5, 9,
12, 16, 19, 24, 31, 37 ... Insulating film, 3, 10, 17, 32,
38 ... Non-magnetic substrate, 4, 11, 18, 23, 33, 39 ... Winding groove,
6,13,22,28,34,40 ... Gap material, 7,14,2
1, 26, 29, 35, 41 ... Glass, 20, 25 ... Cr film.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 養田 広 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Yoda 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 主磁路が軟磁性合金薄膜と絶縁膜で構成
され、両側面を非磁性基板で挟み込んだ構造の積層型磁
気ヘッドにおいて、少なくとも一方に形成した巻線溝部
に絶縁膜を成膜し、ギャップ材を介して突き合わせ接合
された構造を備えたことを特徴とする磁気ヘッド。
1. In a laminated magnetic head having a structure in which a main magnetic path is composed of a soft magnetic alloy thin film and an insulating film, and both side surfaces are sandwiched by non-magnetic substrates, an insulating film is formed on at least one winding groove portion. A magnetic head having a structure in which a film is formed and is butt-joined via a gap material.
【請求項2】 主磁路が軟磁性合金薄膜と絶縁膜で構成
され、両側面を非磁性基板で挟み込んだ構造の積層型磁
気ヘッドにおいて、少なくとも一方に形成した巻線溝部
に絶縁膜を成膜する工程と、ギャップ面を研磨し鏡面に
加工する工程と、ギャップ材を介して突き合わせ接合す
る工程とを有することを特徴とする磁気ヘッドの製造方
法。
2. In a laminated magnetic head having a structure in which a main magnetic path is composed of a soft magnetic alloy thin film and an insulating film, and both side surfaces are sandwiched by non-magnetic substrates, an insulating film is formed on at least one winding groove portion. A method of manufacturing a magnetic head comprising: a film forming step, a step of polishing a gap surface to form a mirror surface, and a step of butt-joining via a gap material.
【請求項3】 主磁路が軟磁性合金薄膜と絶縁膜で構成
され、両側面を非磁性基板で挟み込んだ構造の積層型磁
気ヘッドにおいて、少なくとも一方に形成した巻線溝部
に絶縁膜とCr膜を成膜した上にガラスを配し、ギャッ
プ材を介して突き合わされ接合された構造を備えたこと
を特徴とする磁気ヘッド。
3. A laminated magnetic head having a structure in which a main magnetic path is composed of a soft magnetic alloy thin film and an insulating film, and both side surfaces are sandwiched by non-magnetic substrates, and an insulating film and a Cr film are formed in at least one winding groove portion. A magnetic head having a structure in which glass is formed on a film, and the films are abutted and bonded together via a gap material.
【請求項4】 主磁路が軟磁性合金薄膜と絶縁膜で構成
され、両側面を非磁性基板で挟み込んだ構造の積層型磁
気ヘッドにおいて、少なくとも一方に形成した巻線溝部
に絶縁膜とCr膜を成膜する工程と、巻線溝部にガラス
をモ−ルドする工程と、巻線スペ−スを研削などで確保
する工程と、ギャップ面を研磨し鏡面に加工する工程
と、ギャップ材を介して突き合わせ接合する工程とを有
することを特徴とする磁気ヘッドの製造方法。
4. A laminated magnetic head having a structure in which a main magnetic path is composed of a soft magnetic alloy thin film and an insulating film, and both sides of which are sandwiched by non-magnetic substrates, and an insulating film and a Cr film are provided in at least one winding groove portion. The process of forming a film, the process of molding glass in the winding groove, the process of securing the winding space by grinding, the process of polishing the gap surface to a mirror surface, and the gap material. And a step of butt-joining via a magnetic head.
JP5272769A 1993-10-29 1993-10-29 Magnetic head and manufacturing method thereof Pending JPH07129911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5272769A JPH07129911A (en) 1993-10-29 1993-10-29 Magnetic head and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5272769A JPH07129911A (en) 1993-10-29 1993-10-29 Magnetic head and manufacturing method thereof

Publications (1)

Publication Number Publication Date
JPH07129911A true JPH07129911A (en) 1995-05-19

Family

ID=17518489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5272769A Pending JPH07129911A (en) 1993-10-29 1993-10-29 Magnetic head and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JPH07129911A (en)

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