JPS51146192A - Diode device fabrication method - Google Patents

Diode device fabrication method

Info

Publication number
JPS51146192A
JPS51146192A JP50069751A JP6975175A JPS51146192A JP S51146192 A JPS51146192 A JP S51146192A JP 50069751 A JP50069751 A JP 50069751A JP 6975175 A JP6975175 A JP 6975175A JP S51146192 A JPS51146192 A JP S51146192A
Authority
JP
Japan
Prior art keywords
fabrication method
device fabrication
diode device
diode
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50069751A
Other languages
English (en)
Inventor
Tsutomu Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50069751A priority Critical patent/JPS51146192A/ja
Publication of JPS51146192A publication Critical patent/JPS51146192A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP50069751A 1975-06-11 1975-06-11 Diode device fabrication method Pending JPS51146192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50069751A JPS51146192A (en) 1975-06-11 1975-06-11 Diode device fabrication method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50069751A JPS51146192A (en) 1975-06-11 1975-06-11 Diode device fabrication method

Publications (1)

Publication Number Publication Date
JPS51146192A true JPS51146192A (en) 1976-12-15

Family

ID=13411801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50069751A Pending JPS51146192A (en) 1975-06-11 1975-06-11 Diode device fabrication method

Country Status (1)

Country Link
JP (1) JPS51146192A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS5784147A (en) * 1980-11-13 1982-05-26 Seiko Epson Corp Manufacture of integrated circuit
JPS57113247A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Manufacture of semiconductor device
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56160050A (en) * 1980-05-14 1981-12-09 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS5784147A (en) * 1980-11-13 1982-05-26 Seiko Epson Corp Manufacture of integrated circuit
JPS57113247A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Manufacture of semiconductor device
JPS589337A (ja) * 1982-06-25 1983-01-19 Hitachi Ltd 半導体装置の製造方法

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