JPH11166478A5 - - Google Patents

Info

Publication number
JPH11166478A5
JPH11166478A5 JP1997331899A JP33189997A JPH11166478A5 JP H11166478 A5 JPH11166478 A5 JP H11166478A5 JP 1997331899 A JP1997331899 A JP 1997331899A JP 33189997 A JP33189997 A JP 33189997A JP H11166478 A5 JPH11166478 A5 JP H11166478A5
Authority
JP
Japan
Prior art keywords
passage
ions
shield
baffle
intake port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997331899A
Other languages
English (en)
Japanese (ja)
Other versions
JP4008081B2 (ja
JPH11166478A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP33189997A priority Critical patent/JP4008081B2/ja
Priority claimed from JP33189997A external-priority patent/JP4008081B2/ja
Publication of JPH11166478A publication Critical patent/JPH11166478A/ja
Publication of JPH11166478A5 publication Critical patent/JPH11166478A5/ja
Application granted granted Critical
Publication of JP4008081B2 publication Critical patent/JP4008081B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP33189997A 1997-12-02 1997-12-02 クライオポンプの再生方法 Expired - Lifetime JP4008081B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33189997A JP4008081B2 (ja) 1997-12-02 1997-12-02 クライオポンプの再生方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33189997A JP4008081B2 (ja) 1997-12-02 1997-12-02 クライオポンプの再生方法

Publications (3)

Publication Number Publication Date
JPH11166478A JPH11166478A (ja) 1999-06-22
JPH11166478A5 true JPH11166478A5 (2) 2005-05-19
JP4008081B2 JP4008081B2 (ja) 2007-11-14

Family

ID=18248882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33189997A Expired - Lifetime JP4008081B2 (ja) 1997-12-02 1997-12-02 クライオポンプの再生方法

Country Status (1)

Country Link
JP (1) JP4008081B2 (2)

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