JPH10227644A5 - - Google Patents

Info

Publication number
JPH10227644A5
JPH10227644A5 JP1997043047A JP4304797A JPH10227644A5 JP H10227644 A5 JPH10227644 A5 JP H10227644A5 JP 1997043047 A JP1997043047 A JP 1997043047A JP 4304797 A JP4304797 A JP 4304797A JP H10227644 A5 JPH10227644 A5 JP H10227644A5
Authority
JP
Japan
Prior art keywords
vibrator
coriolis force
axis
phase difference
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997043047A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10227644A (ja
JP3865854B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP04304797A priority Critical patent/JP3865854B2/ja
Priority claimed from JP04304797A external-priority patent/JP3865854B2/ja
Publication of JPH10227644A publication Critical patent/JPH10227644A/ja
Publication of JPH10227644A5 publication Critical patent/JPH10227644A5/ja
Application granted granted Critical
Publication of JP3865854B2 publication Critical patent/JP3865854B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP04304797A 1997-02-12 1997-02-12 振動子を用いた角速度センサ Expired - Fee Related JP3865854B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP04304797A JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04304797A JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Publications (3)

Publication Number Publication Date
JPH10227644A JPH10227644A (ja) 1998-08-25
JPH10227644A5 true JPH10227644A5 (fr) 2004-12-24
JP3865854B2 JP3865854B2 (ja) 2007-01-10

Family

ID=12652981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP04304797A Expired - Fee Related JP3865854B2 (ja) 1997-02-12 1997-02-12 振動子を用いた角速度センサ

Country Status (1)

Country Link
JP (1) JP3865854B2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7017410B2 (en) * 2001-08-10 2006-03-28 The Boeing Company Isolated resonator gyroscope with a drive and sense plate
JP4455201B2 (ja) 2004-07-20 2010-04-21 富士通マイクロエレクトロニクス株式会社 検出回路
JP2007046927A (ja) * 2005-08-08 2007-02-22 Wacoh Corp 加速度・角速度センサおよびその製造方法
JP2007292499A (ja) 2006-04-21 2007-11-08 Sony Corp モーションセンサ及びその製造方法
JP2009145301A (ja) * 2007-12-18 2009-07-02 Wacoh Corp 角速度センサ
JP5003740B2 (ja) * 2009-10-02 2012-08-15 富士通セミコンダクター株式会社 検出回路

Similar Documents

Publication Publication Date Title
CA2389433A1 (fr) Regulateur de debit massique de type coriolis
WO2000034748A3 (fr) Regulateur de flux massique de type coriolis
JP2007101553A (ja) 回転角速度センサ
NO976138D0 (no) Vinkelhastighets sensor med monolitisk vibrerende bjelke
EP1031814A4 (fr) Capteur de vitesse angulaire
US20040154398A1 (en) Micromechanical roatational rate sensor
JPH10227644A5 (fr)
JP2000081335A (ja) ヨーレートセンサ
EP0706030A1 (fr) Capteur pour direction et distance
JP2001091535A (ja) 容量式物理量検出装置
EP1054234B1 (fr) Capteur inertiel
EP1162467A3 (fr) Capteur d'accélération
EP1152216A3 (fr) Vibreur
JPH09218040A (ja) 角速度センサの自己診断方法
GB0122011D0 (en) Vibratory gyroscope
JPH10227644A (ja) 振動子を用いた角速度センサ
JP2005283584A (ja) 駆動／検出手段、駆動ユニットおよび評価ユニットを有するセンサ
JP2671020B2 (ja) 振動ジャイロ
JPH0326411Y2 (fr)
JPH09105637A (ja) 振動ジャイロ
EP0684450B1 (fr) Structure de support d'un vibreur
EP0563762B1 (fr) Gyroscope vibrateur dont les éléments piézoélectriques se trouvent près noeuds vibratoires
JP3282442B2 (ja) 振動ジャイロ
JP3651155B2 (ja) 振動ジャイロ
JP2571893B2 (ja) 振動ジャイロ