JPH1192950A5 - - Google Patents

Info

Publication number
JPH1192950A5
JPH1192950A5 JP1997269340A JP26934097A JPH1192950A5 JP H1192950 A5 JPH1192950 A5 JP H1192950A5 JP 1997269340 A JP1997269340 A JP 1997269340A JP 26934097 A JP26934097 A JP 26934097A JP H1192950 A5 JPH1192950 A5 JP H1192950A5
Authority
JP
Japan
Prior art keywords
substrate
film
semiconductor wafer
elastic deformation
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997269340A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1192950A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP26934097A priority Critical patent/JPH1192950A/ja
Priority claimed from JP26934097A external-priority patent/JPH1192950A/ja
Publication of JPH1192950A publication Critical patent/JPH1192950A/ja
Publication of JPH1192950A5 publication Critical patent/JPH1192950A5/ja
Pending legal-status Critical Current

Links

JP26934097A 1997-09-16 1997-09-16 健全な膜の堆積方法及び装置 Pending JPH1192950A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26934097A JPH1192950A (ja) 1997-09-16 1997-09-16 健全な膜の堆積方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26934097A JPH1192950A (ja) 1997-09-16 1997-09-16 健全な膜の堆積方法及び装置

Publications (2)

Publication Number Publication Date
JPH1192950A JPH1192950A (ja) 1999-04-06
JPH1192950A5 true JPH1192950A5 (2) 2004-10-14

Family

ID=17471019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26934097A Pending JPH1192950A (ja) 1997-09-16 1997-09-16 健全な膜の堆積方法及び装置

Country Status (1)

Country Link
JP (1) JPH1192950A (2)

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