JPS51137382A - Measuring method for junction point within semi conductor wafer - Google Patents

Measuring method for junction point within semi conductor wafer

Info

Publication number
JPS51137382A
JPS51137382A JP50061652A JP6165275A JPS51137382A JP S51137382 A JPS51137382 A JP S51137382A JP 50061652 A JP50061652 A JP 50061652A JP 6165275 A JP6165275 A JP 6165275A JP S51137382 A JPS51137382 A JP S51137382A
Authority
JP
Japan
Prior art keywords
junction point
measuring method
semi conductor
conductor wafer
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50061652A
Other languages
Japanese (ja)
Other versions
JPS59970B2 (en
Inventor
Takayuki Matsukawa
Tadao Kato
Hiroshi Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50061652A priority Critical patent/JPS59970B2/en
Publication of JPS51137382A publication Critical patent/JPS51137382A/en
Publication of JPS59970B2 publication Critical patent/JPS59970B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: Junction point measuring method with short easy operation, measuring time, and high accuracy in measuring the junction point within semi conductor W after.
COPYRIGHT: (C)1976,JPO&Japio
JP50061652A 1975-05-22 1975-05-22 How to use the handbook Expired JPS59970B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50061652A JPS59970B2 (en) 1975-05-22 1975-05-22 How to use the handbook

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50061652A JPS59970B2 (en) 1975-05-22 1975-05-22 How to use the handbook

Publications (2)

Publication Number Publication Date
JPS51137382A true JPS51137382A (en) 1976-11-27
JPS59970B2 JPS59970B2 (en) 1984-01-10

Family

ID=13177360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50061652A Expired JPS59970B2 (en) 1975-05-22 1975-05-22 How to use the handbook

Country Status (1)

Country Link
JP (1) JPS59970B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0521564A (en) * 1991-07-12 1993-01-29 Toshiba Corp Diffusion layer depth measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0521564A (en) * 1991-07-12 1993-01-29 Toshiba Corp Diffusion layer depth measuring device

Also Published As

Publication number Publication date
JPS59970B2 (en) 1984-01-10

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