JPH11511207A5 - - Google Patents

Info

Publication number
JPH11511207A5
JPH11511207A5 JP1997509337A JP50933797A JPH11511207A5 JP H11511207 A5 JPH11511207 A5 JP H11511207A5 JP 1997509337 A JP1997509337 A JP 1997509337A JP 50933797 A JP50933797 A JP 50933797A JP H11511207 A5 JPH11511207 A5 JP H11511207A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997509337A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11511207A (ja
JP4108748B2 (ja
Filing date
Publication date
Priority claimed from US08/517,045 external-priority patent/US5551985A/en
Application filed filed Critical
Publication of JPH11511207A publication Critical patent/JPH11511207A/ja
Publication of JPH11511207A5 publication Critical patent/JPH11511207A5/ja
Application granted granted Critical
Publication of JP4108748B2 publication Critical patent/JP4108748B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP50933797A 1995-08-18 1996-08-14 コールドウォール気相成長法 Expired - Fee Related JP4108748B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US517,045 1995-08-18
US08/517,045 US5551985A (en) 1995-08-18 1995-08-18 Method and apparatus for cold wall chemical vapor deposition
PCT/US1996/012768 WO1997007259A1 (en) 1995-08-18 1996-08-14 Method and apparatus for cold wall chemical vapor deposition

Publications (3)

Publication Number Publication Date
JPH11511207A JPH11511207A (ja) 1999-09-28
JPH11511207A5 true JPH11511207A5 (2) 2004-07-15
JP4108748B2 JP4108748B2 (ja) 2008-06-25

Family

ID=24058153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50933797A Expired - Fee Related JP4108748B2 (ja) 1995-08-18 1996-08-14 コールドウォール気相成長法

Country Status (7)

Country Link
US (2) US5551985A (2)
EP (1) EP0850323B1 (2)
JP (1) JP4108748B2 (2)
KR (1) KR100400488B1 (2)
AU (1) AU6843096A (2)
DE (1) DE69634539T2 (2)
WO (1) WO1997007259A1 (2)

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