JPH0748669Y2 - 分子線セル - Google Patents
分子線セルInfo
- Publication number
- JPH0748669Y2 JPH0748669Y2 JP1989100220U JP10022089U JPH0748669Y2 JP H0748669 Y2 JPH0748669 Y2 JP H0748669Y2 JP 1989100220 U JP1989100220 U JP 1989100220U JP 10022089 U JP10022089 U JP 10022089U JP H0748669 Y2 JPH0748669 Y2 JP H0748669Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- crucible
- molecular beam
- graphite layer
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989100220U JPH0748669Y2 (ja) | 1989-08-28 | 1989-08-28 | 分子線セル |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989100220U JPH0748669Y2 (ja) | 1989-08-28 | 1989-08-28 | 分子線セル |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0338367U JPH0338367U (ko) | 1991-04-12 |
| JPH0748669Y2 true JPH0748669Y2 (ja) | 1995-11-08 |
Family
ID=31649239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989100220U Expired - Fee Related JPH0748669Y2 (ja) | 1989-08-28 | 1989-08-28 | 分子線セル |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0748669Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100959733B1 (ko) * | 2003-04-16 | 2010-05-25 | 독키 가부시키가이샤 | 증착장치에 있어서의 증발원 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60200895A (ja) * | 1984-03-23 | 1985-10-11 | Agency Of Ind Science & Technol | 分子線結晶成長装置の噴出セル構造 |
| JPS62244122A (ja) * | 1986-04-17 | 1987-10-24 | Mitsubishi Electric Corp | 化合物半導体薄膜の製造装置 |
-
1989
- 1989-08-28 JP JP1989100220U patent/JPH0748669Y2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100959733B1 (ko) * | 2003-04-16 | 2010-05-25 | 독키 가부시키가이샤 | 증착장치에 있어서의 증발원 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0338367U (ko) | 1991-04-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |