JPS51140577A - Wafer holder for electronic beam exposing device - Google Patents

Wafer holder for electronic beam exposing device

Info

Publication number
JPS51140577A
JPS51140577A JP50064992A JP6499275A JPS51140577A JP S51140577 A JPS51140577 A JP S51140577A JP 50064992 A JP50064992 A JP 50064992A JP 6499275 A JP6499275 A JP 6499275A JP S51140577 A JPS51140577 A JP S51140577A
Authority
JP
Japan
Prior art keywords
electronic beam
wafer holder
exposing device
beam exposing
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064992A
Other languages
English (en)
Inventor
Kimio Yanagida
Yasutaka Ban
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50064992A priority Critical patent/JPS51140577A/ja
Publication of JPS51140577A publication Critical patent/JPS51140577A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP50064992A 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device Pending JPS51140577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064992A JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064992A JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Publications (1)

Publication Number Publication Date
JPS51140577A true JPS51140577A (en) 1976-12-03

Family

ID=13274053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064992A Pending JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Country Status (1)

Country Link
JP (1) JPS51140577A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62260326A (ja) * 1986-04-28 1987-11-12 エイ・テイ・アンド・ティ・コーポレーション 半導体ウエ−ハの加工方法
JP2009125336A (ja) * 2007-11-26 2009-06-11 Takeshi Kato 吸引ホース用接続具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62260326A (ja) * 1986-04-28 1987-11-12 エイ・テイ・アンド・ティ・コーポレーション 半導体ウエ−ハの加工方法
JP2009125336A (ja) * 2007-11-26 2009-06-11 Takeshi Kato 吸引ホース用接続具

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