JPS51140564A - Forming electrode and wiring layer - Google Patents

Forming electrode and wiring layer

Info

Publication number
JPS51140564A
JPS51140564A JP6430375A JP6430375A JPS51140564A JP S51140564 A JPS51140564 A JP S51140564A JP 6430375 A JP6430375 A JP 6430375A JP 6430375 A JP6430375 A JP 6430375A JP S51140564 A JPS51140564 A JP S51140564A
Authority
JP
Japan
Prior art keywords
wiring layer
forming electrode
film surface
insulation film
layer composed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6430375A
Other languages
Japanese (ja)
Inventor
Hiroshi Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6430375A priority Critical patent/JPS51140564A/en
Publication of JPS51140564A publication Critical patent/JPS51140564A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To provide a method of forming electrodes and wiring layer composed of aluminum containing silicon, without leaving residual silicon enough to produce current on the insulation film surface.
COPYRIGHT: (C)1976,JPO&Japio
JP6430375A 1975-05-30 1975-05-30 Forming electrode and wiring layer Pending JPS51140564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6430375A JPS51140564A (en) 1975-05-30 1975-05-30 Forming electrode and wiring layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6430375A JPS51140564A (en) 1975-05-30 1975-05-30 Forming electrode and wiring layer

Publications (1)

Publication Number Publication Date
JPS51140564A true JPS51140564A (en) 1976-12-03

Family

ID=13254336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6430375A Pending JPS51140564A (en) 1975-05-30 1975-05-30 Forming electrode and wiring layer

Country Status (1)

Country Link
JP (1) JPS51140564A (en)

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