JPH0719141Y2 - バレル型気相成長装置のサセプタ連結装置 - Google Patents

バレル型気相成長装置のサセプタ連結装置

Info

Publication number
JPH0719141Y2
JPH0719141Y2 JP15689885U JP15689885U JPH0719141Y2 JP H0719141 Y2 JPH0719141 Y2 JP H0719141Y2 JP 15689885 U JP15689885 U JP 15689885U JP 15689885 U JP15689885 U JP 15689885U JP H0719141 Y2 JPH0719141 Y2 JP H0719141Y2
Authority
JP
Japan
Prior art keywords
hanger
connecting pin
susceptor
vapor phase
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15689885U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265830U (mo
Inventor
功 関谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP15689885U priority Critical patent/JPH0719141Y2/ja
Publication of JPS6265830U publication Critical patent/JPS6265830U/ja
Application granted granted Critical
Publication of JPH0719141Y2 publication Critical patent/JPH0719141Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP15689885U 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置 Expired - Lifetime JPH0719141Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15689885U JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15689885U JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Publications (2)

Publication Number Publication Date
JPS6265830U JPS6265830U (mo) 1987-04-23
JPH0719141Y2 true JPH0719141Y2 (ja) 1995-05-01

Family

ID=31078945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15689885U Expired - Lifetime JPH0719141Y2 (ja) 1985-10-14 1985-10-14 バレル型気相成長装置のサセプタ連結装置

Country Status (1)

Country Link
JP (1) JPH0719141Y2 (mo)

Also Published As

Publication number Publication date
JPS6265830U (mo) 1987-04-23

Similar Documents

Publication Publication Date Title
KR0132665B1 (ko) 공작물용 캐리어 및 진공처리실
JP2005150725A (ja) サセプタ駆動及びウエハ変位機構
WO2001084622A1 (en) Wafer supporting device of semiconductor manufacturing device
JPH0719141Y2 (ja) バレル型気相成長装置のサセプタ連結装置
WO2022108746A1 (en) Apparatus for rotating substrates
CN110875167B (zh) 冷却腔室及半导体加工设备
JP2597671Y2 (ja) ターボ分子ポンプ
JPH05275355A (ja) 気相成長装置
JPH0529230A (ja) 気相成長装置
JPH0184428U (mo)
JPH04371577A (ja) マグネトロン型スパッタリング装置
JPH0732956Y2 (ja) タ−ボ分子ポンプ
JP2549819Y2 (ja) ポンプ
JPH07169696A (ja) 化学気相成長方法及びその装置
JPH0752419Y2 (ja) 動圧軸受構造
JPH01165622U (mo)
JP3181518B2 (ja) 遠心鋳造機の型支持構造
JPH03236460A (ja) 直打式バルブリフタの溶射処理方法及びその装置
JP3141837B2 (ja) 回転式乾燥装置及び回転式乾燥方法
JPH0557840U (ja) Ｃｖｄ装置のウェーハ置台
JPS6439634U (mo)
JPS61198644A (ja) ウエハの移し替え方法
JPH02115556A (ja) セラミックス鋳ぐるみピストン
CN119812047A (zh) 一种晶圆异丙醇雾化干燥设备
JPS607191B2 (ja) リング状ワ−クの乾燥装置