JPS5246765A - Method of producing semiconductor device - Google Patents

Method of producing semiconductor device

Info

Publication number
JPS5246765A
JPS5246765A JP12300375A JP12300375A JPS5246765A JP S5246765 A JPS5246765 A JP S5246765A JP 12300375 A JP12300375 A JP 12300375A JP 12300375 A JP12300375 A JP 12300375A JP S5246765 A JPS5246765 A JP S5246765A
Authority
JP
Japan
Prior art keywords
semiconductor device
producing semiconductor
wiring
evaporating
suppress
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12300375A
Other languages
Japanese (ja)
Inventor
Tsugumitsu Miyasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP12300375A priority Critical patent/JPS5246765A/en
Publication of JPS5246765A publication Critical patent/JPS5246765A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To make wiring by evaporating Al-Si alloy in a ceramics boat, and suppress the reaction between substrate material and wiring metal, thereby making a shallow impurity diffusion layer.
COPYRIGHT: (C)1977,JPO&Japio
JP12300375A 1975-10-13 1975-10-13 Method of producing semiconductor device Pending JPS5246765A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12300375A JPS5246765A (en) 1975-10-13 1975-10-13 Method of producing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12300375A JPS5246765A (en) 1975-10-13 1975-10-13 Method of producing semiconductor device

Publications (1)

Publication Number Publication Date
JPS5246765A true JPS5246765A (en) 1977-04-13

Family

ID=14849843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12300375A Pending JPS5246765A (en) 1975-10-13 1975-10-13 Method of producing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5246765A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55177835U (en) * 1979-06-07 1980-12-20
JPS561608A (en) * 1979-06-18 1981-01-09 Fujitsu Ltd Multistep agc control system for automatic equalizer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55177835U (en) * 1979-06-07 1980-12-20
JPS561608A (en) * 1979-06-18 1981-01-09 Fujitsu Ltd Multistep agc control system for automatic equalizer

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