JPH11162700A5 - - Google Patents

Info

Publication number
JPH11162700A5
JPH11162700A5 JP1997331900A JP33190097A JPH11162700A5 JP H11162700 A5 JPH11162700 A5 JP H11162700A5 JP 1997331900 A JP1997331900 A JP 1997331900A JP 33190097 A JP33190097 A JP 33190097A JP H11162700 A5 JPH11162700 A5 JP H11162700A5
Authority
JP
Japan
Prior art keywords
passage
ions
cryopump
shield
baffle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997331900A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11162700A (ja
JP3792379B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33190097A priority Critical patent/JP3792379B2/ja
Priority claimed from JP33190097A external-priority patent/JP3792379B2/ja
Publication of JPH11162700A publication Critical patent/JPH11162700A/ja
Publication of JPH11162700A5 publication Critical patent/JPH11162700A5/ja
Application granted granted Critical
Publication of JP3792379B2 publication Critical patent/JP3792379B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP33190097A 1997-12-02 1997-12-02 湾曲荷電粒子通路の真空排気方法 Expired - Lifetime JP3792379B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33190097A JP3792379B2 (ja) 1997-12-02 1997-12-02 湾曲荷電粒子通路の真空排気方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33190097A JP3792379B2 (ja) 1997-12-02 1997-12-02 湾曲荷電粒子通路の真空排気方法

Publications (3)

Publication Number Publication Date
JPH11162700A JPH11162700A (ja) 1999-06-18
JPH11162700A5 true JPH11162700A5 (2) 2005-05-19
JP3792379B2 JP3792379B2 (ja) 2006-07-05

Family

ID=18248892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33190097A Expired - Lifetime JP3792379B2 (ja) 1997-12-02 1997-12-02 湾曲荷電粒子通路の真空排気方法

Country Status (1)

Country Link
JP (1) JP3792379B2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8148922B2 (en) * 2008-08-11 2012-04-03 Ion Beam Applications Sa High-current DC proton accelerator

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