JPS51136292A - Semi-conductor producing - Google Patents

Semi-conductor producing

Info

Publication number: JPS51136292A
Authority: JP; Japan
Prior art keywords: semi; conductor; oxide film; metal wiring; conductor producing
Prior art date: 1975-05-21
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP6064375A

Other languages

English (en)

Other versions

JPS6018144B2 (ja

Inventor

Okimitsu Yasuda

Hidetoshi Yada

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toshiba Corp

Original Assignee

Toshiba Corp

Tokyo Shibaura Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1975-05-21

Filing date

1975-05-21

Publication date

1976-11-25

1975-05-21 Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp

1975-05-21 Priority to JP50060643A priority Critical patent/JPS6018144B2/ja

1976-11-25 Publication of JPS51136292A publication Critical patent/JPS51136292A/ja

1985-05-09 Publication of JPS6018144B2 publication Critical patent/JPS6018144B2/ja

Status Expired legal-status Critical Current

Links

239000004065 semiconductor Substances 0.000 title abstract 2
239000002184 metal Substances 0.000 abstract 2
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
239000011248 coating agent Substances 0.000 abstract 1
238000000576 coating method Methods 0.000 abstract 1
230000002265 prevention Effects 0.000 abstract 1
229910052814 silicon oxide Inorganic materials 0.000 abstract 1
239000002904 solvent Substances 0.000 abstract 1

Landscapes

Local Oxidation Of Silicon (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

JP50060643A 1975-05-21 1975-05-21 半導体装置の製造方法 Expired JPS6018144B2 (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP50060643A JPS6018144B2 (ja)	1975-05-21	1975-05-21	半導体装置の製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP50060643A JPS6018144B2 (ja)	1975-05-21	1975-05-21	半導体装置の製造方法

Publications (2)

Publication Number	Publication Date
JPS51136292A true JPS51136292A (en)	1976-11-25
JPS6018144B2 JPS6018144B2 (ja)	1985-05-09

Family

ID=13148200

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP50060643A Expired JPS6018144B2 (ja)	1975-05-21	1975-05-21	半導体装置の製造方法

Country Status (1)

Country	Link
JP (1)	JPS6018144B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03228354A (ja) *	1990-02-02	1991-10-09	Rohm Co Ltd	半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS49122976A (ja) *	1973-03-27	1974-11-25

1975
- 1975-05-21 JP JP50060643A patent/JPS6018144B2/ja not_active Expired

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS49122976A (ja) *	1973-03-27	1974-11-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH03228354A (ja) *	1990-02-02	1991-10-09	Rohm Co Ltd	半導体装置の製造方法

Also Published As

Publication number	Publication date
JPS6018144B2 (ja)	1985-05-09

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