JPS51136292A - Semi-conductor producing - Google Patents

Semi-conductor producing

Info

Publication number
JPS51136292A
JPS51136292A JP6064375A JP6064375A JPS51136292A JP S51136292 A JPS51136292 A JP S51136292A JP 6064375 A JP6064375 A JP 6064375A JP 6064375 A JP6064375 A JP 6064375A JP S51136292 A JPS51136292 A JP S51136292A
Authority
JP
Japan
Prior art keywords
semi
conductor
oxide film
metal wiring
conductor producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6064375A
Other languages
Japanese (ja)
Other versions
JPS6018144B2 (en
Inventor
Okimitsu Yasuda
Hidetoshi Yada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50060643A priority Critical patent/JPS6018144B2/en
Publication of JPS51136292A publication Critical patent/JPS51136292A/en
Publication of JPS6018144B2 publication Critical patent/JPS6018144B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: Prevention for metal wiring protrution and wire disconnection by coating silcon containing solvent follwed by growing oxide film in desired thickness for forming silicon oxide film on metal wiring layer of semi-conductor.
COPYRIGHT: (C)1976,JPO&Japio
JP50060643A 1975-05-21 1975-05-21 Manufacturing method of semiconductor device Expired JPS6018144B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50060643A JPS6018144B2 (en) 1975-05-21 1975-05-21 Manufacturing method of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50060643A JPS6018144B2 (en) 1975-05-21 1975-05-21 Manufacturing method of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51136292A true JPS51136292A (en) 1976-11-25
JPS6018144B2 JPS6018144B2 (en) 1985-05-09

Family

ID=13148200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50060643A Expired JPS6018144B2 (en) 1975-05-21 1975-05-21 Manufacturing method of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6018144B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03228354A (en) * 1990-02-02 1991-10-09 Rohm Co Ltd Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122976A (en) * 1973-03-27 1974-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49122976A (en) * 1973-03-27 1974-11-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03228354A (en) * 1990-02-02 1991-10-09 Rohm Co Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS6018144B2 (en) 1985-05-09

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