JPS51147284A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51147284A
JPS51147284A JP7172875A JP7172875A JPS51147284A JP S51147284 A JPS51147284 A JP S51147284A JP 7172875 A JP7172875 A JP 7172875A JP 7172875 A JP7172875 A JP 7172875A JP S51147284 A JPS51147284 A JP S51147284A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
formation
surface resistance
different surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7172875A
Other languages
Japanese (ja)
Inventor
Tadashi Kirisako
Takeshi Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7172875A priority Critical patent/JPS51147284A/en
Publication of JPS51147284A publication Critical patent/JPS51147284A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: Easy way of formation of embedded layers with different surface resistance.
COPYRIGHT: (C)1976,JPO&Japio
JP7172875A 1975-06-13 1975-06-13 Manufacturing process of semiconductor device Pending JPS51147284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7172875A JPS51147284A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7172875A JPS51147284A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51147284A true JPS51147284A (en) 1976-12-17

Family

ID=13468859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7172875A Pending JPS51147284A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51147284A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105358A (en) * 1979-02-07 1980-08-12 Nec Corp Semiconductor memory

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105358A (en) * 1979-02-07 1980-08-12 Nec Corp Semiconductor memory

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