JPH09318314A - Optical displacement-measuring apparatus - Google Patents
Optical displacement-measuring apparatusInfo
- Publication number
- JPH09318314A JPH09318314A JP13307296A JP13307296A JPH09318314A JP H09318314 A JPH09318314 A JP H09318314A JP 13307296 A JP13307296 A JP 13307296A JP 13307296 A JP13307296 A JP 13307296A JP H09318314 A JPH09318314 A JP H09318314A
- Authority
- JP
- Japan
- Prior art keywords
- optical
- support member
- light receiving
- detection sensor
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 102
- 238000001514 detection method Methods 0.000 claims abstract description 33
- 230000000694 effects Effects 0.000 claims abstract description 12
- 239000002184 metal Substances 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000010079 rubber tapping Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- ZCDOYSPFYFSLEW-UHFFFAOYSA-N chromate(2-) Chemical compound [O-][Cr]([O-])(=O)=O ZCDOYSPFYFSLEW-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、三角測距法によっ
て測定物体までの距離や変位を測定するための光学式変
位測定装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical displacement measuring device for measuring a distance and displacement to a measuring object by a triangulation method.
【０００２】[0002]
【従来の技術】従来から図５に示すような光学式変位測
定装置が知られている。図５に示す光学式変位測定装置
は、レーザダイオードなどの発光源１、光を測定物体に
投光する投光レンズ６などを持つ投光光学系、測定物体
からの反射、散乱光を受光する受光レンズ１１を備えた
受光光学系、受光光学系の結像面に配置されて受光スポ
ットの位置によって電流出力が変化するようになったＰ
ＳＤのような位置検出センサ３で構成してある。2. Description of the Related Art Conventionally, an optical displacement measuring device as shown in FIG. 5 has been known. The optical displacement measuring device shown in FIG. 5 receives a light emitting source 1 such as a laser diode, a light projecting optical system having a light projecting lens 6 for projecting light to a measurement object, and reflection and scattered light from the measurement object. A light receiving optical system provided with a light receiving lens 11 is arranged on the image forming plane of the light receiving optical system, and the current output changes depending on the position of the light receiving spot.
It is composed of a position detection sensor 3 such as SD.
【０００３】ここで、レーザダイオードなどの投光源１
から射出された光（投光ビーム）は投光レンズ６を介し
て測定物体に照射される。測定物体からの反射光は受光
レンズ１１を介して受光素子である位置検出センサ３
（ＰＳＤ）に受光される。測定物体の位置が変化する
と、ＰＳＤに形成される光スポットの位置が変化し、Ｐ
ＳＤはその受光位置に応じて両端の電流が変化するの
で、この両端の電流の出力をＩ／Ｖ変換器にそれぞれ入
力し、電流電圧変換、適当な増幅を行ったのち、検波回
路にてそれぞれの同期検波を行って信号成分のみを検出
し、平滑化のために積分回路にて積分された後、その出
力を演算部で処理して測距情報を得るようになってい
る。Here, a light source 1 such as a laser diode is used.
The light (projection beam) emitted from is emitted to the measurement object via the projection lens 6. The reflected light from the measurement object passes through the light receiving lens 11 and is a position detecting sensor 3 which is a light receiving element.
The light is received by (PSD). When the position of the measuring object changes, the position of the light spot formed on the PSD changes, and P
Since the current at both ends of the SD changes depending on the light receiving position, the output of the current at both ends is input to the I / V converters, respectively, subjected to current-voltage conversion and appropriate amplification, and then detected by the detection circuit. The synchronous detection is performed to detect only the signal component, the signal is integrated by an integrating circuit for smoothing, and the output is processed by an arithmetic unit to obtain distance measurement information.
【０００４】上記のような従来の変位測定装置におい
て、位置検出センサ３であるＰＳＤを固定するに当たっ
ては、回路基板５１′にＰＳＤを半田付けし、それを受
光光学系の光学筒１１にねじ６１により固定していた。
また、ＰＳＤは微弱な信号を扱いノイズが侵入しやすい
ものであり、このため、従来にあっては、ノイズの侵入
を防ぐため、フレキシブルな材料で形成されたシールド
板６０をＰＳＤの回りに取付けていた。In fixing the PSD which is the position detecting sensor 3 in the conventional displacement measuring device as described above, the PSD is soldered to the circuit board 51 'and the screw 61 is attached to the optical tube 11 of the light receiving optical system. Was fixed by.
In addition, PSD handles weak signals and is susceptible to noise intrusion. Therefore, in the past, in order to prevent the intrusion of noise, a shield plate 60 formed of a flexible material is attached around the PSD. Was there.
【０００５】[0005]
【発明が解決しようとする課題】ところが、ＰＳＤはそ
の受光位置に応じて変化する電流を出力するが、取付け
誤差を調整するため、ＰＳＤは受光スポットの移動方向
に平行に移動させて位置調整をする必要があるが、従来
例にあっては、位置調整がしにくいという問題があっ
た。However, although the PSD outputs a current that changes according to its light receiving position, the PSD is moved in parallel with the moving direction of the light receiving spot in order to adjust the mounting error. However, the conventional example has a problem that it is difficult to adjust the position.
【０００６】また、ＰＳＤからの電流出力は非常に微弱
で、ノイズ侵入防止のために、ＰＳＤの回りにフレキシ
ブルな材料で形成されたシールド板６０を取付ける必要
があるが、部品点数が増え、コストが高くなり、また、
構造が複雑になって製作しにくいという問題がある。ま
た、シールド板６０を用いる場合に、グランドに落とす
手段としては、シールド板６０に半田付けされたリード
線を回路基板のグランドに半田するか、ケースや光学筒
９にねじを切って、リード線をねじにより固定する方法
が取られているが、部品点数が増え、コストが高くな
り、また、構造が複雑になるという問題がある。Further, the current output from the PSD is very weak, and it is necessary to mount a shield plate 60 formed of a flexible material around the PSD to prevent noise intrusion, but the number of parts is increased and the cost is increased. Becomes higher,
There is a problem that the structure becomes complicated and it is difficult to manufacture. Further, when the shield plate 60 is used, as a means for dropping it to the ground, the lead wire soldered to the shield plate 60 is soldered to the ground of the circuit board, or the case or the optical tube 9 is screwed to obtain the lead wire. However, there are problems that the number of parts increases, the cost increases, and the structure becomes complicated.
【０００７】更に、ケースや光学筒９にグランドを落と
す場合、ねじを切ってから時間が経過していると、酸化
や腐食により金属表面に被膜ができ、ねじで固定しても
導通がとれないことがある。本発明は、上記の従来例の
問題点に鑑みて発明したものであって、簡単な構成で位
置検出センサの調整ができ且つ簡単な構成でシールド効
果を持たせることができる光学式変位測定装置を提供す
ることを課題とするものである。Further, when the ground is dropped on the case or the optical barrel 9, if a time has elapsed after the screw is cut, a film is formed on the metal surface due to oxidation or corrosion, and even if it is fixed with the screw, conduction cannot be obtained. Sometimes. The present invention has been made in view of the above-mentioned problems of the conventional example, and is an optical displacement measuring device capable of adjusting a position detection sensor with a simple structure and having a shield effect with a simple structure. The challenge is to provide.
【０００８】[0008]
【課題を解決するための手段】上記課題を解決するた
め、本発明の光学式変位測定装置は、光ビームを発生す
る投光源１と、光ビームを測定物体２に照射する投光光
学系と、光ビームの測定物体２での反射光を集光する受
光光学系と、受光光学系の結像面に配置されて受光スポ
ットの位置を検出する位置検出センサ３と、受光光学系
を組み込む光学筒９に位置検出センサ３を取付ける支持
部材７とを備えた三角測距原理による光学式変位測定装
置において、支持部材７を中央縦片１３の両端部から支
持横片１４を連出した略コ字状に形成し、支持横片１４
に長孔１６を設け、光学筒９の外面部に突設した突起３
１に支持横片１４に設けた長孔１６を長孔１６の長手方
向に移動自在に嵌め込んで支持部材７を光学筒９に取付
けると共に中央縦片１３に設けた板ばね１５により位置
検出センサ３を光学筒９の端部に押し付け、支持部材７
を長孔１６の長手方向に沿って移動することで受光スポ
ットの移動方向に位置検出センサ３を移動自在として成
ることを特徴とするものである。このような構成とする
ことで、支持部材７を長孔１６に沿って移動すること
で、簡単に支持部材７により光学筒９の端部に押し当て
ている位置検出センサ３を受光スポットの移動方向に移
動させることができることになる。In order to solve the above problems, an optical displacement measuring device of the present invention comprises a light source 1 for generating a light beam, and a light projecting optical system for irradiating a light beam on a measuring object 2. , A light receiving optical system that collects the reflected light of the light beam on the measurement object 2, a position detection sensor 3 that is arranged on the image plane of the light receiving optical system and detects the position of the light receiving spot, and an optical system that incorporates the light receiving optical system. In an optical displacement measuring device based on the principle of triangulation, which includes a support member 7 for mounting the position detection sensor 3 in a cylinder 9, the support member 7 is a substantially vertical member in which a support horizontal piece 14 is extended from both ends of a central vertical piece 13. Support lateral piece 14 formed in a letter shape
The projection 3 provided with the long hole 16 in the outer surface of the optical tube 9
1, the long hole 16 provided in the support horizontal piece 14 is movably fitted in the longitudinal direction of the long hole 16 to attach the support member 7 to the optical tube 9, and the position detection sensor is provided by the leaf spring 15 provided in the central vertical piece 13. 3 is pressed against the end of the optical tube 9, and the support member 7
Is moved along the longitudinal direction of the long hole 16 so that the position detection sensor 3 can move in the moving direction of the light receiving spot. With such a configuration, by moving the support member 7 along the elongated hole 16, the position detection sensor 3 that is simply pressed against the end of the optical tube 9 by the support member 7 moves the light receiving spot. It will be possible to move in the direction.
【０００９】また、位置検出センサ３が受光スポットの
位置によって電流出力が変化するものであることも好ま
しい。このような構成とすることで、簡単な構成で位置
検出センサ３を構成することができることになる。ま
た、支持部材７を金属製として位置検出センサ３に対し
て電気的シールド効果を持たせることも好ましい。この
ような構成とすることで、位置検出センサ３を光学筒９
に位置調整自在に保持するための支持部材７により電気
的シールドができることになる。It is also preferable that the position detection sensor 3 has a current output that changes depending on the position of the light receiving spot. With such a configuration, the position detection sensor 3 can be configured with a simple configuration. It is also preferable that the support member 7 is made of metal so that the position detection sensor 3 has an electrical shield effect. With such a configuration, the position detection sensor 3 is attached to the optical tube 9
The electric shield can be provided by the support member 7 for holding the position adjustable.
【００１０】また、光学筒９を金属製とし、光学筒９に
対して移動自在に取付けた金属製の支持部材７を金属製
のねじ３２により固定することも好ましい。このような
構成とすることで、支持部材７と光学筒９とで電気的シ
ールドができて、シールド効果を高めることができる。
また、光学筒９に支持部材７を固定するためにねじ込む
ねじ３２よりも小径のタッピング用の孔１７を形成する
ことも好ましい。このような構成とすることで、ねじ３
２により固定する際に、小径のタッピング用の孔１７の
表面の被膜を削り取って、新鮮な金属表面を露出させて
ねじ３２と電気的に接続できることになる。It is also preferable that the optical barrel 9 is made of metal, and the metallic support member 7 movably attached to the optical barrel 9 is fixed by a metallic screw 32. With such a configuration, the support member 7 and the optical tube 9 can be electrically shielded, and the shield effect can be enhanced.
It is also preferable to form a tapping hole 17 having a smaller diameter than the screw 32 screwed in to fix the support member 7 to the optical tube 9. With such a configuration, the screw 3
When fixing by means of 2, the coating film on the surface of the small-diameter tapping hole 17 is scraped off to expose a fresh metal surface so that the screw 32 can be electrically connected.
【００１１】[0011]
【発明の実施の形態】本発明を以下添付図面に示す実施
形態に基づいて詳述する。図１乃至図４に本発明の実施
形態を示す。光学式変位測定装置は、レーザダイオード
などの発光源１、光を測定物体２に集光する投光レンズ
６などをもつ投光光学系、測定物体２からの反射、散乱
光を受光する受光レンズ１１を備えた受光光学系、受光
光学系の結像面に配置されたＰＳＤなどの位置検出セン
サ３を備えており、更に、位置検出センサ３の位置を調
節することができる位置検出センサ３の支持部材７、投
光光学系、受光光学系を保持するための光学筒８、９を
備えている。ここで、光学筒８と光学筒９とは連結部材
１０により連結してあり、投光光学系側の光学筒８には
レーザダイオードなどの発光源１、投光レンズ６が装着
してある。受光光学系側の光学筒９には受光レンズ１１
が装着してあり、更に、受光光学系側の光学筒９の後端
開口部１２の後面部には位置検出センサ３であるＰＳＤ
（以下ＰＳＤとして説明する）が当接してあって、支持
部材７によりＰＳＤを受光光学系側の光学筒９の後端開
口部１２の後面部に押し当てて取付けてある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on embodiments shown in the accompanying drawings. 1 to 4 show an embodiment of the present invention. The optical displacement measuring device includes a light emitting source 1 such as a laser diode, a light projecting optical system having a light projecting lens 6 for condensing light on a measuring object 2, a light receiving lens for receiving reflected light and scattered light from the measuring object 2. A position detection sensor 3 such as a PSD disposed on the image plane of the light reception optical system, and a position detection sensor 3 capable of adjusting the position of the position detection sensor 3. The supporting member 7, the light projecting optical system, and the optical tubes 8 and 9 for holding the light receiving optical system are provided. Here, the optical tube 8 and the optical tube 9 are connected by a connecting member 10, and a light emitting source 1 such as a laser diode and a light projecting lens 6 are attached to the optical tube 8 on the projecting optical system side. A light receiving lens 11 is provided in the optical tube 9 on the light receiving optical system side.
Is mounted on the light receiving optical system side, and the PSD which is the position detection sensor 3 is provided on the rear surface of the rear end opening 12 of the optical tube 9 on the light receiving optical system side.
(Hereinafter, referred to as PSD) is abutted, and the PSD is pressed against the rear surface portion of the rear end opening 12 of the optical barrel 9 on the light receiving optical system side by the supporting member 7 to be attached.
【００１２】支持部材７は中央縦片１３の両端部から支
持横片１４を連出した略コ字状をしており、中央縦片１
３に弾性を有する板ばね１５を切り起こしにより形成し
てある。また、中央縦片１３にはＰＳＤの端子４０を挿
入する孔（図示せず）が設けてあり、端子４０は孔に挿
入してあってＰＳＤを支持部材７に支持している。支持
横片１４には長孔１６が設けてある。受光光学系側の光
学筒９の後端部の上下面には複数（実施形態では２個）
の突起３１が突設してあり、更にねじ孔やタッピング用
の孔などの孔１７が設けてある。そして、ＰＳＤに支持
部材７を被せて取付けた状態で、ＰＳＤを受光光学系側
の光学筒９の後端開口部１２の後面部に押し当てると共
に支持部材７の支持横片１４ｂに設けた長孔１６を受光
光学系側の光学筒９の外面部に突設した突起３１にはめ
込むことで支持部材７を光学筒９に取付け、支持部材７
の板ばね１５によりＰＳＤを受光光学系側の光学筒９の
後端開口部１２の後面部に弾性的に押し当てるのであ
る。そして、長孔１４を突起３１にはめ込んだ状態で長
孔１４に沿って支持部材７を移動することで、支持部材
７により保持しているＰＳＤを横方向に移動調整するこ
とができるようになっており、調整後、長孔１４にねじ
３２を挿入して孔１７に螺合することで、支持部材７を
受光光学系側の光学筒９に固定し、ＰＳＤを固定するよ
うになっている。ここで、支持部材７へのＰＳＤの取付
けに当たっては、ＰＳＤの端子がない場合であっても、
接着剤などにより支持部材７の板ばね１５とＰＳＤとを
固定してもよいものである。The support member 7 has a substantially U-shaped configuration in which the support horizontal pieces 14 extend from both ends of the center vertical piece 13, and the center vertical piece 1
The leaf spring 15 having elasticity is formed by cutting and raising. Further, the central vertical piece 13 is provided with a hole (not shown) into which the PSD terminal 40 is inserted, and the terminal 40 is inserted into the hole to support the PSD on the support member 7. The support lateral piece 14 is provided with an elongated hole 16. Plural (two in the embodiment) on the upper and lower surfaces of the rear end of the optical tube 9 on the side of the light receiving optical system.
Projections 31 are provided, and holes 17 such as screw holes and tapping holes are further provided. Then, with the support member 7 being attached to the PSD, the PSD is pressed against the rear surface portion of the rear end opening 12 of the optical tube 9 on the light receiving optical system side, and the long length provided on the support horizontal piece 14b of the support member 7. The support member 7 is attached to the optical tube 9 by fitting the hole 16 into the projection 31 provided on the outer surface of the optical tube 9 on the light receiving optical system side.
The plate spring 15 elastically presses the PSD against the rear surface portion of the rear end opening 12 of the optical tube 9 on the side of the light receiving optical system. Then, by moving the support member 7 along the long hole 14 with the long hole 14 fitted in the protrusion 31, the PSD held by the support member 7 can be laterally moved and adjusted. After the adjustment, the screw 32 is inserted into the elongated hole 14 and screwed into the hole 17, whereby the support member 7 is fixed to the optical tube 9 on the light receiving optical system side, and the PSD is fixed. . Here, in mounting the PSD on the support member 7, even when there is no PSD terminal,
The leaf spring 15 of the support member 7 and the PSD may be fixed with an adhesive or the like.
【００１３】ところで、本発明において、従来のシール
ド板を省略するするため、支持部材７を金属製として、
該支持部材７によりＰＳＤを覆うことで、ＰＳＤを受光
光学系側の光学筒９に取付けるための部材を電気的シー
ルドをするための部材として兼用させるものである。こ
こで、ＰＳＤに端子４０を設けて上記のように支持部材
７に設けた孔に挿入して取付ける場合、端子４０が金属
製の支持部材１４と接触しないように端子４０を孔の縁
に接触しないように遊嵌するか、あるいは、少なくとも
孔の縁部分に絶縁部を設けてあって、端子４０と金属製
の支持部材１４とが電気的に接触しないようにするもの
である。金属製の支持部材１４をグランドに落とすた
め、リード線５０を支持部材１４に直接半田付けにより
固定し、更に、リード線５０を回路基板５１のグランド
やケース５２や金属製の光学筒９に接続するようにして
いる。In the present invention, in order to omit the conventional shield plate, the supporting member 7 is made of metal,
By covering the PSD with the supporting member 7, a member for mounting the PSD on the optical tube 9 on the light receiving optical system side is also used as a member for electrically shielding. Here, when the PSD is provided with the terminal 40 and inserted into the hole provided in the support member 7 as described above, the terminal 40 is brought into contact with the edge of the hole so that the terminal 40 does not come into contact with the metal support member 14. The terminal 40 and the metal support member 14 are prevented from electrically contacting each other by loosely fitting them or by providing an insulating portion at least at the edge portion of the hole. In order to drop the metal support member 14 to the ground, the lead wire 50 is directly fixed to the support member 14 by soldering, and the lead wire 50 is connected to the ground of the circuit board 51, the case 52, and the metal optical tube 9. I am trying to do it.
【００１４】また、ねじ３２は金属製であり、光学筒９
も金属製とすることで、ねじ３２を介して金属製の支持
部材１４と金属製の光学筒９とを導通して同電位とし、
この支持部材１４及び光学筒９によりＰＳＤの電気的シ
ールドを行うことができ、このことでよりＰＳＤの電気
的シールド性を高めることができるものである。この場
合、ねじ３２を確実に光学筒９と導通させるために、新
鮮な金属表面を露出させる必要がある。例えば、光学筒
９をクロメートなどの表面処理をした場合には、表面処
理後にねじ切りをして新鮮な金属表面を露出させた孔１
７を形成する必要がある。The screw 32 is made of metal, and the optical tube 9
By also using a metal, the metal support member 14 and the metal optical tube 9 are electrically connected to each other through the screw 32 to have the same potential,
The support member 14 and the optical tube 9 can perform the electrical shield of the PSD, and thus the electrical shield property of the PSD can be further enhanced. In this case, it is necessary to expose a fresh metal surface in order to securely connect the screw 32 to the optical tube 9. For example, when the optical tube 9 is surface-treated with chromate or the like, the hole 1 in which the fresh metal surface is exposed by threading after the surface treatment is exposed.
It is necessary to form 7.
【００１５】また、上記光学筒９に設ける孔１７として
ねじ３２よりも小径のタッピング用の孔を設け、ねじ３
２で支持部材７を光学筒９に取付ける場合、ねじ３２で
タッピング用の孔１７にタップを切るようにしてタッピ
ング用の孔１７にねじ込むことで、新鮮な金属表面を露
出させることができて、確実に金属製のねじ３２を光学
筒９に導通させ、支持部材１４及び光学筒９によりＰＳ
Ｄの電気的シールドを行うことができるものである。例
えば、セルフタップにより常に新鮮な金属表面を露出さ
せることができるので、前述の孔１７としてねじ孔を形
成するもののように、表面処理後にねじを切ってねじ孔
を形成するなどの配慮が必要でなく、確実に電気的シー
ルドができるものである。Further, a tapping hole having a diameter smaller than that of the screw 32 is provided as the hole 17 provided in the optical barrel 9, and the screw 3
When the support member 7 is attached to the optical tube 9 with the step 2, the screw 32 is tapped into the tapping hole 17 and screwed into the tapping hole 17, whereby a fresh metal surface can be exposed. Make sure that the metal screw 32 is electrically connected to the optical tube 9, and the support member 14 and the optical tube 9 allow the PS
It is possible to electrically shield D. For example, since it is possible to always expose a fresh metal surface by self-tapping, it is necessary to take into consideration that a screw hole is formed after the surface treatment to form a screw hole as in the case of forming a screw hole as the hole 17 described above. Instead, the electric shield can be surely provided.
【００１６】[0016]
【発明の効果】本発明の請求項１記載の発明にあって
は、上記のように、三角測距原理による光学式変位測定
装置において、支持部材を中央縦片の両端部から支持横
片を連出した略コ字状に形成し、支持横片に長孔を設
け、光学筒の外面部に突設した突起に支持横片に設けた
長孔を長孔の長手方向に移動自在に嵌め込んで支持部材
を光学筒に取付けると共に中央縦片に設けた板ばねによ
り位置検出センサを光学筒の端部に押し付け、支持部材
を長孔の長手方向に沿って移動することで受光スポット
の移動方向に位置検出センサを移動自在としてあるの
で、簡単な構成で受光スポットの移動方向に位置検出セ
ンサを移動させることができて、位置検出センサの位置
調整が簡単に行えるものである。According to the first aspect of the present invention, as described above, in the optical displacement measuring device based on the principle of triangulation, the supporting member is arranged from the both end portions of the central vertical piece to the supporting horizontal piece. It is formed in a continuous U-shape, and a long hole is provided in the support horizontal piece, and the long hole provided in the support horizontal piece is fitted to the protrusion protruding on the outer surface of the optical tube so as to be movable in the longitudinal direction of the long hole. Move the light receiving spot by moving the support member along the longitudinal direction of the slot by pressing the position detection sensor against the end of the optical cylinder with the leaf spring provided in the central vertical piece while mounting the support member on the optical cylinder. Since the position detecting sensor is movable in the direction, the position detecting sensor can be moved in the moving direction of the light receiving spot with a simple configuration, and the position adjustment of the position detecting sensor can be easily performed.
【００１７】また、請求項２記載の発明にあっては、上
記請求項１記載の発明の効果に加えて、位置検出センサ
が受光スポットの位置によって電流出力が変化するもの
であるから、簡単な構成で位置検出センサを構成するこ
とができるものである。また、請求項３記載の発明にあ
っては、上記請求項１又は請求項２記載の発明の効果に
加えて、支持部材を金属製として位置検出センサに対し
て電気的シールド効果を持たせてあるので、位置検出セ
ンサを光学筒に取付けるための支持部材をそのまま位置
検出センサの電気的シールド部材として兼用することが
できて、従来のように、別部材のシールド板を設ける必
要がなく、簡単な構成で電気的シールド効果を持たせる
ことができ、コストダウンを図ることができるものであ
る。Further, in the invention described in claim 2, in addition to the effect of the invention described in claim 1, since the position detection sensor changes the current output depending on the position of the light receiving spot, it is simple. The position detection sensor can be configured by the configuration. According to the invention of claim 3, in addition to the effect of the invention of claim 1 or claim 2, the supporting member is made of metal to have an electric shield effect on the position detection sensor. Therefore, the support member for attaching the position detection sensor to the optical tube can be used as it is as an electric shield member of the position detection sensor, and it is not necessary to provide a shield plate as a separate member as in the conventional case, and it is simple. With such a configuration, an electrical shield effect can be provided, and cost can be reduced.
【００１８】また、請求項４記載の発明にあっては、上
記請求項３記載の発明の効果に加えて、光学筒を金属製
とし、光学筒に対して移動自在に取付けた金属製の支持
部材を金属製のねじにより固定してあるので、支持部材
と光学筒で位置検出センサの電気的シールドを行うこと
ができて、簡単な構成で電気的シールド効果をより高め
ることができるものである。According to the invention of claim 4, in addition to the effect of the invention of claim 3, the optical tube is made of metal, and the metal support is movably attached to the optical tube. Since the member is fixed by the metal screw, the position detecting sensor can be electrically shielded by the supporting member and the optical tube, and the electrical shield effect can be further enhanced with a simple configuration. .
【００１９】また、請求項５記載の発明にあっては、上
記請求項４記載の発明の効果に加えて、光学筒に支持部
材を固定するためにねじ込むねじよりも小径のタッピン
グ用の孔を形成してあるので、ねじの雄ねじ部によるセ
ルフタップにより光学筒に新鮮な金属表面を露出させる
ことができ、表面処理の手順などを考慮することなく、
確実に電気的シールドをとることができるものである。According to the invention of claim 5, in addition to the effect of the invention of claim 4, a tapping hole having a diameter smaller than that of a screw screwed to fix the support member to the optical tube is provided. Since it is formed, a fresh metal surface can be exposed on the optical tube by self tapping with the male thread of the screw, and without considering the procedure of surface treatment,
The electric shield can be surely taken.
【図１】本発明の平面図である。FIG. 1 is a plan view of the present invention.
【図２】同上の分解斜視図である。FIG. 2 is an exploded perspective view of the same.
【図３】同上の支持部材の板ばねにより位置検出センサ
を押圧して位置検出センサを光学筒に取付けている状態
の概略平断面図である。FIG. 3 is a schematic plan sectional view showing a state in which the position detection sensor is pressed by a leaf spring of the supporting member and the position detection sensor is attached to the optical tube.
【図４】同上の支持部材の板ばねにより位置検出センサ
を押圧して位置検出センサを光学筒に取付けている状態
の概略側面図である。FIG. 4 is a schematic side view showing a state in which the position detection sensor is pressed by a leaf spring of the supporting member and the position detection sensor is attached to the optical tube.
【図５】従来例を示す分解斜視図である。FIG. 5 is an exploded perspective view showing a conventional example.
１ 投光源 ２ 測定物体 ３ 位置検出センサ ７ 支持部材 ９ 光学筒 １３ 中央縦片 １４ 支持横片 １６ 長孔 １７ 孔 ３１ 突起 ３２ ねじ 1 Light Source 2 Measuring Object 3 Position Detection Sensor 7 Supporting Member 9 Optical Tube 13 Central Vertical Piece 14 Supporting Horizontal Piece 16 Long Hole 17 Hole 31 Protrusion 32 Screw
Claims (5)
を測定物体に照射する投光光学系と、光ビームの測定物
体での反射光を集光する受光光学系と、受光光学系の結
像面に配置されて受光スポットの位置を検出する位置検
出センサと、受光光学系を組み込む光学筒に位置検出セ
ンサを取付ける保持部材とを備えた三角測距原理による
光学式変位測定装置において、支持部材を中央縦片の両
端部から支持横片を連出した略コ字状に形成し、支持横
片に長孔を設け、光学筒の外面部に突設した突起に支持
横片に設けた長孔を長孔の長手方向に移動自在に嵌め込
んで支持部材を光学筒に取付けると共に中央縦片に設け
た板ばねにより位置検出センサを光学筒の端部に押し付
け、支持部材を長孔の長手方向に沿って移動することで
受光スポットの移動方向に位置検出センサを移動自在と
して成ることを特徴とする光学式変位測定装置。1. A projection light source for generating a light beam, a projection optical system for irradiating the measurement object with the light beam, a light receiving optical system for collecting reflected light of the light beam on the measurement object, and a light receiving optical system. In an optical displacement measurement device based on the triangulation principle, which comprises a position detection sensor arranged on the image plane to detect the position of the light receiving spot, and a holding member for mounting the position detection sensor on an optical tube incorporating a light receiving optical system, The support member is formed into a substantially U shape in which the support horizontal pieces extend from both ends of the central vertical piece, the support horizontal piece is provided with a long hole, and the projection provided on the outer surface of the optical tube is provided on the support horizontal piece. The slotted hole is movably fitted in the longitudinal direction of the slotted hole to attach the support member to the optical tube and the position detection sensor is pressed against the end of the optical tube by the leaf spring provided on the central vertical piece. Moving the light receiving spot by moving along the longitudinal direction of An optical displacement measuring device, characterized in that a position detecting sensor is movable in any direction.
よって電流出力が変化するものであることを特徴とする
請求項１記載の光学式変位測定装置。2. The optical displacement measuring device according to claim 1, wherein the position detection sensor has a current output that changes depending on the position of the light receiving spot.
に対して電気的シールド効果を持たせて成ることを特徴
とする請求項１又は請求項２記載の光学式変位測定装
置。3. The optical displacement measuring device according to claim 1, wherein the supporting member is made of metal and has an electric shield effect on the position detecting sensor.
動自在に取付けた金属製の支持部材を金属製のねじによ
り固定して成ることを特徴とする請求項３記載の光学式
変位測定装置。4. The optical displacement according to claim 3, wherein the optical barrel is made of metal, and a metallic support member movably attached to the optical barrel is fixed by a metallic screw. measuring device.
込むねじよりも小径のタッピング用の孔を形成して成る
ことを特徴とする請求項４記載の光学式変位測定装置。5. The optical displacement measuring device according to claim 4, wherein a tapping hole having a diameter smaller than that of a screw screwed to fix the support member is formed on the optical barrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13307296A JP3605942B2 (en) | 1996-05-28 | 1996-05-28 | Optical displacement measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13307296A JP3605942B2 (en) | 1996-05-28 | 1996-05-28 | Optical displacement measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09318314A true JPH09318314A (en) | 1997-12-12 |
| JP3605942B2 JP3605942B2 (en) | 2004-12-22 |
Family
ID=15096197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13307296A Expired - Fee Related JP3605942B2 (en) | 1996-05-28 | 1996-05-28 | Optical displacement measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3605942B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11245816A (en) * | 1998-03-03 | 1999-09-14 | East Japan Railway Co | Rail displacement measurement device |
| JP2008145160A (en) * | 2006-12-07 | 2008-06-26 | Keyence Corp | Optical displacement sensor and its adjusting method |
| JP2011128048A (en) * | 2009-12-18 | 2011-06-30 | Keyence Corp | Sensor head of optical displacement sensor and optical displacement sensor equipped with the sensor head |
| CN117490984A (en) * | 2023-12-12 | 2024-02-02 | 浙江嘉利（丽水）工业股份有限公司 | Robot vision optometry check out test set for automobile LED tail lamp |
-
1996
- 1996-05-28 JP JP13307296A patent/JP3605942B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11245816A (en) * | 1998-03-03 | 1999-09-14 | East Japan Railway Co | Rail displacement measurement device |
| JP2008145160A (en) * | 2006-12-07 | 2008-06-26 | Keyence Corp | Optical displacement sensor and its adjusting method |
| JP2011128048A (en) * | 2009-12-18 | 2011-06-30 | Keyence Corp | Sensor head of optical displacement sensor and optical displacement sensor equipped with the sensor head |
| CN117490984A (en) * | 2023-12-12 | 2024-02-02 | 浙江嘉利（丽水）工业股份有限公司 | Robot vision optometry check out test set for automobile LED tail lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3605942B2 (en) | 2004-12-22 |
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