Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
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Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP50068400ApriorityCriticalpatent/JPS51144187A/en
Publication of JPS51144187ApublicationCriticalpatent/JPS51144187A/en
PURPOSE: Production method of semiconductor unit using double diffusion method where there is no or very little emitter dip and diffusion depth is easily controllable.
COPYRIGHT: (C)1976,JPO&Japio
JP50068400A1975-06-051975-06-05Production method of semiconductor unit
PendingJPS51144187A
(en)